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Various boron contents of AlCrNbTiBN coatings were prepared by radiofrequency reactive magnetron cosputtering on both 304 stainless steel and 100 silicon substrates. Boron-doped AlCrNbTiN coatings resulted in a dense structure and a decrease in the grain size. As compared to boron-free coatings, the hardness of AlCrNbTiBN coatings increased from 25.8 to 31.1 GPa at a boron content of 3.3 at. %. The AlCrNbTiBN coatings exhibited favorable hardness due to the increased dense structure, defect density, grain refinement, and solid solution strengthening. The wear test at 700 °C showed that coatings without boron reveal three times the wear rate than those coatings doped with boron. In this study, the multicomponent (AlCrNbTiBN) coating demonstrated favorable mechanical and tribological properties. This implies that AlCrNbTiBN coatings might provide promising applicability in the wear-resistant field at high temperatures. Furthermore, boron-doped multicomponent nitride coating appears to enhance coating’s mechanical properties and wear resistance, indicating potential development in the near future.

Inspired by Mantis shrimp, this work aims to suggest a bottom-up approach for the fabrication of nanonetwork hydroxyapatite (HAp) thin film using self-assembled polystyrene

Objective: This study aimed to evaluate whether adjuvant radiotherapy (RT) can improve the treatment outcome of patients with locally advanced gastric cancer who underwent extensive lymph node dissection (ELND). Materials and Methods: This retrospective study included patients with gastric cancer pathological stages IIA–IIIC at Taipei Tzu Chi Hospital between 2008 and 2015. Patients (a) aged >80 years, (b) with distant metastasis at diagnosis, (c) with coexisting malignancies, (d) who did not complete the prescribed RT course, and (e) who died 1 month after surgery were excluded. Among 420 patients diagnosed with gastric cancer, 98 were included. Results: The median follow-up was 24.5 months. Of 39 patients who underwent adjuvant RT, 38 also received adjuvant chemotherapy (CT). Of 59 patients who did not receive adjuvant RT, only 34 received adjuvant CT. ELND was performed in 67.3% of the patients. The 5-year overall survival (OS) rate was 40%. In the univariate analyses, adjuvant CT regimen, 5-fluorouracil + leucovorin, was associated with worst outcome, while TS-1 was associated with better survival outcome (P = 0.018). The number of involved lymph nodes was strongly related to the OS and disease-free survival (DFS) (P < 0.001). We tried using different numbers of involved lymph nodes as a cutoff point and found that adjuvant RT significantly improved both OS and DFS in patients whose involved lymph nodes were ≥4 (OS, P = 0.017; DFS, P = 0.015). In multivariate analyses, better DFS was associated with negative surgical margin (P = 0.04), earlier disease stage (P = 0.001), adjuvant radiotherapy (P = 0.045), and adjuvant CT regimen TS-1 (P = 0.001). Conclusion: Adjuvant RT could improve DFS of patients with locally advanced gastric cancer with or without ELND. When the number of involved lymph nodes is ≥4, adjuvant RT is strongly suggested.

This study reports a thermodynamic route for self-forming an ultrathin V-Nb-Mo-Ta-W high-entropy alloy layer for potential use as a promising diffusion barrier. In Cu alloy films minor-doped with 1.2 at.% of one-to-five metallic elements (V, Nb, Mo, Ta and W), the alloying elements spontaneously segregated. Under the competition of enthalpy and mixing entropy that determines the delta Gibbs free energy, one and, in particular, five alloying element(s) formed an alloy solution layer at the Cu/Si interface, whereas three alloying elements differently formed intermetallic compound clusters at the grain boundaries of Cu. Dominant factors for the final states of the alloying elements include the large positive enthalpy between Cu and the alloying elements, the negative enthalpy among the alloying elements, and the low-to-high mixing entropy among the alloying elements. The self-forming quinary alloy layer of only 1.5 nm thick provided excellent resistance to the interdiffusion of Cu and Si up to 700°C, better than practical and other newly developed barrier materials.

