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Direct observation of the capture cross section is challenging due to the need for extremely short filling pulses in the two-gate Deep-Level Transient Spectroscopy (DLTS). Simple estimation of the cross section can be done from DLTS and admittance spectroscopy data but it is not feasible to distinguish temperature dependence of pre-exponential and exponential parts of the emission rate equation with sufficient precision conducting a single experiment. This paper presents experimental data of deep levels in β-Ga2O3 that has been gathered by our group since 2017. Based on the gathered data, we propose a derivation of apparent activation energy (E a m) and capture cross section (σ n m) assuming the temperature dependent capture via the multiphonon emission model, which resulted in a strong correlation between E a m and σ n m according to the Meyer–Neldel rule, which allowed us to estimate low- and high-temperature capture coefficients C 0 and C 1 as well as capture barrier E b. It also has been shown that without considering the temperature dependence of capture cross section, the experimental values of σ n are overestimated by 1–3 orders of magnitude. A careful consideration of the data also allows to be more certain identifying deep levels by their "fingerprints" (E a and σ n) considering two additional parameters (E M N and σ 00) and to verify the density functional theory computation of deep-level recombination properties. [ABSTRACT FROM AUTHOR]

We report the electrical properties, deep trap spectra, and diffusion lengths of non-equilibrium carriers in Ni Schottky diodes and NiO/Ga2O3 heterojunctions (HJs) prepared on the same n−/n+ β-Ga2O3 epi structures. The heterojunctions decrease the reverse current of Ga2O3 high-power rectifiers. In HJs, in contrast to Schottky diodes, the capacitance and AC conductance show a prominent frequency and temperature dependence, suggesting the presence of two temperature activation processes with activation energies of 0.17 and 0.1 eV. The deep trap spectra of the Schottky diodes and HJs differ by the absence in the HJ of deep electron traps E2* with level near Ec − 0.7 eV considered to be an important center of non-radiative recombination. This correlates with the observed increase in the diffusion length of non-equilibrium charge carriers in the HJs to 370 nm compared to 240 nm in the Schottky diodes. The diffusion length of charge carriers in p-NiO was found to be quite short, 30 nm. Possible reasons for the observed differences and possible origin of the minority-trap-like feature commonly reported to be present in the deep level spectra of HJs and also observed in our experiments are discussed. [ABSTRACT FROM AUTHOR]

Ion beam fabrication of metastable polymorphs of Ga2O3, assisted by the controllable accumulation of the disorder in the lattice, is an interesting alternative to conventional deposition techniques. However, the adjustability of the electrical properties in such films is unexplored. In this work, we investigated two strategies for tuning the electron concentration in the ion beam created metastable κ-polymorph: adding silicon donors by ion implantation and adding hydrogen via plasma treatments. Importantly, all heat treatments were limited to ≤600 °C, set by the thermal stability of the ion beam fabricated polymorph. Under these conditions, silicon doping did not change the high resistive state caused by the iron acceptors in the initial wafer and residual defects accumulated upon the implants. Conversely, treating samples in a hydrogen plasma converted the ion beam fabricated κ-polymorph to n-type, with a net donor density in the low 1012 cm−3 range and dominating deep traps near 0.6 eV below the conduction band. The mechanism explaining this n-type conductivity change may be due to hydrogen forming shallow donor complexes with gallium vacancies and/or possibly passivating a fraction of the iron acceptors responsible for the high resistivity in the initial wafers. [ABSTRACT FROM AUTHOR]

