1. High-performance CMOS circuits fabricated by excimer-laser-annealed poly-Si TFTs on glass substrates
- Author
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K. Ohgata, F. Takeuchi, Nobuo Sasaki, Yasuyoshi Mishima, K. Yoskino, and M. Takei
- Subjects
Materials science ,Excimer laser ,business.industry ,medicine.medical_treatment ,Substrate (electronics) ,Propagation delay ,Electronic, Optical and Magnetic Materials ,Integrated injection logic ,CMOS ,Thin-film transistor ,medicine ,Optoelectronics ,Electrical and Electronic Engineering ,business ,Voltage ,Electronic circuit - Abstract
High-performance CMOS circuits are fabricated from excimer-laser-annealed poly-Si TFTs on a glass substrate (300/spl times/300 mm). The propagation delay time of the 121 stage CMOS ring oscillators with 0.5 /spl mu/m gate length is 0.18 nsec at 5 V supply voltage. The maximum operating frequency of the 40-stage shift registers with 1 /spl mu/m gate length is 133 MHz at 5 V supply voltage. This value is high enough for peripheral CMOS circuits with line-at-a-time addressing.
- Published
- 2001
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