Search

Your search keyword '"Muralt, Paul"' showing total 576 results
Start Over Author "Muralt, Paul"
576 results on '"Muralt, Paul"'

1. Fabrication, characterization, and simulation of glass devices with AlN-thin-film-transducers for excitation of ultrasound resonances

Author

Steckel, André G., Bruus, Henrik, Muralt, Paul, and Matloub, Ramin

Subjects
Physics - Applied Physics
Abstract

We present fabrication of 570-um-thick, millimeter-sized soda-lime-silicate float glass blocks with a 1-um-thick AlN-thin-film piezoelectric transducer sandwiched between thin metallic electrodes and deposited on the top surface. The electro-mechanical properties are characterized by electrical impedance measurements in the frequency range from 0.1 to 10 MHz with a peak-to-peak voltage of 0.5 V applied to the electrodes. We measured the electrical impedance spectra of 35 devices, all of width 2 mm, but with 9 different lengths ranging from 2 to 6 mm and with 2-7 copies of each individual geometry. Each impedance spectrum exhibits many resonance peaks, of which we carefully measured the 5 most prominent ones in each spectrum. We compare the resulting 173 experimental resonance frequencies with the simulation result of a finite-element-method model that we have developed. When using material parameters from the manufacturer, we obtain an average relative deviation of the 173 simulated resonance frequencies from the experimental ones of (-4.2 +/-0.04)%. When optimizing the values of the Young's modulus and the Poisson ratio of the float glass in the simulation, this relative deviation decreased to (-0.03 +/- 0.04)%. Our results suggest a method for an accurate in-situ determination of the acoustic parameters at ultrasound frequencies of any elastic solid onto which a thin-film transducer can be attached, Comment: 9 pages, 5 pdf figures, RevTex

Published
2020
Full Text
View/download PDF

3. Effect of Oxygen Defects Blocking Barriers on Gadolinium Doped Ceria (GDC) Electro-Chemo-Mechanical Properties

Author

Kabir, Ahsanul, Santucci, Simone, Van Nong, Ngo, Varenik, Maxim, Lubomirsky, Igor, Nigon, Robin, Muralt, Paul, and Esposito, Vincenzo

Subjects
Condensed Matter - Materials Science, Physics - Chemical Physics
Abstract

Some oxygen defective metal oxides, such as cerium and bismuth oxides, have recently shown exceptional electrostrictive properties that are even superior to the best performing lead-based electrostrictors, e.g. lead-magnesium-niobates (PMN). Compared to piezoelectric ceramics, electromechanical mechanisms of such materials do not depend on crystalline symmetry, but on the concentration of oxygen vacancy in the lattice. In this work, we investigate for the first time the role of oxygen defect configuration on the electro-chemo-mechanical properties. This is achieved by tuning the oxygen defects blocking barrier density in polycrystalline gadolinium doped ceria with known oxygen vacancy concentration, Ce0.9Gd0.1O2-x,x= 0.05. Nanometric starting powders of ca. 12 nm are sintered in different conditions, including field assisted spark plasma sintering (SPS), fast firing and conventional method at high temperatures. These approaches allow controlling grain size and Gd-dopant diffusion, i.e. via thermally driven solute drag mechanism. By correlating the electro-chemo-mechanical properties, we show that oxygen vacancy distribution in the materials play a key role in ceria electrostriction, overcoming the expected contributions from grain size and dopant concentration.

Published
2019
Full Text
View/download PDF

4. Effect of AlN Seed Layer on Crystallographic Characterization of Piezoelectric AlN

Author

Howell, Kaitlin M., Bashir, Waqas, de Pastina, Annalisa, Matloub, Ramin, Muralt, Paul, and Villanueva, Luis G.

Subjects
Physics - Applied Physics
Abstract

Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric response, x-ray diffraction has become an important metrology step. However, signals from layers deposited below the piezoelectric (PZE) AlN thin film may skew the crystallographic analysis and give misleading results. In this work, we compare the use of a Ti or AlN seed layer on the crystallographic quality of PZE AlN. We also analyze the influence of several AlN seed layer thicknesses on the rocking curve FWHM of PZE AlN and demonstrate an larger effect of the AlN seed layer on the {\theta}-2{\theta} AlN <0002> crystallographic peak for increasing AlN seed layer thickness., Comment: 16 pages, 4 figures, 1 table