The changes of electrical properties and deep trap spectra induced in n-type β-Ga2O3 by 1 GeV protons with a fluence of 4 × 1013 cm−2 were studied. The carrier removal rates were ∼100 cm−1 at this energy. For comparison, for 20 MeV proton irradiation at comparable fluences (5–10 × 1014 cm−2), the removal rate was ∼400 cm−1 for donor concentrations of 3 × 1016 cm−3 and ∼100 cm−1 for concentrations of <1016 cm−3. These removal rates were in stark contrast with modeling results that predicted the introduction rates of vacancies to be two orders of magnitude higher for 20 MeV protons. Measurements of deep electron and hole traps densities by deep level transient spectroscopy with electrical or optical injection (DLTS or ODLTS), and capacitance–voltage profiling under monochromatic light illumination showed that the 1 GeV proton irradiation resulted in the introduction of deep donors E2*(Ec-0.75 eV) and E3 (Ec-1 eV) and deep acceptors with optical ionization threshold near 2.3 eV producing a feature near 250 K in ODLTS and 3.1 eV with related ODLTS feature near 450 K. The total concentration of all deep traps was much lower than that necessary to explain the observed decrease in net donor density upon irradiation. The donor densities showed a nonuniform distribution in proton irradiated films with the concentration greatly decreased toward the surface. Possible reasons for the observed performance are discussed. [ABSTRACT FROM AUTHOR]

The changes of electrical properties and deep trap spectra induced in n-type β-Ga2O3 by 1 GeV protons with a fluence of 4 × 1013 cm−2 were studied. The carrier removal rates were ∼100 cm−1 at this energy. For comparison, for 20 MeV proton irradiation at comparable fluences (5–10 × 1014 cm−2), the removal rate was ∼400 cm−1 for donor concentrations of 3 × 1016 cm−3 and ∼100 cm−1 for concentrations of <1016 cm−3. These removal rates were in stark contrast with modeling results that predicted the introduction rates of vacancies to be two orders of magnitude higher for 20 MeV protons. Measurements of deep electron and hole traps densities by deep level transient spectroscopy with electrical or optical injection (DLTS or ODLTS), and capacitance–voltage profiling under monochromatic light illumination showed that the 1 GeV proton irradiation resulted in the introduction of deep donors E2*(Ec-0.75 eV) and E3 (Ec-1 eV) and deep acceptors with optical ionization threshold near 2.3 eV producing a feature near 250 K in ODLTS and 3.1 eV with related ODLTS feature near 450 K. The total concentration of all deep traps was much lower than that necessary to explain the observed decrease in net donor density upon irradiation. The donor densities showed a nonuniform distribution in proton irradiated films with the concentration greatly decreased toward the surface. Possible reasons for the observed performance are discussed. [ABSTRACT FROM AUTHOR]

The effects of 20 MeV proton irradiation with fluences of 5 × 1014 and 1015 p/cm2 on electrical properties of lightly Sn doped n-type (net donor concentration 3 × 1017 cm−3) bulk β-Ga2O3 samples with (010) and (−201) orientation were studied. Proton irradiation decreases the net donor density with a removal rate close to 200 cm−1 for both orientations and similar to the electron removal rates in lightly Si doped β-Ga2O3 epilayers. The main deep electron traps introduced in the β-Ga2O3 crystals of both orientations are near Ec−0.45 eV, while in Si doped films, the dominant centers were the so-called E2* (Ec−0.75 eV) and E3 (Ec−0.1 eV) traps. Deep acceptor spectra in our bulk –Ga2O3(Sn) crystals were dominated by the well-known centers with an optical ionization energy of near 2.3 eV, often attributed to split Ga vacancies. These deep acceptors are present in a higher concentration and are introduced by protons at a higher rate for the (010) orientation. Another important difference between the two orientations is the introduction in the surface region (∼0.1 μm from the surface) of the (010) of a very high density of deep acceptors with a level near Ec−0.27 eV, not observed in high densities in the (−201) orientation or in Si doped epitaxial layers. The presence of these traps gives rise to a very pronounced hysteresis in the low temperature forward current–voltage characteristics of the (010) samples. These results are yet another indication of a significant impact of the orientation of the β-Ga2O3 crystals on their properties, in this case, after proton irradiation. [ABSTRACT FROM AUTHOR]

