1. Buried Power Rail Integration With FinFETs for Ultimate CMOS Scaling
- Author
-
Gupta, Anshul, primary, Pedreira, Olalla Varela, additional, Arutchelvan, Goutham, additional, Zahedmanesh, Houman, additional, Devriendt, Katia, additional, Mertens, Hans, additional, Tao, Zheng, additional, Ritzenthaler, Romain, additional, Wang, Shouhua, additional, Radisic, Dunja, additional, Kenis, Karine, additional, Teugels, Lieve, additional, Sebai, Farid, additional, Lorant, Christophe, additional, Jourdan, Nicolas, additional, Chan, Boon Teik, additional, Subramanian, Sujith, additional, Schleicher, Filip, additional, Hopf, Toby, additional, Peter, Antony Premkumar, additional, Rassoul, Nouredine, additional, Debruyn, Haroen, additional, Demonie, Ingrid, additional, Siew, Yong Kong, additional, Chiarella, Thomas, additional, Briggs, Basoene, additional, Zhou, Xiuju, additional, Rosseel, Erik, additional, De Keersgieter, An, additional, Capogreco, Elena, additional, Litta, Eugenio Dentoni, additional, Boccardi, Guillaume, additional, Baudot, Sylvain, additional, Mannaert, Geert, additional, Bontemps, Noemie, additional, Sepulveda, A., additional, Mertens, Sofie, additional, Kim, Min-Soo, additional, Dupuy, Emmanuel, additional, Vandersmissen, Kevin, additional, Paolillo, Sara, additional, Yakimets, Dmitry, additional, Chehab, Bilal, additional, Favia, Paola, additional, Drijbooms, Christel, additional, Cousserier, Joris, additional, Jaysankar, Manoj, additional, Lazzarino, Frederic, additional, Morin, Pierre, additional, Altamirano, Efrain, additional, Mitard, Jerome, additional, Wilson, Christopher J., additional, Holsteyns, Frank, additional, Boemmels, Juergen, additional, Demuynck, Steven, additional, Tokei, Zsolt, additional, and Horiguchi, Naoto, additional
- Published
- 2020
- Full Text
- View/download PDF