The influence of lithium chloride (LiCl) on the hydration structure of anionic micelles of sodium dodecyl sulfate (SDS) in water was studied using the contrast-variation small-angle neutron scattering (SANS) technique. In the past, extensive computational studies have shown that the distribution of invasive water plays a critical role in the self-organization of SDS molecules and the stability of the assemblies. However, in past scattering studies the degree of the hydration level was not examined explicitly. Here, a series of contrast-variation SANS data was analyzed to extract the intramicellar radial distributions of invasive water and SDS molecules from the evolving spectral lineshapes caused by the varying isotopic ratios of water. By addressing the intramicellar inhomogeneous distributions of water and SDS molecules, a detailed description of how the counterion association influences the micellization behavior of SDS molecules is provided. The extension of our method can be used to provide an in-depth insight into the micellization phenomenon, which is commonly found in many soft matter systems.

We outline a machine learning strategy for quantitively determining the conformation of AB-type diblock copolymers with excluded volume effects using small angle scattering. Complemented by computer simulations, a correlation matrix connecting conformations of different copolymers according to their scattering features is established on the mathematical framework of a Gaussian process, a multivariate extension of the familiar univariate Gaussian distribution. We show that the relevant conformational characteristics of copolymers can be probabilistically inferred from their coherent scattering cross sections without any restriction imposed by model assumptions. This work not only facilitates the quantitative structural analysis of copolymer solutions but also provides the reliable benchmarking for the related theoretical development of scattering functions.

To lower the charge leakage of a floating gate device and improve the operation performance of memory devices toward a smaller structure size and a higher component capability, two new types of floating gates composed of pn-type polysilicon or np-type polysilicon were developed in this study. Their microstructure and elemental compositions were investigated, and the sheet resistance, threshold voltages and erasing voltages were measured. The experimental results and charge simulation indicated that, by forming an n-p junction in the floating gate, the sheet resistance was increased, and the charge leakage was reduced because of the formation of a carrier depletion zone at the junction interface serving as an intrinsic potential barrier. Additionally, the threshold voltage and erasing voltage of the np-type floating gate were elevated, suggesting that the performance of the floating gate in the operation of memory devices can be effectively improved without the application of new materials or changes to the physical structure.

Herein, this work aims to fabricate well-ordered nanonetwork epoxy resin modified with poly(butyl acrylate)-b-poly(methyl methacrylate) (PBA-b-PMMA) block copolymer (BCP) for enhanced energy dissipation using a self-assembled diblock copolymer of polystyrene-b-poly(dimethylsiloxane) (PS-b-PDMS) with gyroid and diamond structures as templates. A systematic study of mechanical properties using nanoindentation of epoxy resin with gyroid- and diamond-structures after modification revealed significant enhancement in energy dissipation, with the values of 0.36 ± 0.02 nJ (gyroid) and 0.43 ± 0.03 nJ (diamond), respectively, when compared to intrinsic epoxy resin (approximately 0.02 ± 0.002 nJ) with brittle characteristics. This enhanced property is attributed to the synergic effect of the deliberate structure with well-ordered nanonetwork texture and the toughening of BCP-based modifiers at the molecular level. In addition to the deliberate structural effect from the nanonetwork texture, the BCP modifier composed of epoxy-philic hard segment and epoxy-phobic soft segment led to dispersed soft-segment domains in the nanonetwork-structured epoxy matrix with superior interfacial strength for the enhancement of applied energy dissipation.

This work investigates the corrosion mechanism of annealed equiatomic AlCoCrFeNi tri-phase alloy in 0.5 M H2SO4 aerated aqueous solution. Experimental results indicate that the B2 matrix is preferentially corroded away while grain-boundary FCC and labyrinth-like BCC endure, consistent with the tendency of formation energy for monolayer hydroxide on the (001) plane of three phases calculated by the first principle based on density function theory. Furthermore, the stable passive current density is related to lower ksp values of Co(OH)3, Fe(OH)3, and Cr(OH)3, while the annealing effect on enhancing corrosion resistance is owing to the more uniformity of passive hydroxide film.

Herein, we aim to develop a facile method for the fabrication of mechanical metamaterials from templated polymerization of thermosets including phenolic and epoxy resins using self-assembled block copolymer, polystyrene-polydimethylsiloxane with tripod network (gyroid), and tetrapod network (diamond) structures, as templates. Nanoindentation studies on the nanonetwork thermosets fabricated reveal enhanced energy dissipation from intrinsic brittle thermosets due to the deliberate structuring; the calculated energy dissipation for gyroid phenolic resins is 0.23 nJ whereas the one with diamond structure gives a value of 0.33 nJ. Consistently, the gyroid-structured epoxy gives a high energy dissipation value of 0.57 nJ, and the one with diamond structure could reach 0.78 nJ. These enhanced properties are attributed to the isotropic periodicity of the nanonetwork texture with plastic deformation, and the higher number of struts in the tetrapod diamond network in contrast to tripod gyroid, as confirmed by the finite element analysis.