The luminescent and recombination properties of V-pit defects in p-GaN(Mg) grown by metalorganic chemical vapor deposition (MOCVD) were studied by scanning electron microscopy (SEM) in the secondary electron, cathodoluminescence (CL), and electron beam induced current (EBIC) modes, combined with CL spectra measurements and EBIC collection efficiency measurements. Similar studies were performed on low-dislocation-density freestanding n-GaN crystals. For MOCVD p-GaN films, the SEM investigations were supplemented by capacitance–voltage, current–voltage, deep level transient spectroscopy analysis with Ni Schottky diode, and Ohmic contacts. These experiments show that V-pits in p-GaN increase the leakage current of Schottky diodes, as in n-GaN films and crystals. EBIC imaging and EBIC collection efficiency results suggest that in the region of V-pits, a parasitic p–n junction is formed. We also observe that, in V-pits, the CL spectra the contribution of the 3.2 eV defect band is strongly enhanced compared to the 3 eV blue CL band that dominates the spectra. [ABSTRACT FROM AUTHOR]

Bulk n-type β-Ga2O3 samples with orientation (−201) and (010) were exposed to a high density hydrogen plasma at 330 °C for 0.5 h. The effects were radically different for the two orientations. For the (−201) sample, H plasma exposure increased the net surface concentration of shallow donors from 2.7 × 1017 cm−3 to 2.6 × 1018 cm−3, with the shallow donors having an ionization energy close to 20 meV as deduced from the temperature dependence of the series resistance of Ni Schottky diodes. By sharp contrast, H plasma exposure of the (010) sample led to a strong decrease in the net shallow donor density from 3.2 × 1017 cm−3 to below 1015 cm−3 in the top 0.9 μm of the sample and to 3.2 × 1016 cm−3 near the edge of the space charge region at 0 V, with the total width of the region affected by plasma treatment being close to 1.1 μm. For both orientations, we observed a major decrease in the concentration of the dominant E2 traps near Ec-0.82 eV related to Fe acceptors. The deep trap spectra in hydrogenated samples were dominated by the E2* traps commonly ascribed to native defects in β-Ga2O3. The peak of these traps with a level near Ec-0.74 eV was masked in the starting samples by the peak of the E2 Fe acceptors present in high concentration, so that E2* only broadened the Fe peak on the low temperature side, but could be revealed by the modeling of the spectra. The concentration of the E2* center was not strongly affected in the hydrogen-treated samples with orientation (010), but in the (−201) samples, the concentration of the E2* peak was greatly enhanced. The results are discussed in conjunction with previous reports on hydrogen plasma treatment of β-Ga2O3 and on obtaining p-type conductivity in the surface layers of β-Ga2O3 crystals annealed in molecular hydrogen at high temperatures [Islam et al., Sci. Rep. 10, 6134 (2020)]. [ABSTRACT FROM AUTHOR]

Defects created in lightly Sn-doped (2 × 1016 cm−3) (010)-oriented bulk β-Ga2O3 implanted with 1.2 MeV, 3 × 1015 cm−2 197Au+ ions before and after treatment in hydrogen plasmas at 330 °C were studied by X-ray measurements, Rutherford backscattering spectra, capacitance–voltage, current–voltage, admittance spectra and deep level transient spectroscopy. Au implantation creates defects that produce total depletion of carriers in the top 1.5 µm and introduces electron traps with energy levels at Ec-0.7 eV, Ec-1.05 eV, Ec-0.45 eV, and deep acceptors with optical ionization thresholds near 1.3 eV, 2.3 eV and 3.1 eV, similar to the centers dominating the spectra of deep traps in β-Ga2O3. Hydrogen plasma treatment greatly enhances the photocurrent and photo-capacitance and decreases the width of the insulating layer produced by Au implantation. The results can be explained by hydrogen passivation of the triply charged Ga vacancies and doubly charged split Ga vacancies acceptors in the implanted region, returning part of this region to n-type conductivity. [ABSTRACT FROM AUTHOR]