Published
2018

5. Controlled Electronic and Magnetic Landscape in Self‐Assembled Complex Oxide Heterostructures

Author

Park, Dae‐Sung, primary, Rata, Aurora Diana, additional, Dahm, Rasmus Tindal, additional, Chu, Kanghyun, additional, Gan, Yulin, additional, Maznichenko, Igor, additional, Ostanin, Sergey, additional, Trier, Felix, additional, Baik, Hionsuck, additional, Choi, Woo Seok, additional, Choi, Chel‐Jong, additional, Kim, Young Heon, additional, Rees, Gregory Jon, additional, Gíslason, Hafliði Pétur, additional, Buczek, Paweł Adam, additional, Mertig, Ingrid, additional, Ionescu, Mihai Adrian, additional, Ernst, Arthur, additional, Dörr, Kathrin, additional, Muralt, Paul, additional, and Pryds, Nini, additional

Published
2023
Full Text
View/download PDF

6. List of contributors

Author

Aalto, Timo, primary, Airaksinen, Veli-Matti, additional, Albert, Stephan Gerhard, additional, Allegato, Giorgio, additional, Amiotti, Marco, additional, Anttila, Olli, additional, Auersperg, Juergen, additional, Bonucci, Antonio, additional, Bose, Indranil Ronnie, additional, Braun, Tanja, additional, Broas, Mikael, additional, Burggraf, J., additional, Cameron, Christopher, additional, Candler, Rob N., additional, Cao, Zhen, additional, Cardoso, André, additional, Chen, Kuo-Shen, additional, Conte, Andrea, additional, Cozma, Adriana, additional, Davis, Cristina E., additional, Dempwolf, Sophia, additional, Dixit, Pradeep, additional, Dost, Michael, additional, Dragoi, Viorel, additional, Eränen, Simo, additional, Fain, Bruno, additional, Figeys, B., additional, Fischer, Andreas C., additional, Flötgen, Christoph, additional, Franssila, Sami, additional, Friedberger, Alois, additional, Fueldner, Marc, additional, Ganchenkova, Maria, additional, Gonzalez, Pilar, additional, Gosálvez, Miguel A., additional, Grimes, Michael, additional, Haapalinna, Atte, additional, Hagelin, Paul, additional, Hammond, Paul, additional, Henttinen, Kimmo, additional, Henttonen, Vesa, additional, Horsley, David, additional, Hoshi, Takeo, additional, Itoh, Satoshi, additional, Jakobsen, Henrik, additional, Jansen, R., additional, Jonsson, Kerstin, additional, Kähler, Dirk, additional, Kannojia, Harindra Kumar, additional, Kattelus, Hannu, additional, Kissinger, Gudrun, additional, Knechtel, Roy, additional, Knese, Kathrin, additional, Kolari, Kai, additional, Koskenvuori, Mika, additional, Kuisma, Heikki, additional, Kulkarni, Amit, additional, Laermer, Franz, additional, Landesberger, Christof, additional, Leinenbach, Christina, additional, LeVasseur, Michael K., additional, Li, Jue, additional, Lin, Yuyuan, additional, Lindner, Paul F., additional, Lodewijks, K., additional, Lofink, Fabian, additional, Longoni, Giorgio, additional, Luber, Sebastian Markus, additional, Mahmud-ul-hasan, M., additional, Mäkinen, Jari, additional, Mäntysalo, Matti, additional, Martin, Devin, additional, Maspero, Federico, additional, Mattila, Toni T., additional, Mauri, Luca, additional, Merz, Peter, additional, Meyer, Doug, additional, Moraja, Marco, additional, Motooka, Teruaki, additional, Müller, Gerhard, additional, Muralt, Paul, additional, Nieminen, Risto M., additional, Niklaus, Frank, additional, Oggioni, Laura, additional, Olkkonen, Juuso, additional, Österlund, Elmeri, additional, Ou, Kuang-Shun, additional, Paloheimo, Jari, additional, Pasanen, Toni P., additional, Paulasto-Kröckel, Mervi, additional, Plach, Thomas, additional, Polizzi, Jean-Philippe, additional, Pressel, Klaus, additional, Putkonen, Matti, additional, Puurunen, Riikka L., additional, Reinert, Wolfgang, additional, Rizzi, Enea, additional, Rochus, V., additional, Ross, Glenn, additional, Rottenberg, X., additional, Sainiemi, Lauri, additional, Savin, Hele, additional, Schenk, Harald, additional, Schikowski, Marc, additional, Schulze, Matthias, additional, Seema, S., additional, Severi, S., additional, Skogström, Lasse, additional, Suga, Tadatomo, additional, Sullivan, Scott, additional, Suni, Tommi, additional, Theuss, Horst, additional, Tilli, Markku, additional, Tilmans, H.A.C., additional, Tittonen, Ilkka, additional, Tofteberg, Hannah, additional, Törmä, Pekka, additional, Tuomikoski, Santeri, additional, Tyholdt, Frode, additional, Uda, Tsuyoshi, additional, Vallin, Örjan, additional, Valzasina, Carlo, additional, Veijola, Timo, additional, Viinikka, Eeva, additional, Vogel, Dietmar, additional, Vogl, Andreas, additional, Vuorinen, Vesa, additional, Westervelde, W.J., additional, Wicht, Sebastian, additional, Wieland, Robert, additional, Winkler, Bernhard, additional, Yobas, Levent, additional, Zanotti, Luca, additional, and Zubel, I., additional