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To develop strong refractory high-entropy alloys for use at elevated temperatures as well as to overcome grain-boundary brittleness, an equimolar HfMoNbTaTiZr alloy was prepared, and a minor amount of boron (0.1 at.%) was added into the alloy. The microstructures of the alloys were characterized, and their macro-to-microscale mechanical properties were measured. The microstructural observations indicated that the matrices of both the alloys were composed of a body-centered cubic solid-solution structure, and the added boron induced the precipitation of hexagonal close-packed borides (most likely the (Hf, Zr)B2) at the grain boundaries. The modulus and hardness of differently oriented grains were about equivalent, suggesting a diminished anisotropy, and many small slips occurred on multiple {110} planes. While the hardness of the matrix was not increased, the intergranular precipitation of the borides markedly raised the hardness of the grain boundaries. Owing to the enhanced grain boundary cohesion, the work hardenability and ductility were effectively improved with the addition of boron.

Most medium entropy alloys (MEAs) exhibit excellent mechanical properties, but their applications are limited because of their high density. This study explores a series of lightweight nonequiatomic Ti65(AlCrNbV)35-xZrx (x = 3, 5, 7, and 10) MEAs with a low density, high strength, and high ductility. To achieve solid solution strengthening, Zr with a large atomic radius was used. In addition, various thermomechanical treatment parameters were adopted to further improve the MEAs’ mechanical properties. The density of the MEAs was revealed to be approximately 5 g/cm3, indicating that they were lightweight. Through an X-ray diffraction analysis, the MEAs were revealed to have a single body-centered cubic structure not only in the as-cast state but also after thermomechanical treatment. In terms of mechanical properties, all the as-cast MEAs with Zr additions achieved excellent performance (>1000 MPa tensile yield strength and 20% tensile ductility). In addition, hot rolling effectively eliminated the defects of the MEAs; under a given yield strength, hot-rolled MEAs exhibited superior ductility relative to non-hot-rolled MEAs. Overall, the Ti65(AlCrNbV)28Zr7 MEAs exhibited an optimum combination of mechanical properties (yield strength > 1200 MPa, plastic strain > 15%) after undergoing hot rolling 50%, cold rolling 70%, and rapid annealing for 30 to 50 s (at a temperature of approximately 850 °C) with a heating rate of 15 K/s. With their extremely high specific yield strength (264 MPa·g/cm3) and high ductility (22%), the Ti65(AlCrNbV)28Zr7 MEAs demonstrate considerable potential for energy and transportation applications.

Band structure by design in 2D layered semiconductors is highly desirable, with the goal to acquire the electronic properties of interest through the engineering of chemical composition, structure, defect, stacking, or doping. For atomically thin transition metal dichalcogenides, substitutional doping with more than one single type of transition metals is the task for which no feasible approach is proposed. Here, the growth of WS

We demonstrate the fabrication of free-standing inverse opals with gradient pores via a combination of electrophoresis and electroplating techniques. Our processing scheme starts with the preparation of multilayer colloidal crystals by conducting sequential electrophoresis with polystyrene (PS) microspheres in different sizes (300, 600, and 1000 nm). The critical factors affecting the stacking of individual colloidal crystals are discussed and relevant electrophoresis parameters are identified so the larger PS microspheres are assembled successively atop of smaller ones in an orderly manner. In total, we construct multilayer colloidal crystals with vertical stacking of microspheres in 300/600, 300/1000, and 300/600/1000 nm sequences. The inverse opals with gradient pores are produced by galvanostatic plating of Ni, followed by the selective removal of colloidal template. Images from scanning electron microscopy exhibit ideal multilayer close-packed structures with well-defined boundaries among different layers. Results from porometer analysis reveal the size of bottlenecks consistent with those of interconnected pore channels from inverse opals of smallest PS microspheres. Mechanical properties determined by nanoindentation tests indicate significant improvements for multilayer inverse opals as compared to those of conventional single-layer inverse opals.

