1. Modeling of High-Current Polycrystalline Silicon Thin Film Transistors by Incorporating Buried Electrode
- Author
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Peng Zhang, Emmanuel Jacques, Regis Rogel, Laurent Pichon, Olivier Bonnaud, Nanjing University of Posts and Telecommunications [Nanjing] (NJUPT), Institut d'Électronique et des Technologies du numéRique (IETR), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS)-Nantes Université - pôle Sciences et technologie, Nantes Université (Nantes Univ)-Nantes Université (Nantes Univ), and This work was supported by the Natural Science Foundation of Jiangsu Province (BK20180762), and also sponsored by NUPTSF (Grant No. NY219099).
- Subjects
Materials Chemistry ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Electrical and Electronic Engineering ,Condensed Matter Physics ,Electronic, Optical and Magnetic Materials - Abstract
International audience; For display applications, high current and large on/off current ratio are pursued for driving and switching transistors. In this article, a thin film transistor (TFT) device incorporating a buried electrode is proposed, which enables increasing the driving current by reducing the channel length, with the channel length only at the drain side. This lateral short-channel TFT enables increasing the on-current while maintaining the field effect mobility, in comparison to our experimental short-channel vertical TFT structure. Another advantage of the proposed structure lies in the suppression of the Schottky barrier at the source and drain contacts when using high-work-function source/drain contacts for an N-type TFT, with an increased on/off current ratio reaching approximately 106. The suppression of Schottky barrier at the source/drain has been verified by the contact resistance measurements. Even though high driving current is obtained, the off-current is still high due to the weakened electric field at the source/drain sides and needs to be further optimized.
- Published
- 2022
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