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A silicon‐doped glow discharge polymer (Si‐GDP) was prepared by plasma‐enhanced chemical vapor deposition technique of mixtures of trans‐2‐butene (C4H8), hydrogen (H2), and tetramethylsilane (TMS). The plasma parameters were characterized by mass spectrometry. The film properties of Si‐GDP were investigated by Fourier transform infrared spectroscopy and X‐ray photoelectron spectroscopy. At a TMS flow of 0.15 cm3/min, the radial distribution of the relative intensities of CH fragment ions was uniform, which indicates balanced dissociation and polymerization. As the radial distance increases, the ion energy decreases, and the ratio of sp3/sp2 carbon and the atomic ratio of Si increases. The purpose of this work was to explore correlations between C4H8/H2/TMS plasma parameters and Si‐GDP film properties. [ABSTRACT FROM AUTHOR]

A glow discharge polymer (GDP) was fabricated using trans-2-butene (TB) and hydrogen (H) via a plasma-enhanced chemical vapor deposition (PECVD) system. The uniformity of the GDP films was significantly affected by the radial distribution of the H/TB plasma parameters. The plasma properties while discharging by a multi-carbon gas source of mixed H/TB were investigated during the GDP deposition process. The main positive ions and ion energy distributions in inductively coupled H/TB plasmas were analyzed by energy-resolved mass spectrometer (MS), and the electron density and the effective electron temperature were mainly analyzed using a Langmuir probe. The MS results show that the main positive ions in the plasmas are $${\text{C}}_{ 2} {\text{H}}_{ 4}^{ + }$$ , $${\text{C}}_{ 2} {\text{H}}_{ 6}^{ + }$$ , $${\text{C}}_{ 3} {\text{H}}_{ 3}^{ + }$$ , $${\text{C}}_{ 3} {\text{H}}_{ 6}^{ + }$$ , $${\text{C}}_{ 3} {\text{H}}_{ 8}^{ + }$$ , $${\text{C}}_{ 4} {\text{H}}_{ 5}^{ + }$$ , $${\text{C}}_{ 4} {\text{H}}_{ 1 0}^{ + }$$ , $${\text{C}}_{ 5} {\text{H}}_{ 5}^{ + }$$ , and $${\text{C}}_{ 5} {\text{H}}_{ 7}^{ + }$$ with mass-to-charge ratios (m/e) of 28, 30, 39, 42, 44, 53, 58, 65, and 67, respectively. For a normalized ion intensity, the relative intensities of saturated CH ions increase with increasing radial distance, while the unsaturated CH ions decrease with increasing radial distance. The ion energy distribution of $${\text{C}}_{ 2} {\text{H}}_{ 6}^{ + }$$ (m/e = 30) presents a bimodal structure. Additionally, both the electron density and the effective electron temperature decrease with increasing radial distance. [ABSTRACT FROM AUTHOR]