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Structuring Si in arrays of vertical high aspect ratio pillars, ranging from nanoscale to macroscale feature dimensions, is essential for producing functional interfaces for many applications. Arrays of silicon 3D nanostructures are needed to realize photonic and phononic crystals, waveguides, metalenses, X-ray wavefront sensors, detectors. In particular, arrays of Si nanopillars are used as bio-interfaces in neural activity recording, cell culture, microfluidics, sensing and on-chip manipulation. Here, we demonstrate a strategy for realizing arrays of protruding sharp Si nanopillars, using displacement Talbot lithography combined with metal-assisted chemical etching (MacEtch) in gas phase. Such combination enables reliable and low cost pathway for fabrication of ordered nanopillars arrays on large scale. With the double exposure of a linear grating mask in orthogonal orientations and the lift-off technique, we realized a catalyst pattern of holes in a Pt thin film with a period of 1 μm and hole diameter in the range of 100–250 nm. MacEtch in gas phase by using vapor HF and oxygen from air allows to etch arrays of protruding Si nanopillars 200 nm-thick and aspect ratio in the range of 200 (pillar height/width) with an etching rate up to 1 μm/min. Gas-MacEtch has the advantage of no capillary stiction, no ion beam damage of the Si substrate, nanometric resolution and high fidelity of pattern transfer. In combination with controlled uniformity of feature size on large area, spatial frequency doubling and high resolution of Talbot lithography, the proposed method is an easy-to-scale-up processing that can support the fabrication of Si pillars arrays for many valuable applications both at micro and nano-scale., Materials Science in Semiconductor Processing, 157, ISSN:1369-8001

The anisotropic nature of plasma etching is usually exploited to realize vertical nano -/micro-silicon structures by deep reactive ion etching. However, some applications require tilted instead of perpendicular profiles with respect to the substrate. Here, a controlled tilted etching is realized by introducing a set of metal electric field modulator(s), which modify the near sample surface potential. The ions from the plasma body are accelerated under the influence of the distorted electric field, and hit the silicon surface with a certain incident angle. A model is built with finite elements method, taking into account the geometry of the experiment and the chamber conditions during the etching process. The thickness and the inter-distance of Al slabs have been varied in a range of 0.5-3 mm and 10-25 mm, respectively. A tilt angle ranging from 0?degrees to 22.6?degrees has been measured and validates the simulation results, showing that a desired tilt profile can be achieved with a proper parameters tuning. Examples of 1D and 2D modulations are reported with linear and chessboard slanted gratings for X-ray imaging applications., Applied Surface Science, 588, ISSN:0169-4332, ISSN:1873-5584

Dual-phase x-ray grating interferometry (DP-XGI) is a recently developed imaging technique that can retrieve structural information in the sub-micro scale over areas in the millimeter range. This is performed by use of the scattering signal, which is sensitive to structures that lie below the intrinsic spatial resolution of the imaging system. A quantitative understanding of the microstructure is possible when the scattering signal is retrieved within a range of auto-correlation lengths of the features of interest. High visibility of fringes in this length range is desirable, but no straightforward framework exists for choosing design parameters of the imaging system for such optimization. The purpose of this work is to present an optimization protocol for DP-XGI based on a Fresnel propagation simulation framework which evaluates different parameters of the optical system, utilizing the mean visibility of the fringes at the detector plane as a figure of merit to optimize the DP-XGI for a conventional lab x-ray source. The performance of the numerical simulation with realistic component parameters is validated with the experimental results obtained at a lab-based setup. The results of the validation confirm the robustness of the model for the evaluation of the different components of the interferometer and its optimization at low and high energies.

The orientation mismatch between the cone beam of an X-ray tube and the grating lines in a flat substrate remains a big challenge for laboratory grating-based X-ray interferometry, since it severely limits the imaging field of view. Here, we fabricated fan-shaped G 0 source gratings by modulating the electric field during the deep reactive ion etching of silicon. The gold electroplated fan-shaped G 0 grating (3.0 µm pitch) in a 20 keV interferometer improves the uniformity of the field of view with an increase of average visibility from 16.2% to 18.5% and a better angular sensitivity (by a factor 5.8) at the edges.