Changes induced by irradiation with 1.1 MeV protons in the transport properties and deep trap spectra of thick (>80 μm) undoped κ-Ga2O3 layers grown on sapphire are reported. Prior to irradiation, the films had a donor concentration of ∼1015 cm−3, with the two dominant donors having ionization energies of 0.25 and 0.15 eV, respectively. The main electron traps were located at Ec−0.7 eV. Deep acceptor spectra measured by capacitance-voltage profiling under illumination showed optical ionization thresholds near 2, 2.8, and 3.4 eV. The diffusion length of nonequilibrium charge carriers for ɛ-Ga2O3 was 70 ± 5 nm prior to irradiation. After irradiation with 1.1 MeV protons to a fluence of 1014 cm−2, there was total depletion of mobile charge carriers in the top 4.5 μm of the film, close to the estimated proton range. The carrier removal rate was 10–20 cm−1, a factor of 5–10 lower than in β-Ga2O3, while the concentration of deep acceptors in the lower half of the bandgap and the diffusion length showed no significant change. [ABSTRACT FROM AUTHOR]

Two types of near-UV light-emitting diodes (LEDs) with an InGaN/GaN single quantum well (QW) differing only in the presence or absence of an underlayer (UL) consisting of an InAlN/GaN superlattice (SL) were examined. The InAlN-based ULs were previously shown to dramatically improve internal quantum efficiency of near-UV LEDs, via a decrease in the density of deep traps responsible for nonradiative recombination in the QW region. The main differences between samples with and without UL were (a) a higher compensation of Mg acceptors in the p-GaN:Mg contact layer of the sample without UL, which correlates with the presence of traps with an activation energy of 0.06 eV in the QW region, (b) the presence of deep electron traps with levels 0.6 eV below the conduction band edge (Ec) (ET1) and at Ec 0.77 eV (ET2) in the n-GaN spacer underneath the QW, and the presence of hole traps (HT1) in the QW, 0.73 eV above the valence band edge in the sample without UL (no traps could be detected in the sample with UL), and (c) a high density of deep traps with optical ionization energy close to 1.5 eV for the LEDs without UL. Irradiation with 5 MeV electrons led to a strong decrease in the electroluminescence (EL) intensity in the LEDs without UL, while for the samples with UL, such irradiation had little effect on the EL signal at high driving current, although the level of driving currents necessary to have a measurable EL signal increased by about an order of magnitude. This is despite the 5 times higher starting EL signal of the sample with UL. Irradiation also led to the appearance in the LEDs with UL of the ET1 and HT1 deep traps, but with concentration much lower than without the UL, and to a considerable increase in the Mg compensation ratio. [ABSTRACT FROM AUTHOR]

Some green light emitting diodes (LEDs) based on GaN/InGaN multiquantum-well (MQW) structures exhibit strong frequency and temperature dependence of capacitance and prominent changes in capacitance–voltage profiles with temperature that make it difficult to obtain reliable deep level transient spectroscopy (DLTS) measurements. DLTS performed at low probing signal frequency and with constant capacitance between the measurements by controlling applied bias mitigates these issues. This allows measurement of deep electron and hole traps in specific quantum wells (QWs) in the MQW structure. The dominant electron and hole traps detected have levels near Ec− (0.45–0.5) eV and Ev+ (0.6–0.63) eV. Their density increases significantly after aging for a long period (2120 h) at high driving current and elevated temperature. The reason for the observed anomalies in DLTS spectra of these green LEDs is the high density of states in the QWs with activation energies near 0.08, 0.12–0.14, and 0.3 eV, detected in admittance spectra, and, for the 0.08 eV and 0.3 eV, these states are likely related to defects. [ABSTRACT FROM AUTHOR]

