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Superconducting qubits are one of the most promising physical systems for implementing a quantum computer. However, executing quantum algorithms of practical computational advantage requires further improvements in the fidelities of qubit operations, which are currently limited by the energy relaxation and dephasing times of the qubits. Here, we report our measurement results of a high-coherence transmon qubit with energy relaxation and echo dephasing times surpassing those in the existing literature. We measure a qubit frequency of 2.890 GHz, an energy relaxation time with a median of 502 us and a maximum of (765 +/- 82.6) us, and an echo dephasing time with a median of 541 us and a maximum of (1057 +/- 138) us. We report details of our design, fabrication process, and measurement setup to facilitate the reproduction and wide adoption of high-coherence transmon qubits in the academia and industry., Comment: 10 pages, 8 figures

Quantum processors require a signal-delivery architecture with high addressability (low crosstalk) to ensure high performance already at the scale of dozens of qubits. Signal crosstalk causes inadvertent driving of quantum gates, which will adversely affect quantum-gate fidelities in scaled-up devices. Here, we demonstrate packaged flip-chip superconducting quantum processors with signal-crosstalk performance competitive with those reported in other platforms. For capacitively coupled qubit-drive lines, we find on-resonant crosstalk better than -27 dB (average -37 dB). For inductively coupled magnetic-flux-drive lines, we find less than 0.13 % direct-current flux crosstalk (average 0.05 %). These observed crosstalk levels are adequately small and indicate a decreasing trend with increasing distance, which is promising for further scaling up to larger numbers of qubits. We discuss the implication of our results for the design of a low-crosstalk, on-chip signal delivery architecture, including the influence of a shielding tunnel structure, potential sources of crosstalk, and estimation of crosstalk-induced qubit-gate error in scaled-up quantum processors., Comment: 16 pages, 12 figures, includes appendices

In superconducting quantum processors, the predictability of device parameters is of increasing importance as many labs scale up their systems to larger sizes in a 3D-integrated architecture. In particular, the properties of superconducting resonators must be controlled well to ensure high-fidelity multiplexed readout of qubits. Here we present a method, based on conformal mapping techniques, to predict a resonator's parameters directly from its 2D cross-section, without computationally heavy and time-consuming 3D simulation. We demonstrate the method's validity by comparing the calculated resonator frequency and coupling quality factor with those obtained through 3D finite-element-method simulation and by measurement of 15 resonators in a flip-chip-integrated architecture. We achieve a discrepancy of less than 2% between designed and measured frequencies, for 6-GHz resonators. We also propose a design method that reduces the sensitivity of the resonant frequency to variations in the inter-chip spacing., Comment: Accepted version. 13 pages, 12 figures

High-fidelity and rapid readout of a qubit state is key to quantum computing and communication, and it is a prerequisite for quantum error correction. We present a readout scheme for superconducting qubits that combines two microwave techniques: applying a shelving technique to the qubit that effectively increases the energy-relaxation time, and a two-tone excitation of the readout resonator to distinguish among qubit populations in higher energy levels. Using a machine-learning algorithm to post-process the two-tone measurement results further improves the qubit-state assignment fidelity. We perform single-shot frequency-multiplexed qubit readout, with a 140ns readout time, and demonstrate 99.5% assignment fidelity for two-state readout and 96.9% for three-state readout - without using a quantum-limited amplifier.

We have integrated single and coupled superconducting transmon qubits into flip-chip modules. Each module consists of two chips -- one quantum chip and one control chip -- that are bump-bonded together. We demonstrate time-averaged coherence times exceeding $90\,\mu s$, single-qubit gate fidelities exceeding $99.9\%$, and two-qubit gate fidelities above $98.6\%$. We also present device design methods and discuss the sensitivity of device parameters to variation in interchip spacing. Notably, the additional flip-chip fabrication steps do not degrade the qubit performance compared to our baseline state-of-the-art in single-chip, planar circuits. This integration technique can be extended to the realisation of quantum processors accommodating hundreds of qubits in one module as it offers adequate input/output wiring access to all qubits and couplers., Comment: 33 pages, 12 figures, includes supplementary materials, updated with further calculations on participation ratio and Purcell limit

Entangled microwave photons form a fundamental resource for quantum information processing and sensing with continuous variables. We use a low-loss Josephson metamaterial comprising superconducting, non-linear, asymmetric inductive elements to generate frequency-entangled photons from vacuum fluctuations at a rate of 2 giga entangled bits per second spanning over 4 GHz bandwidth. The device is operated as a traveling wave parametric amplifier under Kerr-relieving biasing conditions. Furthermore, we realize the first successfully demonstration of single-mode squeezing in such devices -- $3.1\pm0.7$\,dB below the zero-point level at half of modulation frequency., Comment: 15 pages, 9 figures including supplement