Displacement Talbot lithography can rapidly pattern periodic nanostructures with high depth of focus over large area. Imperfections in the phase mask profile and the stage movement inaccuracies during the exposure cause linewidth variation in every second line of binary gratings. While this beating is barely visible in patterned photoresist, it leads to substantial depth variation when transferred into high aspect ratio silicon structures, because of micro-loading in deep reactive ion etching. A proper scan range compensated the defect, and a beating-free grating with pitch size of 1 μm and aspect ratio of 54:1 is demonstrated. © 2021 The Japan Society of Applied Physics, Japanese Journal of Applied Physics, 60 (SC), ISSN:0021-4922, ISSN:1347-4065

Objectives Grating-interferometry-based mammography (GIM) might facilitate breast cancer detection, as several research works have demonstrated in a pre-clinical setting, since it is able to provide attenuation, differential phase contrast, and scattering images simultaneously. In order to translate this technique to the clinics, it has to be adapted to cover a large field-of-view within a clinically acceptable exposure time and radiation dose. Methods We set up a grating interferometer that fits into a standard mammography system and fulfilled the aforementioned conditions. Here, we present the first mastectomy images acquired with this experimental device. Results and conclusion Our system performs at a mean glandular dose of 1.6 mGy for a 5-cm-thick, 18%-dense breast, and a field-of-view of 26 × 21 cm2. It seems to be well-suited as basis for a clinical-environment device. Further, dark-field signals seem to support an improved lesion visualization. Evidently, the effective impact of such indications must be evaluated and quantified within the context of a proper reader study. Key Points • Grating-interferometry-based mammography (GIM) might facilitate breast cancer detection, since it is sensitive to refraction and scattering and thus provides additional tissue information. • The most straightforward way to do grating-interferometry in the clinics is to modify a standard mammography device. • In a first approximation, the doses given with this technique seem to be similar to those of conventional mammography.

High quality gratings are among the key elements for successful imaging with X-ray grating interferometry. Grating fabrication, specifically of absorption gratings, with high aspect ratio and large area, is a great challenge from a microfabrication point of view. In this paper the fabrication of absorption gratings by seedless electroplating of gold in high aspect ratio silicon moulds that are fabricated by deep reactive ion etching (Bosch process) is presented. We report on our latest results and discuss the possibility of reducing the grating period down to 1.3 μ m . In addition, the quality of the gratings is assessed by performing visibility measurements and imaging various samples on a compact in house X-ray grating interferometer.

We present a method to produce small pitch gratings for X-ray interferometric imaging applications, allowing the phase sensitivity to be increased and/or the length of the laboratory setup to be minimized. The method is based on fabrication of high aspect ratio silicon microstructures using deep reactive ion etching (Bosch technique) of dense grating arrays and followed by conformal electroplating of Au. We demonstrated that low resistivity Si substrates (, Micromachines, 12 (5), ISSN:2072-666X

Precisely aligned optical components are crucial prerequisites for X-ray tomography at high resolution.We propose a device with a fractal pattern for precise automatic focusing. The device is etched in a Si substrate by deep reactive ion etching and then filled by a self-terminating bottom-up Au electroplating process. The fractal nature of the device produces an X-ray transmission image with globally homogeneous macroscopic visibility and high local contrast for pixel sizes in the range of 0.165 μmto 11 μm, while the high absorption contrast provided between Au and Si enables its use for X-ray energies ranging from12 keV to 40 keV. ISSN:0003-6935 ISSN:1559-128X ISSN:2155-3165

The key optical components of X-ray grating interferometry are gratings, whose profile requirements play the most critical role in acquiring high quality images. The difficulty of etching grating lines with high aspect ratios when the pitch is in the range of a few micrometers has greatly limited imaging applications based on X-ray grating interferometry. A high etching rate with low aspect ratio dependence is crucial for higher X-ray energy applications and good profile control by deep reactive ion etching of grating patterns. To achieve this goal, a modified Coburn&ndash, Winters model was applied in order to study the influence of key etching parameters, such as chamber pressure and etching power. The recipe for deep reactive ion etching was carefully fine-tuned based on the experimental results. Silicon gratings with an area of 70 &times, 70 mm2, pitch size of 1.2 and 2 &mu, m were fabricated using the optimized process with aspect ratio &alpha, of ~67 and 77, respectively.