The electric field dependence of emission rate of the deep traps with level near Ec−0.6 eV, so-called E1 traps, was studied by means of deep level transient spectroscopy measurements over a wide range of applied voltages. The traps were initially introduced by 900 °C ampoule annealing in molecular hydrogen. The results indicate the activation energy of the centers and the ratio of high-field to low-field electron emission rates at a fixed temperature scale as the square root of electric field, suggesting that the centers behave as deep donors. The possible microscopic nature of the centers in view of recent theoretical calculations is discussed. The most likely candidates for the E1 centers are SiGa1–H or SnGa2–H complexes. [ABSTRACT FROM AUTHOR]

The spatial distribution of electron-hole pair generation in β-Ga2O3 as a function of scanning electron microscope (SEM) beam energy has been calculated by a Monte Carlo method. This spatial distribution is then used to obtain the diffusion length of charge carriers in high-quality epitaxial Ga2O3 films from the dependence of the electron beam induced current (EBIC) collection efficiency on the accelerating voltage of a SEM. The experimental results show, contrary to earlier theory, that holes are mobile in β-Ga2O3 and to a large extent determine the diffusion length of charge carriers. Diffusion lengths in the range 350–400 nm are determined for the as-grown Ga2O3, while processes like exposing the samples to proton irradiation essentially halve this value, showing the role of point defects in controlling minority carrier transport. The pitfalls related to using other popular EBIC-based methods assuming a point-like excitation function are demonstrated. Since the point defect type and the concentration in currently available Ga2O3 are dependent on the growth method and the doping concentration, accurate methods of diffusion length determination are critical to obtain quantitative comparisons of material quality. [ABSTRACT FROM AUTHOR]

The role of Shockley-Read-Hall non-radiative recombination centers on electroluminescence (EL) efficiency in blue multi-quantum-well (MQW) 436 nm GaN/InGaN light emitting diodes (LEDs) was examined by controlled introduction of point defects through 6MeV electron irradiation. The decrease in the EL efficiency in LEDs subjected to irradiation with fluences above 5x1015 cm-2 was closely correlated to the increase in concentration of Ec-0.7 eV electron traps in the active MQW region. This increase in trap density was accompanied by an increase in the both diode series resistance and ideality factor (from 1.4 before irradiation to 2.1 after irradiation), as well as the forward leakage current at low forward voltages that compromise the injection efficiency. Hole traps present in the blue LEDs do not have a significant effect on EL changes with radiation because of their low concentration. [ABSTRACT FROM AUTHOR]

Thick (23 µm) films of κ-Ga2O3 were grown by Halide Vapor Phase Epitaxy (HVPE) on GaN/sapphire templates at 630 °C. X-ray analysis confirmed the formation of single-phase κ-Ga2O3 with half-widths of the high-resolution x-ray diffraction (004), (006), and (008) symmetric reflections of 4.5 arc min and asymmetric (027) reflection of 14 arc min. Orthorhombic κ-Ga2O3 polymorph formation was confirmed from analysis of the Kikuchi diffraction pattern in electron backscattering diffraction. Secondary electron imaging indicated a reasonably flat surface morphology with a few (area density ∼103 cm−2) approximately circular (diameter ∼50–100 µm) uncoalesced regions, containing κ-Ga2O3 columns with in-plane dimensions and a height of about 10 µm. Micro-cathodoluminescence (MCL) spectra showed a wide 2–3.5 eV band that could be deconvoluted into narrower bands peaked at 2.59, 2.66, 2.86, and 3.12 eV. Ni Schottky diodes prepared on the films showed good rectification but a high series resistance. The films had a thin near-surface region dominated by Ec − 0.7 eV deep centers and a deeper region (∼2 µm from the surface) dominated by shallow donors with concentrations of ≤1016 cm−3. Photocurrent and photocapacitance spectra showed the presence of deep compensating acceptors with optical ionization energies of ∼1.35 and 2.3 eV, the latter being close to the energy of one of the MCL bands. Deep level transient spectroscopy revealed deep traps with energies near 0.3, 0.6, 0.7, 0.8, and 1 eV from the conduction band edge. The results show the potential of HVPE to grow very thick κ-Ga2O3 on GaN/sapphire templates. [ABSTRACT FROM AUTHOR]