Published
2020
Full Text
View/download PDF

9. Piezoelectric thin films for MEMS

Author

Kanno, Isaku, primary, Ouyang, Jun, additional, Akedo, Jun, additional, Yoshimura, Takeshi, additional, Malič, Barbara, additional, and Muralt, Paul, additional

Published
2023
Full Text
View/download PDF

14. Controlled Electronic and Magnetic Landscape in Self-Assembled Complex Oxide Heterostructures

Author

Park, Daesung, primary, Rata, A. Diana, additional, Dahm, Rasmus, additional, Gan, Yulin, additional, Maznichenko, Igor, additional, Ostanin, Sergey, additional, Trier, Felix, additional, Choi, Woo Seok, additional, Choi, Chel-Jong, additional, Kim, Young Heon, additional, Rees, Gregory, additional, Chu, Kanghyun, additional, Gíslason, Hafliði, additional, Buczek, Pawel, additional, Mertig, Ingrid, additional, Ionescu, Adrian, additional, Ernst, Arthur, additional, Dörr, Kathrin, additional, Muralt, Paul, additional, and Pryds, Nini, additional

Published
2022
Full Text
View/download PDF

15. A thermally self-sustained micro-power plant with integrated micro-solid oxide fuel cells, micro-reformer and functional micro-fluidic carrier

Author

Scherrer, Barbara, Evans, Anna, Santis-Alvarez, Alejandro J., Jiang, Bo, Martynczuk, Julia, Galinski, Henning, Nabavi, Majid, Prestat, Michel, Tölke, René, Bieberle-Hütter, Anja, Poulikakos, Dimos, Muralt, Paul, Niedermann, Philippe, Dommann, Alex, Maeder, Thomas, Heeb, Peter, Straessle, Valentin, Muller, Claude, and Gauckler, Ludwig J.