High aspect ratio nanostructuring requires high precision pattern transfer with highly directional etching. In this work, we demonstrate the fabrication of structures with ultra-high aspect ratios (up to 10 000 : 1) in the nanoscale regime (down to 10 nm) by platinum assisted chemical etching of silicon in the gas phase. The etching gas is created by a vapour of water diluted hydrofluoric acid and a continuous air flow, which works both as an oxidizer and as a gas carrier for reactive species. The high reactivity of platinum as a catalyst and the formation of platinum silicide to improve the stability of the catalyst pattern allow a controlled etching. The method has been successfully applied to produce straight nanowires with section size in the range of 10–100 nm and length of hundreds of micrometres, and X-ray optical elements with feature sizes down to 10 nm and etching depth in the range of tens of micrometres. This work opens the possibility of a low cost etching method for stiction-sensitive nanostructures and a large range of applications where silicon high aspect ratio nanostructures and high precision of pattern transfer are required., Nanoscale Horizons, 5 (5), ISSN:2055-6756, ISSN:2055-6764

Diffractive optics play a key role in hard X‐rays imaging for which many scientific, technological, and biomedical applications exist. Herein, high‐aspect‐ratio microfabrication of gratings for X‐ray interferometry is demonstrated using Pt as a catalyst for the metal assisted chemical etching of Si in a solution of HF and H2O2. The Pt layer is thermally treated to realize a porous catalyst layer that stabilizes the etching of a pattern with a pitch size from 4.8 to 20 μm in the direction perpendicular to the Si substrate and an aspect ratio up to 60:1. The superior etching performance of Pt as a catalyst and its stability in a solution with high HF content are reported in direct comparison with the Au catalyst for the same grating parameters. The Si structure is then used as a template for filling with Au, as a high absorbing X‐ray material. The Pt catalyst layer is used as a conductive seed for Au electroplating. The quality of the overall process is assessed by obtaining a visibility map using 30 μm‐thick Au grating in an X‐ray interferometric setup at 20 keV., Advanced Engineering Materials, 22 (10), ISSN:1438-1656, ISSN:1527-2648

Within neutron imaging, different methods have been developed with the aim to go beyond the conventional contrast modalities, such as grating interferometry. Existing grating interferometers are sensitive to scattering in a single direction only, and thus investigations of anisotropic scattering structures imply the need for a circular scan of either the sample or the gratings. Here we propose an approach that allows assessment of anisotropic scattering in a single acquisition mode and to broaden the range of the investigation with respect to the probed correlation lengths. This is achieved by a far-field grating interferometer with a tailored 2D-design. The combination of a directional neutron dark-field imaging approach with a scan of the sample to detector distance yields to the characterization of the local 2D real-space correlation functions of a strongly oriented sample analogous to conventional small-angle scattering. Our results usher in quantitative and spatially resolved investigations of anisotropic and strongly oriented systems beyond current capabilities., Communications Physics, 3 (1)