The scaleup of quantum computers operating in the microwave domain requires advanced control electronics, and the use of integrated components that operate at the temperature of the quantum devices is potentially beneficial. However, such an approach requires ultra-low power dissipation and high signal quality in order to ensure quantum-coherent operations. Here, we report an on-chip device that is based on a Josephson junction coupled to a spiral resonator and is capable of coherent continuous-wave microwave emission. We show that characteristics of the device accurately follow a theory based on a perturbative treatment of the capacitively shunted Josephson junction as a gain element. The infidelity of typical quantum gate operations due to the phase noise of this cryogenic 25-pW microwave source is less than 0.1% up to 10-ms evolution times, which is below the infidelity caused by dephasing in state-of-the-art superconducting qubits. Together with future cryogenic amplitude and phase modulation techniques, our approach may lead to scalable cryogenic control systems for quantum processors.

We present a cryogenic microwave noise source with a characteristic impedance of 50 $\Omega$, which can be installed in a coaxial line of a cryostat. The bath temperature of the noise source is continuously variable between 0.1 K and 5 K without causing significant back-action heating on the sample space. As a proof-of-concept experiment, we perform Y-factor measurements of an amplifier cascade that includes a traveling wave parametric amplifier and a commercial high electron mobility transistor amplifier. We observe system noise temperatures as low as $680^{+20}_{-200}$ mK at 5.7 GHz corresponding to $1.5^{+0.1}_{-0.7}$ excess photons. The system we present has immediate applications in the validation of solid-state qubit readout lines., Comment: The following article has been accepted by Review of Scientific Instruments. After it is published, it will be found at https://doi.org/10.1063/5.0028951

The Lamb shift, an energy shift arising from the presence of the electromagnetic vacuum, has been observed in various quantum systems and established as the part of the energy shift independent of the environmental photon number. However, typical studies are based on simplistic bosonic models which may be challenged in practical quantum devices. We demonstrate a hybrid bosonic-fermionic environment for a linear resonator mode and observe that the photon number in the environment can dramatically increase both the dissipation and the effective Lamb shift of the mode. Our observations are quantitatively described by a first-principles model which we develop here also to guide device design for future quantum-technological applications. The device demonstrated here can be utilized as a fully rf-operated quantum-circuit refrigerator to quickly reset superconducting qubits., Comment: 15 pages, 10 figures

We implement a broadly tunable phase shifter for microwaves based on superconducting quantum interference devices (SQUIDs) and study it both experimentally and theoretically. At different frequencies, a unit transmission coefficient, $|S_{21}|=1$, can be theoretically achieved along a curve where the phase shift is controllable by magnetic flux. The fabricated device consists of three equidistant SQUIDs interrupting a transmission line. We model each SQUID embedded at different positions along the transmission line with two parameters, capacitance and inductance, the values of which we extract from the experiments. In our experiments, the tunability of the phase shift varies from from $0.07\times\pi$ to $0.14\times\pi$ radians along the full-transmission curve with the input frequency ranging from 6.00 to 6.28~GHz. The reported measurements are in good agreement with simulations, which is promising for future design work of phase shifters for different applications.

We report on fast tunability of an electromagnetic environment coupled to a superconducting coplanar waveguide resonator. Namely, we utilize a recently-developed quantum-circuit refrigerator (QCR) to experimentally demonstrate a dynamic tunability in the total damping rate of the resonator up to almost two orders of magnitude. Based on the theory it corresponds to a change in the internal damping rate by nearly four orders of magnitude. The control of the QCR is fully electrical, with the shortest implemented operation times in the range of 10 ns. This experiment constitutes a fast active reset of a superconducting quantum circuit. In the future, a similar scheme can potentially be used to initialize superconducting quantum bits., Comment: 4 pages, 2 figures

Various applications of quantum devices call for an accurate calibration of cryogenic amplification chains. To this end, we present a convenient calibration scheme and use it to accurately measure the total gain and noise temperature of an amplification chain by employing normal-metal--insulator--superconductor (NIS) junctions. Our method is based on the radiation emitted by inelastic electron tunneling across voltage-biased NIS junctions. We derive an analytical equation that relates the generated power to the applied bias voltage which is the only control parameter of the device. After the setup has been characterized using a standard voltage reflection measurement, the total gain and the noise temperature are extracted by fitting the analytical equation to the microwave power measured at the output of the amplification chain. The 1$\sigma$ uncertainty of the total gain of 51.84 dB appears to be of the order of 0.1 dB., Comment: 5 pages, 3 figures