Published
2014
Full Text
View/download PDF

23. List of Contributors

Author

Aalto, Timo, primary, Airaksinen, Veli-Matti, additional, Amiotti, Marco, additional, Anttila, Olli, additional, Bonucci, Antonio, additional, Brudziński, K., additional, Candler, Rob N., additional, Cao, Zhen, additional, Chen, Kuo-Shen, additional, Conte, Andrea, additional, Davis, Cristina E., additional, Dixit, Pradeep, additional, Dragoi, Viorel, additional, Eränen, Simo, additional, Fischer, Andreas C., additional, Franssila, Sami, additional, Friedberger, Alois, additional, Ganchenkova, Maria, additional, Gonzalez, Pilar, additional, Gosálvez, Miguel A., additional, Gronicz, J., additional, Haapalinna, Atte, additional, Hagelin, Paul M., additional, Hammond, Paul, additional, Henttinen, Kimmo, additional, Horsley, David, additional, Inoue, Akihisa, additional, Jakobsen, Henrik, additional, Jonsson, Kerstin, additional, Kähler, Dirk, additional, Kattelus, Hannu, additional, Knechtel, Roy, additional, Knese, Kathrin, additional, Kolari, Kai, additional, Koskenvuori, Mika, additional, Kuisma, Heikki, additional, Kulkarni, Amit, additional, Laermer, Franz, additional, Lapadatu, Adriana Cozma, additional, Leinenbach, Christina, additional, LeVasseur, Michael K., additional, Li, Jue, additional, Lindner, Paul, additional, Lindroos, Veikki, additional, Lofink, Fabian, additional, Longoni, Giorgio, additional, Mäkinen, Jari, additional, Mäntysalo, Matti, additional, Martin, Devin, additional, Mattila, Toni, additional, Mauri, Luca, additional, Merz, Peter, additional, Meyer, Doug, additional, Moraja, Marco, additional, Motooka, Teruaki, additional, Müller, Gerhard, additional, Muralt, Paul, additional, Nagao, S., additional, Nieminen, Risto M., additional, Niklaus, Frank, additional, Nowak, R., additional, Olkkonen, Juuso, additional, Ou, Kuang-Shun, additional, Paloheimo, Jari, additional, Paulasto-Kröckel, Mervi, additional, Pohjonen, Helena, additional, Pressel, Klaus, additional, Putkonen, Matti, additional, Puurunen, Riikka L., additional, Reinert, Wolfgang, additional, Rizzi, Enea, additional, Rottenberg, Xavier, additional, Ryhänen, Tapani, additional, Sainiemi, Lauri, additional, Savin, Hele, additional, Sharma, Parmanand, additional, Sullivan, Scott, additional, Suni, Tommi, additional, Theuss, Horst, additional, Tilli, Markku, additional, Tittonen, Ilkka, additional, Tofteberg, Hannah, additional, Törmä, Pekka, additional, Tuomikoski, Santeri, additional, Tyholdt, Frode, additional, Uda, Tsuyoshi, additional, Vallin, Örjan, additional, Veijola, Timo, additional, Viinikka, Eeva, additional, Vogl, Andreas, additional, Vuorinen, Vesa, additional, Yobas, Levent, additional, Zachariasz, P., additional, and Zubel, I., additional

Published
2015
Full Text
View/download PDF

25. Atomically engineered interfaces yield extraordinary electrostriction

Author

Pryds, Nini, primary, Zhang, Haiwu, additional, Park, Dae-Sung, additional, Gauquelin, Nicolas, additional, Santucci, Simone, additional, Christensen, Dennis, additional, Jannis, Daen, additional, Chezganov, Dmitry, additional, Rata, Diana, additional, Castelli, Ivano, additional, Verbeeck, Johan, additional, Lubomirsky, Igor, additional, Muralt, Paul, additional, Damjanovic, Dragan, additional, and Esposito, Vincenzo, additional

Published
2021
Full Text
View/download PDF

29. A micro-solid oxide fuel cell system as battery replacement

Author

Bieberle-Hütter, Anja, Beckel, Daniel, Infortuna, Anna, Muecke, Ulrich P., Rupp, Jennifer L.M., Gauckler, Ludwig J., Rey-Mermet, Samuel, Muralt, Paul, Bieri, Nicole R., Hotz, Nico, Stutz, Michael J., Poulikakos, Dimos, Heeb, Peter, Müller, Patrik, Bernard, André, Gmür, Roman, and Hocker, Thomas

Published
2008
Full Text
View/download PDF

31. Self‐Poled Heteroepitaxial Bi(1−x)DyxFeO3 Films with Promising Pyroelectric Properties.

Author

Micard, Quentin, Clementi, Giacomo, Bartasyte, Ausrine, Muralt, Paul, Condorelli, Guglielmo G., and Malandrino, Graziella

Subjects
METAL organic chemical vapor deposition, PYROELECTRICITY, LEAD titanate, ENERGY harvesting, THIN films, PERMITTIVITY measurement, DIELECTRIC properties
Abstract

Pyroelectric materials are very promising for thermal energy harvesting applications. To date, lead‐based systems are the foremost studied materials in this field. A facile and simple metal organic chemical vapor deposition route is applied for the fabrication of lead‐free, high quality, epitaxial Bi(1−x)DyxFeO3 (x = 0, 0.06, 0.08, 0.11) thin films deposited on conductive SrTiO3:Nb (100) single crystal substrates. The films are studied by structural, morphological, compositional, and functional characterization. The correlation between the Dy‐doping amount and the dielectric properties is thoroughly investigated. Unipolar polarization–electric field loops and permittivity measurements show the important impact of Dy on ferroelectric, dielectric, and pyroelectric properties. Dy doping increases considerably the dielectric response, but much more the pyroelectric coefficient, up to a concentration of 8% Dy. The films are self‐poled, which is an ideal situation for pyroelectric applications. The best figure of merit for pyroelectric energy harvesting, FE, is 82 J m−3 K−2, showing a factor increase of 2.6 as compared to the undoped film of the sample series. It constitutes a factor 4.5 improvement as compared to previous results obtained on BiFeO3 based thin films. [ABSTRACT FROM AUTHOR]