The 4D GRAPH-X (Dynamic GRAting-based PHase contrast x-ray imaging) project aims at developing a prototype of an x-ray grating-based phase-contrast imaging scanner in a laboratory setting, which is based on the Moirè single-shot acquisition method in order to be optimized for analysing moving objects (in the specific case, a dynamic thorax phantom), that could evolve into a suitable tool for biomedical applications although it can be extended to other application fields. When designing an x-ray Talbot-Lau interferometer, high visibility and sensitivity are two important figures of merit, strictly related to the performance of the system in obtaining high quality phase contrast and dark-field images. Wave field simulations are performed to optimize the setup specifications and construct a high-resolution and high-sensitivity imaging system. In this work, the design of a dynamic imaging setup using a conventional milli-focus x-ray source is presented. Optimization by wave front simulations leads to a symmetric configuration with 5.25 μm pitch at third Talbot order and 45 keV design energy. The simulated visibility is about 22%. Results from GATE based Monte Carlo simulations show a 19% transmission percentage of the incoming beam into the detector after passing through all the gratings and the sample. Such results are promising in view of building a system optimized for dynamic imaging.

Insights into the micro- and nano-architecture of materials is crucial for understanding and predicting their macroscopic behaviour. In particular, for emerging applications such as meta-materials, the micrometer scale becomes highly relevant. The micro-architecture of such materials can be tailored to exhibit specific mechanical, optical or electromagnetic behaviours. Consequently, quality control at micrometer scale must be guaranteed over extended areas. Mesoscale investigations over millimetre sized areas can be performed by scanning small angle X-ray scattering methods (SAXS). However, due to their long measurement times, real time or operando investigations are hindered. Here we present a method based on X-ray diffractive optics that enables the acquisition of SAXS signals in a single shot (few milliseconds) over extended areas. This method is applicable to a wide range of X-ray sources with varying levels of spatial coherence and monochromaticity, as demonstrated from the experimental results. This enables a scalable solution of spatially resolved SAXS., Nature Communications, 10, ISSN:2041-1723

X-ray phase contrast imaging is a powerful analysis technique for materials science and biomedicine. Here, we report on laboratory grating-based X-ray interferometry employing a microfocus X-ray source and a high Talbot order (35th) asymmetric geometry to achieve high angular sensitivity and high spatial resolution X-ray phase contrast imaging in a compact system (total length µm) and a single-photon counting X-ray detector (75 µm pixel size). The performance of the X-ray interferometer was fully characterized in terms of angular sensitivity and spatial resolution. Finally, the potential of laboratory X-ray phase contrast for biomedical imaging is demonstrated by obtaining high resolution X-ray phase tomographies of a mouse embryo embedded in solid paraffin and a formalin-fixed full-thickness sample of human left ventricle in water with a spatial resolution of 21.5 µm.

Grating-interferometry-based mammography (GIM) might facilitate breast cancer detection, as several research works have demonstrated in a pre-clinical setting, since it is able to provide attenuation, differential phase contrast, and scattering images simultaneously. In order to translate this technique to the clinics, it has to be adapted to cover a large field-of-view within a clinically acceptable exposure time and radiation dose.We set up a grating interferometer that fits into a standard mammography system and fulfilled the aforementioned conditions. Here, we present the first mastectomy images acquired with this experimental device.Our system performs at a mean glandular dose of 1.6 mGy for a 5-cm-thick, 18%-dense breast, and a field-of-view of 26 × 21 cm2. It seems to be well-suited as basis for a clinical-environment device. Further, dark-field signals seem to support an improved lesion visualization. Evidently, the effective impact of such indications must be evaluated and quantified within the context of a proper reader study.• Grating-interferometry-based mammography (GIM) might facilitate breast cancer detection, since it is sensitive to refraction and scattering and thus provides additional tissue information. • The most straightforward way to do grating-interferometry in the clinics is to modify a standard mammography device. • In a first approximation, the doses given with this technique seem to be similar to those of conventional mammography.