The applicability of using Electron Beam Induced Current (EBIC) measurements on Schottky barriers to obtain the mean electron–hole pair creation energy in β-Ga2O3 is reported. It is shown that, when combined with Monte Carlo simulation, this approach yields for Si, GaN, and 4H–SiC a data set consistent with empirical expressions proposed earlier in the literature for many different semiconductors. The method is then applied to β-Ga2O3, where complications related to hole trapping in the material give rise to a strong gain in EBIC and have to be carefully treated and taken into account. When this is done, the mean electron–hole pair energy formation is found to be 15.6 eV, in reasonable agreement with the values predicted by empirical expressions. [ABSTRACT FROM AUTHOR]

The photocurrent produced by 259 nm wavelength excitation was measured in β-Ga2O3 Schottky diodes before and after neutron irradiation. These samples differed by the density of deep acceptors in the lower half of the bandgap as detected by capacitance--voltage profiling under monochromatic illumination. Irradiation led to a very strong increase in photocurrent, which closely correlated with the increase in deep trap density and the decrease after illumination of the effective Schottky barrier height due to hole capture by acceptors. A similar effect was observed on an as-grown βs-Ga2O3 film with a high density of deep acceptors. Electron beam induced current measurements indicated a strong amplification of photocurrent, which is attributed to the Schottky barrier lowering by holes trapped on acceptors near the surface. Photocurrent build-up and decay curves show several time constants ranging from several milliseconds to many seconds. These characteristic times are attributed to tunneling of electrons into the hole-filled acceptors near the surface and to thermal emission of holes from deep acceptors. [ABSTRACT FROM AUTHOR]

Measurements of deep trap spectra in bulk β-Ga2O3 crystals showed the parameters of the two dominant centers with levels near Ec-0.8 eV (E2) and Ec-1 eV(E3) are affected the electric field during deep level transient spectroscopy (DLTS). Both DLTS spectra measurements of the emission rates of the E2 and E3 traps and measurements of emission rates as a function of electric field from capacitance decay curves obtained at a fixed temperature (380 K) show that, for strong electric field with magnitude above ∼5 × 105 V.cm−1, the emission rates of these traps increase with increasing field. For the E2 traps, the increase is driven by phonon assisted tunneling. This points to the trap being an acceptor, which is consistent with reported attribution of the center to substitutional Fe acceptors. For the E3 trap, the field dependence indicates the dominant mechanism is the Poole–Frenkel effect, operable for Coulombic centers. It is concluded that this commonly observed trap is a deep donor. [ABSTRACT FROM AUTHOR]

The effects of pulsed neutron irradiation on Si doped n-type β-Ga2O3 films grown by halide vapor phase epitaxy (HVPE) on bulk Sn doped n+ β-Ga2O3 substrates are reported. This irradiation leads to an almost linear increase with neutron fluence of the density of deep electron traps E2* (Ec − 0.74 eV), E3 (Ec − 1.05 eV), and E4 (Ec − 1.2 eV), with an introduction rate close to 0.4–0.6 cm−1 while the density of the E2 traps (Ec − 0.8 eV) related to Fe was virtually unchanged. In addition, the increase in the density of deep traps with optical ionization threshold of 1.3 eV, 2.3 eV, and 3.1 eV with an introduction rate close to 0.8–2 cm−1 was observed. The carrier removal rate under our conditions was 28 cm−1. Neutron irradiation also led to a measurable decrease of the diffusion length of nonequilibrium charge carriers. The results are qualitatively similar to previous reports for proton and α-particle irradiation of HVPE β-Ga2O3. When comparing the findings with those described earlier for bulk neutron irradiated Ga2O3, we observe lower starting densities of electron and hole traps and lower introduction rates for these traps in the epitaxial structures. The carrier removal rates were comparable to those in bulk crystals. [ABSTRACT FROM AUTHOR]