Published
2022
Full Text
View/download PDF

32. High-Q AlN/Si[O.sub.2] symmetric composite thin film bulk acoustic wave resonators

Author

Artieda, Alvaro and Muralt, Paul

Subjects
Resonators -- Composition, Resonators -- Design and construction, Silica -- Electric properties, Sound-waves -- Analysis, Business, Electronics, Electronics and electrical industries
Abstract

High-Q resonators with a symmetric composite layer Si[O.sub.2]-AlN[Si[O.sub.2] between the electrodes are developed. The temperature drift has disclosed the impact of the Si[O.sub.2] layers, which is more pronounced on the first harmonic, reducing the TCF to 4 ppm/K for the 3rd harmonic of the 310 nm oxide devices.

Published
2008

33. Characterization of sol-gel Pb([Zr.sub.0.53][Ti.sub.0.47])[O.sub.3] in thin film bulk acoustic resonators

Author

Conde, Janine and Muralt, Paul

Subjects
Coating processes -- Analysis, Lead alloys -- Acoustic properties, Lead alloys -- Structure, Resonators -- Design and construction, Dielectric films -- Composition, Thin films -- Composition, Business, Electronics, Electronics and electrical industries
Abstract

The design and fabrication of {111}-textured Pb([Zr.sub.0.53][Ti.sub.0.47])[O.sub.3] (PZT) deposited by the sol-gel technique in thin film bulk acoustic resonators (TFBAR's) at a resonance frequency of about 1 GHz is discussed. A hysteretic change in the resonance and antiresonance frequency was observed with applied bias.

Published
2008

38. Tuning of direct current bias-induced resonances in micromachined [Ba.sub.0.3][Sr.sub.0.7]Ti[O.sub.3] thin-film capacitors

Author

Noeth, Andreas, Yamada, Tomoaki, Sherman, Vladimir O, Muralt, Paul, Tagantsev, Alexander K, and Setter, Nava

Subjects
Direct current -- Observations, Dielectric films -- Research, Dielectric films -- Electric properties, Thin films -- Research, Thin films -- Electric properties, Physics
Abstract

Direct current (dc) bias-induced acoustic resonance phenomena is observed in micromachined tunable thin-film capacitors based on paraelectric [Ba.sub.0.3][Sr.sub.0.7]Ti[O.sub.3] thin films. The frequency of the first-order resonance has shifted down with increasing bias, whereas the antiresonance frequency might shift up or down with increasing bias.

Published
2007

39. DC bias-dependent shift of the resonance frequencies in BST thin film membranes

Author

Noeth, Andreas, Yamada, Tomoaki, Sherman, Vladimir O., Muralt, Paul, Tagantsev, Alexander K., and Setter, Nava

Subjects
Resonance -- Measurement, Resonators -- Usage, Dielectric films -- Design and construction, Dielectric films -- Research, Thin films -- Design and construction, Thin films -- Research, Business, Electronics, Electronics and electrical industries
Abstract

Micromachining technology was used for the fabrication of a [Ba.sub.x][Sr.sub.1-x]Ti[O.sub.3] (BST)-based thin film resonator. Direct current (DC) bias-dependent acoustic resonance phenomena were observed in the resonators.

Published
2007

40. A highly sensitive Pb(Zr,Ti)[O.sub.3] thin film ultrasonic micro-sensor with a grooved diaphragm

Author

Matsushima, Tomoaki, Sibei Xiong, Kawada, Hiroshi, Yamanaka, Hiroshi, and Muralt, Paul

Subjects
Microelectromechanical systems -- Usage, Ultrasound imaging -- Acoustic properties, Business, Electronics, Electronics and electrical industries
Abstract

Si-based microelectromechanical systems (MEMS) technique was used for the development of a highly sensitive piezoelectric ultrasonic micro-sensor with a grooved multilayer membrane. Findings revealed the sensitivity of the ultrasonic sensor with the groove structure to be about 500 V/Pa.