Despite the fact that the resolution of conventional contact/proximity lithography can reach feature sizes down to ~0.5-0.6 micrometers, the accurate control of the linewidth and uniformity becomes already very challenging for gratings with periods in the range of 1-2 {\mu}m. This is particularly relevant for the exposure of large areas and wafers thinner than 300{\mu}m. If the wafer or mask surface is not fully flat due to any kind of defects, such as bowing/warpage or remaining topography of the surface in case of overlay exposures, noticeable linewidth variations or complete failure of lithography step will occur. We utilized the newly developed Displacement Talbot lithography to pattern gratings with equal lines and spaces and periods in the range of 1.0 to 2.4 {\mu}m. The exposures in this lithography process do not require contact between the mask and the wafer, which makes it essentially insensitive to surface planarity and enables exposures with very high linewidth uniformity on thin and even slightly deformed wafers. We demonstrated pattern transfer of such exposures into Si substrates by reactive ion etching using the Bosch process. An etching depth of 30 {\mu}m or more for the whole range of periods was achieved, which corresponds to very high aspect ratios up to 60:1. The application of the fabricated gratings in phase contrast x-ray imaging is presented.

Grating interferometry mammography (GIM) is an experimental breast imaging method at the edge of being clinically implemented. Besides attenuation, GIM can measure the refraction and scattering of x-rays resulting in differential phase contrast (DPC) and dark-field (DF) images. In this exploratory study, we assessed the feasibility of using microbubbles as a contrast agent in GIM. Two millilitres of microbubbles and iodine were respectively injected into ex vivo breast phantoms, consisting of fresh chicken breasts. Native and postcontrast images were acquired with a clinically compatible GIM setup, operated at 38 kVp, 14-s acquisition time, and with a dose of 1.3 mGy. The visibility of the contrast agents was analysed in a side-by-side comparison by three radiologists. The contrast-to-noise-ratio (CNR) was calculated for each contrast agent. We found that both contrast agents were judged to be visible by the readers. The mean CNR was 3.1 ± 1.9 for microbubbles in DF and 24.2 ± 6.5 for iodine in attenuation. In conclusion, this is a first proof-of-mechanism study that microbubbles could be used as a contrast agent in clinically compatible GIM, due to their scattering properties, which implies the potential use of a contrast agent with a high safety profile in x-ray-based breast imaging. ISSN:2509-9280

Grating-based X-ray phase-contrast interferometry has a high application impact in material science and medicine for imaging of weakly absorbing (low Z) materials and soft tissues. For the absorbing gratings, casting of highly x-ray absorbing metals, such as Au and Pb alloys, has proven to be a viable way to generate large area periodic high aspect ratio microstructures. In this paper, we review the grating fabrication strategy with a special focus on a novel approach of casting low temperature melting alloys (Au-Sn and Pbbased alloy) into Si grating templates using hot embossing. The process, similar to nanoimprint lithography, requires particular adjusting efforts of process parameters as a function of the metal alloy and the grating feature size. The transition between solid and liquid state depends on the alloy phase diagram, the applied pressure can damage the high aspect ratio Si lamellas and the microstructure of the solid metal can affect the grating structure. We demonstrate that metal casting by hot embossing can be used to fabricate gratings on large area (up to 70x70 mm2) with aspect ratio up to 50:1 and pitch in the range of 1-20 {\mu}m.

X-ray grating interferometry is an excellent technique for X-ray phase contrast imaging and X-ray wavefront sensing with applications in materials science, biology and medical diagnosis. Among other requirements, the method depends on the availability of highly X-ray absorbing metallic gratings. Here, we report on the fabrication and characterization of high aspect ratio iridium gratings with a period of one micrometer and a depth of 30 micrometer combining deep reactive ion etching of silicon and atomic layer deposition of iridium. The implementation of such structures can greatly enhance the sensitivity of grating-based X-ray phase contrast imaging and thus, expand further its broad range of applications.

