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We demonstrate the integration of micro-electro-mechanical-systems (MEMS) scanning mirrors as active elements for the local optical pumping of ultra-cold atoms in a magneto-optical trap. A pair of MEMS mirrors steer a focused resonant beam through a cloud of trapped atoms shelved in the \textit{F}=1 ground-state of \textsuperscript{87}Rb for spatially-selective fluorescence of the atom cloud. Two-dimensional control is demonstrated by forming geometrical patterns along the imaging axis of the cold atom ensemble. Such control of the atomic ensemble with a microfabricated mirror pair could find applications in single atom selection, local optical pumping and arbitrary cloud shaping. This approach has significant potential for miniaturisation and in creating portable control systems for quantum optic experiments., 4 pages, 3 figures

Homogeneous illumination in single-molecule localization microscopy (SMLM) is key for the quantitative analysis of super-resolution images. Therefore, different approaches for flat-field illumination have been introduced as alternative to the conventional Gaussian illumination. Here, we introduce a single microelectromechanical systems (MEMS) mirror as a tuneable and cost-effective device for adapting wide-field illumination in SMLM. In flat-field mode the MEMS allowed for consistent SMLM metrics across the entire field of view. Employing single-molecule photoswitching, we developed a simple yet powerful routine to benchmark different illumination schemes on the basis of local emitter brightness and ON-state lifetime. Moreover, we propose that tuning the MEMS beyond optimal flat-field conditions enables to study the kinetics of photoswitchable fluorophores within a single acquisition.

Homogeneous illumination in single-molecule localization microscopy (SMLM) is key for the quantitative analysis of super-resolution images. Therefore, different approaches for flat-field illumination have been introduced as alternative to the conventional Gaussian illumination. Here, we introduce a single microelectromechanical systems (MEMS) mirror as a tuneable and cost-effective device for adapting wide-field illumination in SMLM. In flat-field mode the MEMS allowed for consistent SMLM metrics across the entire field of view. Employing single-molecule photoswitching, we developed a simple yet powerful routine to benchmark different illumination schemes on the basis of local emitter brightness and ON-state lifetime. Moreover, we propose that tuning the MEMS beyond optimal flat-field conditions enables to study the kinetics of photoswitchable fluorophores within a single acquisition.

We present a high-frequency, tunable, piezoelectric MEMS resonant scanner producing an optical scan angle of more than 2° at frequencies above 100 kHz, with non-contact frequency tuning capabilities. The device is fabricated using a cost-efficient multiuser silicon-on-insulator (SOI) process. The scanner uses thin-film piezoelectric aluminium nitride actuators to drive out-of-plane rotation of a 200 µm diameter mirror plate through mechanical coupling stages. Up to 3.6 kHz frequency tuning is achieved through on-chip thermally actuated non-contact beam tips placed adjacent to the scanner. The scanner is intended for use in small-scale, fast optomechanical applications requiring careful synchronization through frequency tuning.

We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.

We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-on-insulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.