Published
2007

41. Annealing effect on dislocations in SrTi[O.sub.3]/LaAl[O.sub.3] heterostructures

Author

Dong Su, Yamada, Tomoaki, Sherman, Vladimir O., Tagantsev, Alexander K., Muralt, Paul, and Setter, Nava

Subjects
Annealing -- Analysis, Dielectric films -- Thermal properties, Dielectric films -- Electric properties, Thin films -- Thermal properties, Thin films -- Electric properties, Epitaxy -- Research, Physics
Abstract

The epitaxial SrTi[O.sub.3] thin films were deposited on (001) LaAl[O.sub.3 single crystals by pulsed laser deposition to study the postannealing effect at 1100 degree Celsius in [O.sub.2] atmosphere for 4 h. The structural and dielectric characterizations indicate that the enhancement of permittivity is mainly due to the relaxation of the misfit strain between the film and substrate.

Published
2007

42. Piezoelectric thin films: Evaluation of electrical and electrochemical characteristics for MEMS devices

Author

Prume, Klaus, Muralt, Paul, Calame, Florian, Schmitz-Kempen, Thorsten, and Tiedke, Stephan

Subjects
Microelectromechanical systems -- Electric properties, Microelectromechanical systems -- Chemical properties, Dielectric films -- Electric properties, Dielectric films -- Chemical properties, Thin films -- Electric properties, Thin films -- Chemical properties, Laser interferometers -- Usage, Business, Electronics, Electronics and electrical industries
Abstract

A four-point bending setup, when combined with a single- or double-beam laser interferometer can be used to measure the electrical and electrochemical characteristics of piezoelectric thin films, used in microelectromechanical systems (MEMS) devices. The method proved to be extremely useful, as it can measure the important characteristics of the films, including their dielectric coefficient, as well as their large signal electrical polarization.

Published
2007

43. Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Author

Muralt, Paul, Ledermann, Nicolas, Baborowski, Jacek, Barzegar, Abdolghaffar, Gentil, Sandrine, Belgaccem, Brahim, Petitgrand, Sylvain, Bosseboeuf, Alain, and Setter, Nava

Subjects
Ultrasonic transducers -- Design and construction, Dielectric films -- Design and construction, Thin films -- Design and construction, Titanates -- Electric properties, Lead compounds -- Electric properties, Business, Electronics, Electronics and electrical industries
Abstract

A study of fabrication and characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-micrometer thick Pb(Zro.53Tio.47O3) (PZT) thin films is described. A transmit-receive experiment with two quasi-identical pMUTs showed significant signal transmission up to a distance of 20cm in air and 2 cm in the test liquid.

Published
2005

44. Structural and dielectric properties of strain-controlled epitaxial SrTiO3 thin films by two-step growth technique

Author

Yamada, Tomoaki, Astafiev, Konstantin F., Sherman, Vladimir O., Tagantsev, Alexander K., Setter, Nava, Dong Su, and Muralt, Paul

Subjects
Dielectric films -- Design and construction, Thin films -- Design and construction, Titanium compounds -- Electric properties, Physics
Abstract

Structural and dielectric properties of strain-controlled epitaxial SrTiO3 (STO) films by two-step growth technique are investigated using in situ and ex situ observations. In the two-step grown film, the first layer accumulates defects, which leads to two effects of strain relaxation and lower loss of the film.

Published
2005

45. Bandpass filters for 8 GHz using solidly mounted bulk acoustic wave resonators

Author

Lanz, Roman and Muralt, Paul

Subjects
Sound-waves -- Electric properties, Resonators -- Design and construction, Electric filters, Bandpass -- Design and construction, Business, Electronics, Electronics and electrical industries
Abstract

Frequency shift, design, and fabrication issues are investigated for the realization of 8 GHz bandpass filters based on AIN thin film bulk acoustic wave resonators. Bandpass filters at 8 GHz are successfully fabricated with -5.5 db insertion loss, -26 dB out-of-band rejection, 99 MHz plusmin 0.2 dB channel bandwidth and 224 MHz 3 dB bandwidth.

Published
2005

48. Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

Author

Dubois, Marc-Alexandre and Muralt, Paul

Subjects
Physics -- Research, Piezoelectricity -- Research, Thin films -- Research, Physics
Abstract

Research describing the characteristics of aluminium nitride thin films is presented. In particular the influence of the substrate and the processing procedures on the internal stress and piezoelectric properties of the films are investigated.

Published
2001

50. Resonant PZT MEMS Mirror with Segmented Electrodes

Author

Piot, Adrien, primary, Pribosek, Jaka, additional, Maufay, Jordan, additional, Schicker, Johannes, additional, Tortschanoff, Andreas, additional, Matloub, Ramin, additional, Muralt, Paul, additional, and Moridi, Mohssen, additional

Published
2020
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results