Superconducting quantum circuits are potential candidates to realize a large-scale quantum computer. The envisioned large density of integrated components, however, requires a proper thermal management and control of dissipation. To this end, it is advantageous to utilize tunable dissipation channels and to exploit the optimized heat flow at exceptional points (EPs). Here, we experimentally realize an EP in a superconducting microwave circuit consisting of two resonators. The EP is a singularity point of the Hamiltonian, and corresponds to the most efficient heat transfer between the resonators without oscillation of energy. We observe a crossover from underdamped to overdamped coupling via the EP by utilizing photon-assisted tunneling as an \emph{in situ} tunable dissipative element in one of the resonators. The methods studied here can be applied to different circuits to obtain fast dissipation, for example, for initializing qubits to their ground states. In addition, these results pave the way towards thorough investigation of parity--time ($\mathcal{PT}$) symmetric systems and the spontaneous symmetry breaking in superconducting microwave circuits operating at the level of single energy quanta.

Frequency Domain Multiplexed detector arrays constructed of superconducting Transition Edge Sensors in the current-summing configuration suffer from the finite impedance of the summing node which should ideally be zero. We suggest two circuits to alleviate the effect. The first circuit uses a capacitive resonant transformer to increase the voltages and decrease the currents of TES signals to overcome the parasitic inductance of the interconnections. On the SQUID chip impedance transform to the opposite direction takes place. The second circuit implements a power combiner having a better branch-to-branch isolation than a simple T-junction. Two SQUID devices have been designed and fabricated for a proof-of-principle demonstration of the circuits., Comment: 6 pages, 7 figures

We theoretically propose and experimentally implement a method of measuring a qubit by driving it close to the frequency of a dispersively coupled bosonic mode. The separation of the bosonic states corresponding to different qubit states begins essentially immediately at maximum rate, leading to a speedup in the measurement protocol. Also the bosonic mode can be simultaneously driven to optimize measurement speed and fidelity. We experimentally test this measurement protocol using a superconducting qubit coupled to a resonator mode. For a certain measurement time, we observe that the conventional dispersive readout yields close to 100% higher average measurement error than our protocol. Finally, we use an additional resonator drive to leave the resonator state to vacuum if the qubit is in the ground state during the measurement protocol. This suggests that the proposed measurement technique may become useful in unconditionally resetting the resonator to a vacuum state after the measurement pulse., Comment: Includes supplementary information

Kinetic inductance bolometer (KIB) technology is a candidate for passive sub-millimeter wave and terahertz imaging systems. Its benefits include scalability into large 2D arrays and operation with intermediate cryogenics in the temperature range of 5 -- 10 K. We have previously demonstrated the scalability in terms of device fabrication, optics integration, and cryogenics. In this article, we address the last missing ingredient, the readout. The concept, serial addressed frequency excitation (SAFE), is an alternative to full frequency-division multiplexing at microwave frequencies conventionally used to read out kinetic inductance detectors. We introduce the concept, and analyze the criteria of the multiplexed readout avoiding the degradation of the signal-to-noise ratio in the presence of a thermal anti-alias filter inherent to thermal detectors. We present a practical scalable realization of a readout system integrated into a prototype imager with 8712 detectors. This is used for demonstrating the noise properties of the readout. Furthermore, we present practical detection experiments with a stand-off laboratory-scale imager., Comment: 7 pages, 6 figures

Control of heat flux at small length scales is crucial for numerous solid-state devices and systems. In addition to the thermal management of information and communication devices the mastering of heat transfer channels down to the nanoscale also enable, e.g., new memory concepts, high sensitivity detectors and sensors, energy harvesters and compact solid-state refrigerators. Electronic coolers and thermal detectors for electromagnetic radiation, especially, rely on the maximization of electro-thermal response and blockade of phonon transport. In this work, we propose and demonstrate that efficient electro-thermal operation and phonon transfer blocking can be achieved in a single solid-state thermionic junction. Our experimental demonstration relies on suspended semiconductor-superconductor junctions where the electro-thermal response arises from the superconducting energy gap, and the phonon blocking naturally results from the transmission bottleneck at the junction. We suspend different size degenerately doped silicon chips (up to macroscopic scale) directly from the junctions and cool these by biasing the junctions. The electronic cooling operation characteristics are accompanied by measurement and analysis of the thermal resistance components in the structures indicating the operation principle of phonon blocking in the junctions.

The shift of energy levels owing to broadband electromagnetic vacuum fluctuations, the Lamb shift, has been pivotal in the development of quantum electrodynamics and in understanding atomic spectra. Currently, small energy shifts in engineered quantum systems are of paramount importance owing to the extreme precision requirements in applications such as quantum computing. However, without a tunable environment it is challenging to resolve the Lamb shift in its original broadband case. Consequently, the observations in other than atomic systems are limited to environments comprised of narrow-band modes. Here, we observe a broadband Lamb shift in high-quality superconducting resonators, a scenario also accessing static shifts inaccessible in Lamb's experiment. We measure a continuous change of several megahertz in the fundamental resonator frequency by externally tuning the coupling strength of the engineered broadband environment which is based on hybrid normal-metal--superconductor tunnel junctions. Our results may lead to improved control of dissipation in high-quality engineered quantum systems and open new possibilities for studying synthetic open quantum matter using this hybrid experimental platform.