Rationale Up to now, there is no 'gold standard' for determining the resolution of a mass spectrometry imaging (MSI) setup (comprising the instrument, the sample preparation, the sample and the instrument settings). A standard sample in combination with a standard protocol to define the MSI resolution would be desirable in order to compare the setups of different laboratories, and as a regular quality control/performance check. Methods Microstructured resolution patterns were fabricated that can be used to determine the spatial resolution in MSI experiments, down to the range of a few µm. Two different strategies were employed, one where the resolution pattern is laser machined into a thin metal foil, which can be placed over a sample to be imaged, and a second one where hydrophilic grooves are machined into an omniphobic coating covering the surface of an indium tin oxide covered glass slide. When dragging a sample solution over the slide's surface, the sample is automatically retained in the hydrophilic grooves, but repelled by the omniphobic coating. Results The technology was tested on a commercial matrix-assisted laser desorption/ionization (MALDI) imaging instrument, and a spatial resolution in the vicinity of 50 µm was determined. The finest features of the microstructured resolution patterns are compatible with the best spatial resolution of MALDI imaging systems available to date. Conclusions The use of metal resolution grids or glass slides with hydrophilic/hydrophobic structures is suitable for the convenient determination of the resolution limit of the MALDI imaging instrument as determined by its hardware. These structures are straightforward both to produce and to use. Copyright © 2015 John Wiley & Sons, Ltd.

The laser processing of cutting tool edges is growing rapidly due to its flexibility, short cycle times and negligible waste. However, the quality of the tool and its cutting edge can vary greatly with different laser parameters and processing strategies. The generation of a graphitic carbon layer and a heat affected zone (HAZ) could occur during laser processing which is expected to reduce the quality and lifetime of the cutting tool. By using focussed ion beam (FIB) techniques to generate a cross section, the graphitic carbon layer and heat affected zone are characterised quantitatively and qualitatively for laser processes and as a reference, lapping and wire electro-discharge machining processes, used in the generation of polycrystalline diamond composite cutting tool edges. A focus is put on laser based techniques which vary in pulse duration from long microsecond pulses down to ultrashort picosecond pulses. A deep insight into the focussed ion beam techniques used and extensive analysis through Raman spectroscopy and energy dispersive X-ray spectroscopy (EDX) into the laser–material interactions are presented.

Neutron imaging and scattering give data of significantly different nature and traditional methods leave a gap of accessible structure sizes at around 10 micrometers. Only in recent years overlap in the probed size ranges could be achieved by independent application of high resolution scattering and imaging methods, however without providing full structural information when microstructures vary on a macroscopic scale. In this study we show how quantitative neutron dark-field imaging with a novel experimental approach provides both sub-pixel resolution with respect to microscopic correlation lengths and imaging of macroscopic variations of the microstructure. Thus it provides combined information on multiple length scales. A dispersion of micrometer sized polystyrene colloids was chosen as a model system to study gravity induced crystallisation of microspheres on a macro scale, including the identification of ordered as well as unordered phases. Our results pave the way to study heterogeneous systems locally in a previously impossible manner., Scientific Reports, 7, ISSN:2045-2322

Wet etching is an essential and complex step in semiconductor device processing. Metal-Assisted Chemical Etching (MacEtch) is fundamentally a wet but anisotropic etching method. In the MacEtch technique, there are still a number of unresolved challenges preventing the optimal fabrication of high-aspect-ratio semiconductor micro- and nanostructures, such as undesired etching, uncontrolled catalyst movement, non-uniformity and micro-porosity in the metal-free areas. Here, an optimized MacEtch process using a nanostructured Au catalyst is proposed for fabrication of Si high aspect ratio microstructures. The addition of isopropanol as surfactant in the HF-H 2 O 2 water solution improves the uniformity and the control of the H 2 gas release. An additional KOH etching removes eventually the unwanted nanowires left by the MacEtch through the nanoporous catalyst film. We demonstrate the benefits of the isopropanol addition for reducing the etching rate and the nanoporosity of etched structures with a monotonic decrease as a function of the isopropanol concentration.

