1. Optical Sensor Methodology for Measuring Shift, Thickness, Refractive Index and Tilt Angle of Thin Films
- Author
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Anton Nalimov, Sergey Stafeev, Victor Kotlyar, and Elena Kozlova
- Subjects
spiral zone plate ,thickness sensor ,displacement sensor ,Applied optics. Photonics ,TA1501-1820 - Abstract
We propose a simple optical method and device design for the non-contact determination of small shift, thickness, refractive index, and tilt angle of thin films. The proposed sensor consists of a laser light source, a third- or two-order spiral amplitude zone plate with a high numerical aperture, and a CCD camera connected to a computer. It is shown that the third-order zone plate transforms the incident Gaussian beam into a three-petal rotating beam. By measuring the rotation angle of the three-petal intensity distribution, one can measure the following: a minimum shift along the optical axis of about 7 nm (the wavelength is 532 nm), a change in the plate thickness by 3 nm, a change in the tilt angle of the plate by 0.1 degrees, and a change in the refractive index by 0.01.
- Published
- 2023
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