We present experimental results on a Josephson parametric amplifier tailored for readout of ultra-sensitive thermal microwave detectors. In particular, we discuss the impact of fabrication details on the performance. We show that the small volume of deposited dielectric materials enabled by the side-wall passivated spacer niobium junction technology leads to robust operation across a wide range of operating temperatures up to 1.5 K. The flux-pumped amplifier has gain in excess of 20 dB in three-wave mixing and its center frequency is tunable between 540 MHz and 640 MHz. At 600 MHz, the amplifier adds 105 mK $\pm$ 9 mK of noise, as determined with the hot/cold source method. Phase-sensitive amplification is demonstrated with the device.

Superconducting microwave circuits show great potential for practical quantum technological applications such as quantum information processing. However, fast and on-demand initialization of the quantum degrees of freedom in these devices remains a challenge. Here, we experimentally implement a tunable heat sink that is potentially suitable for the initialization of superconducting qubits. Our device consists of two coupled resonators. The first resonator has a high quality factor and a fixed frequency whereas the second resonator is designed to have a low quality factor and a tunable resonance frequency. We engineer the low quality factor using an on-chip resistor and the frequency tunability using a superconducting quantum interference device. When the two resonators are in resonance, the photons in the high-quality resonator can be efficiently dissipated. We show that the corresponding loaded quality factor can be tuned from above $10^5$ down to a few thousand at 10 GHz in good quantitative agreement with our theoretical model.

We present a structure and a fabrication method for superconducting tunnel junctions down to the dimensions of 200 nm using i-line UV lithography. The key element is a side-wall-passivating spacer structure (SWAPS) which is shaped for smooth crossline contacting and low parasitic capacitance. The SWAPS structure enables formation of junctions with dimensions at or below the lithography-limited linewidth. An additional benefit is avoiding the excessive use of amorphous dielectric materials which is favorable in sub-Kelvin microwave applications often plagued by nonlinear and lossy dielectrics. We apply the structure to niobium trilayer junctions, and provide characterization results yielding evidence on wafer-scale scalability, and critical current density tuning in the range of 0.1 -- 3.0 kA/cm$^2$. We discuss the applicability of the junction process in the context of different applications, such as, SQUID magnetometers and Josephson parametric amplifiers., Comment: 8 pages, 4 figures

Today's supercapacitor energy storages are typically discrete devices aimed for printed boards and power applications. The development of autonomous sensor networks and wearable electronics and the miniaturisation of mobile devices would benefit substantially from solutions in which the energy storage is integrated with the active device. Nanostructures based on porous silicon (PS) provide a route towards integration due to the very high inherent surface area to volume ratio and compatibility with microelectronics fabrication processes. Unfortunately, pristine PS has limited wettability and poor chemical stability in electrolytes and the high resistance of the PS matrix severely limits the power efficiency. In this work, we demonstrate that excellent wettability and electro-chemical properties in aqueous and organic electrolytes can be obtained by coating the PS matrix with an ultra-thin layer of titanium nitride by atomic layer deposition. Our approach leads to very high specific capacitance (15 F/cm$^3$), energy density (1.3 mWh/cm$^3$), power density (up to 214 W/cm$^3$) and excellent stability (more than 13,000 cycles). Furthermore, we show that the PS-TiN nanomaterial can be integrated inside a silicon chip monolithically by combining MEMS and nanofabrication techniques. This leads to realisation of in-chip supercapacitor, i.e., it opens a new way to exploit the otherwise inactive volume of a silicon chip to store energy.

Ultrasensitive magnetic field detection is utilized in the fields of science, medicine and industry. We report on a novel magnetometer relying on the kinetic inductance of superconducting material. The kinetic inductance exhibits a non-linear response with respect to DC current, a fact that is exploited by applying magnetic flux through a superconducting loop to generate a shielding current and a change in the inductance of the loop. The magnetometer is arranged into a resonator, allowing readout through a transmission measurement that makes the device compatible with radio frequency multiplexing techniques. The device is fabricated using a single thin-film layer of NbN, simplifying the fabrication process compared to existing magnetometer technologies considerably. Our experimental data, supported by theory, demonstrates a magnetometer having potential to replace established technology in applications requiring ultra-high sensitivity., Comment: 16 pages, 6 figures