Small angle x-ray scattering has been proven to be a valuable method for accessing structural information below the spatial resolution limit implied by direct imaging. Here, we theoretically derive the relation that links the subpixel differential phase signal provided by the sample to the moments of scattering distributions accessible by refraction sensitive x-ray imaging techniques. As an important special case we explain the scatter or dark-field contrast in terms of the sample’s phase signal. Further, we establish that, for binary phase objects, the nth moment scales with the difference of the refractive index decrement to the power of n. Finally, we experimentally demonstrate the utility of the moments by quantitatively determining the particle sizes of a range of powders with a laboratory-based setup., Physical Review Letters, 118 (26), ISSN:0031-9007, ISSN:1079-7114

Studying cell-to-cell heterogeneity requires techniques which robustly deliver reproducible results with single-cell sensitivity. Through a new fabrication method for the microarrays for mass spectrometry (MAMS) platform, we now have attained robustness and reproducibility in our single-cell level mass spectrometry measurements that allowed us to combine single-cell MAMS-based measurements from different days and samples. By combining multiple measurements, we were able to identify three co-existing phenotypes in an isogenic population of Saccharomyces cerevisiae characterized by distinctively different levels of glycolytic intermediates., The Analyst, 139 (22), ISSN:0003-2654, ISSN:1364-5528

Single-cell level measurements are necessary to characterize the intrinsic biological variability in a population of cells. In this study, we demonstrate that, with the microarrays for mass spectrometry platform, we are able to observe this variability. We monitor environmentally (2-deoxy- d -glucose) and genetically (ΔPFK2) perturbed Saccharomyces cerevisiae cells at the single-cell, few-cell, and population levels. Correlation plots between metabolites from the glycolytic pathway, as well as with the observed ATP/ADP ratio as a measure of cellular energy charge, give biological insight that is not accessible from population-level metabolomic data.

Dense colloidal dispersions exhibit complex wave-vector-dependent diffusion, which is controlled by both direct particle interactions and indirect nonadditive hydrodynamic interactions mediated by the solvent. In bulk the hydrodynamic interactions are probed routinely, but in confined geometries their studies have been hitherto hindered by additional complications due to confining walls. Here we solve this issue by combining high-energy x-ray photon correlation spectroscopy and small-angle x-ray-scattering experiments on colloid-filled microfluidic channels to yield the confined fluid's hydrodynamic function in the short-time limit. Most importantly, we find the confined fluid to exhibit a strongly anisotropic hydrodynamic function, similar to its anisotropic structure factor. This observation is important in order to guide future theoretical research.

The collective diffusion of dense fluids in spatial confinement is studied by combining high-energy (21 keV) x-ray photon correlation spectroscopy and small-angle x-ray scattering from colloid-filled microfluidic channels. We find the structural relaxation in confinement to be slower compared to the bulk. The collective dynamics is wave vector dependent, akin to the de Gennes narrowing typically observed in bulk fluids. However, in stark contrast to the bulk, the structure factor and de Gennes narrowing in confinement are anisotropic. These experimental observations are essential in order to develop a microscopic theoretical description of collective diffusion of dense fluids in confined geometries., Physical Review Letters, 116 (16), ISSN:0031-9007, ISSN:1079-7114

Self-assembly gold nanostructured membranes are created to mechanically stabilize the catalyst movement during metal assisted chemical etching. This results in an improved vertical control of the etching profile for high aspect ratio silicon microstructures. The new method is a robust and cheap microfabrication for dense micro-patterns on a large area, such as diffraction gratings for hard X-ray phase contrast imaging and metrology.

X-ray scattering imaging can provide complementary information to conventional absorption based radiographic imaging about the unresolved microstructures of a sample. The scattering signal can be accessed with various methods based on coherent illumination, which span from self-imaging to speckle scanning. The directional sensitivity of the existing real space imaging methods is limited to a few directions on the imaging plane and requires scanning of the optical components, or the rotation of either the sample or the imaging setup, in order to cover the full range of possible scattering directions. In this Letter the authors propose a new method that allows the simultaneous acquisition of scattering images in all possible directions in a single shot. This is achieved by a specialized phase grating and a detector with sufficient spatial resolution to record the generated interference fringe. The structural length scale sensitivity of the system can be tuned by varying its geometry for a fixed grating design. Taking into account ongoing developments in the field of compact x-ray sources that allow high brightness and sufficient spatial coherence, the applicability of omnidirectional scattering imaging in industrial and medical settings is boosted significantly.

