1. Commercialization of Micro-fabrication of Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Studies of the Cosmic Microwave Background
- Author
-
Aritoki Suzuki, Nicholas P. Palaio, Natalie A. Roe, Maurice Garcia-Sciveres, Adrian T. Lee, Chris Bebek, Stephen Holland, Leo Steinmetz, and Akito Kusaka
- Subjects
General Physics ,Fabrication ,Physics::Instrumentation and Detectors ,Classical Physics ,Cosmic microwave background ,Micro-fabrication ,Polarimetry ,FOS: Physical sciences ,Astrophysics::Cosmology and Extragalactic Astrophysics ,Dichroic glass ,01 natural sciences ,law.invention ,Optics ,law ,Polarization ,0103 physical sciences ,General Materials Science ,Wafer ,010306 general physics ,Instrumentation and Methods for Astrophysics (astro-ph.IM) ,Mathematical Physics ,Physics ,010308 nuclear & particles physics ,business.industry ,Detector ,Bolometer ,Astrophysics::Instrumentation and Methods for Astrophysics ,Condensed Matter Physics ,Inflation ,Atomic and Molecular Physics, and Optics ,TES bolometer ,B-mode ,Transition edge sensor ,Astrophysics - Instrumentation and Methods for Astrophysics ,business ,astro-ph.IM - Abstract
We report on the development of commercially fabricated multi-chroic antenna coupled Transition Edge Sensor (TES) bolometer arrays for Cosmic Microwave Background (CMB) polarimetry experiments. CMB polarimetry experiments have deployed instruments in stages. Stage-II experiments deployed with O(1,000) detectors and reported successful detection of B-mode (divergent free) polarization pattern in the CMB. Stage-III experiments have recently started observing with O(10,000) detectors with wider frequency coverage. A concept for a Stage-IV experiment, CMB-S4, is emerging to make a definitive measurement of CMB polarization from the ground with O(400,000) detectors. The orders of magnitude increase in detector count for CMB-S4 requires a new approach in detector fabrication to increase fabrication throughput.and reduce cost. We report on collaborative efforts with two commercial micro-fabrication foundries to fabricate antenna coupled TES bolometer detectors. The detector design is based on the sinuous antenna coupled dichroic detector from the POLARBEAR-2 experiment. The TES bolometers showed the expected I-V response and the RF performance agrees with simulation. We will discuss the motivation, design consideration, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments., 5 pages 2 figures Journal of Low Temperature Physics - Special Edition - LTD17 Proceedings
- Published
- 2018
- Full Text
- View/download PDF