Biosensing with nanoholes is one of the most promising applications of nanoplasmonic devices. The sensor properties, however, are complex due to coupled resonances through propagating and localized surface plasmons. This Full Paper demonstrates experimental and simulation studies on different plasmonic hole systems, namely various patterns of circular holes in gold films. In contrast to most previous work, here, the challenging situation of optically thin films is considered. The refractive-index-sensing properties, such as sensitive locations in the nanostructure and sensitive spectral features, are investigated. The multiple multipole program provides the complete field distribution in the nanostructure for different wavelengths. It is shown that the spectral feature most sensitive to refractive-index changes is the extinction minimum, rather than the maximum. The results are consistent with theory for perfect electrical conductors. The spectral response is investigated for molecular adsorption at different positions inside or outside a hole. Furthermore, the optical properties of nanohole arrays with long-range and short-range order are compared and found to demonstrate remarkable similarities. Our results help to predict the resonance wavelengths of nanoholes with arbitrary patterns, including short-range order. The results presented here are highly important since they extend and challenge several aspects of the current understanding of plasmon resonances in nanohole arrays. These theoretical models, simulation results, and experimental data together help provide the understanding necessary for the development of efficient biomolecular analysis tools based on metallic nanoholes.

Scanning transmission X-ray microscopy (STXM) is a powerful imaging technique, in which a small X-ray probe is raster scanned across a specimen. Complete knowledge of the complex-valued transmission function of the specimen can be gained using detection schemes whose every-day use, however, is often hindered by the need of specialized configured detectors or by slow or noisy readout of area detectors. We report on sub-50. nm-resolution STXM studies in the hard X-ray regime using the PILATUS, a fully pixelated fast framing detector operated in single-photon counting mode. We demonstrate a range of imaging modes, including phase contrast and dark-field imaging. © 2010 Elsevier B.V.

A technique to produce diffractive X-ray lenses optimized for high heat load applications is demonstrated. The lenses are made from single crystal silicon membranes, which have uniform thermal conductivity and homogeneous thermal expansion. Silicon Fresnel zone plates with an outermost zone width down to 30nm were produced by means of electron beam lithography and reactive ion etching. They were tested in conventional synchrotron light sources in a full-field transmission X-ray microscope and in a scanning transmission X-ray microscope. Features below 35nm were resolved. High resolution in combination with ability to withstand high heat load radiation make them a potential candidate for the new generation of X-ray sources based on the free electron laser principle.

Planar light guide plate with one in-coupling and N out-coupling surface relief gratings is designed to perform as optical backplane broadcasting system for board-to-board connections. The performance of the element is analyzed theoretically with rigorous electromagnetic theory and results are confirmed experimentally. In addition, optical backplane elements have been replicated using conventional injection molding and UV-replication techniques.

We developed a fabrication method for free-standing metal structures with high aspect ratios to manufacture inductive grid filters for infrared rejection. Deep grooves in thermally evaporated SiO"2 layer, fabricated by electron beam lithography and etching, were filled with iridium by atomic layer deposition technique. Characterization shows that the fabricated structures can suppress infrared radiation over two orders of magnitude while transmitting 40% of XUV radiation.

We present a macroscopic formalism to describe the second-order nonlinear optical response of nanostructures. Rapid variations in local nonlinearity and electric field distributions on scales smaller than a wavelength preclude a simple, direct relationship between the macroscopic and nanoscopic nonlinear response functions in arrays of metal nanoparticles. We develop an approach that bypasses these difficulties by focusing on the macroscopic nonlinear optical response of the sample in terms of the input and output fields. The main advantage of this macroscopic formalism is that it naturally includes contributions from higher multipoles, although symmetry properties can be addressed using electric-dipole-type selection rules. It is limited by being specific to the experimental geometry, although experimental variations are expected to provide additional insight into the underlying physical processes. The formalism is applied to the second-harmonic response of an array of L-shaped gold nanoparticles.