The thermodynamic parameters for a series of Fe(100−x)/2Co(100−x)/2Cux (x from 10 to 90, at. pct) alloys including their characteristic temperatures, the enthalpy and entropy changes of three phase transformations were determined systematically using differential scanning calorimetry (DSC). The corresponding vertical section of ternary Fe-Co-Cu phase diagram was predicted, and the relationships of the enthalpy and entropy changes vs Cu content were described by polynomial expressions. Metastable phase separation took place in those liquid Fe-Co-Cu alloys with the Cu content 30 ≤ x ≤ 70. The liquid phase separation temperatures were determined to outline the metastable miscibility gap, and the critical undercoolings to initiate phase separation were measured as a range of 57 K to 98 K. After such a phase separation, the liquid phase (to γ(Fe, Co)) exhibited the strongest undercooling ability in the Fe-Co-Cu alloys with x ≤ 70, whereas the solid-state undercooling for the eutectoid transformation is comparatively higher in the alloys with x > 70. The nanomechanical properties of α(Fe, Co) and (Cu) phases were measured by nanoindentation technique. In the Fe20Co20Cu60 alloy, both phases had the lowest nanohardness and reduced elastic modulus, and displayed severe creep behaviors, resulting mainly from its conspicuous liquid phase separation.

Ductile vanadium layers were alternately deposited with brittle aluminum-copper-iron-based quasicrystal-alloy layers to form multilayered coatings. The in-situ transmission electron microscopic observations of nanopillar compression revealed that the as-deposited single-layered amorphous aluminum-copper-iron alloy slightly deformed via shear banding. After annealing at 800 °C, brittle quasicrystal and intermetallic compounds were formed, so the single-layered coating cracked and peeled. In comparison, the multilayered coatings were effectively toughened. The multilayered nanopillars plastically deformed via dislocation activities and were work hardened owing to confined dislocation gliding. The as-deposited multilayered structure (amorphous alloy/crystalline vanadium) had a low 10% flow stress of 1.72 GPa, while the annealed multilayered structure (quasicrystal/vanadium) presented a high flow stress of 2.58 GPa owing to quasicrystal strengthening. Dislocation clusters were in-situ observed to glide laterally in the crystalline vanadium layers and move vertically through the vanadium and quasicrystal layers, yielding an improved plasticity.

To understand the dominance of lattice distortion and cocktail effect for an appropriate element selection and optimistic design of multicomponent protective hard coatings, in this study, four groups of Ta-based high-entropy nitride coatings, including (AlCrTa2TiZr)Nx, (HfNbTaTiZr)Nx, (MoNbTaTiZr)Nx and (Al2Cr2HfMoNbTa)Nx, were deposited by sputtering in an N2 + Ar mixed atmosphere. The structures, mechanical properties, wear resistance and oxidation resistance of the coatings were investigated, and the roles of different constituent metallic elements in their performance were examined. Experimental results indicated that, similar to conventional nitride coatings, the sputtering yield and resputtering loss of metallic elements determined the chemical composition. While the high mixing entropy of multiple metallic elements yielded a solid-solution structure, the N2-to-total flow ratio dominated the film structure and growth orientation. A certain level of lattice distortion generated similarly high mechanical properties no matter which metallic elements were added, but the cocktail effect of the constituents decided the tribological and oxidation resistance of the coatings.

Cu with nanotwin (NT) possesses great electrical, mechanical, and thermal properties and has potential for electronic applications. Various studies have reported the effect of NT orientation on Cu mechanical properties. However, its effect on Cu stress-relaxation behavior has not been clarified, particularly in nano-scale. In this study, Cu nanopillars with various orientations were examined by a picoindenter under constant strain and observed by in situ TEM. The angles between the twin plane and the loading direction in the examined nanopillars were 0°, 60°, to 90°, and a benchmark pillar of single-crystal Cu without NT was examined. The stress drops were respectively 10%, 80%, 4%, and 50%. Owing to the interaction by NT, the dislocation behavior in nanopillars was different from that in bulk or in thin film samples. Especially, the rapid slip path of dislocations to go to the free surface of the nanopillar induced a dislocation-free zone in the 0° nanopillar, which led to work-softening. On the contrary, a high dislocation density was observed in the 90° nanopillar, which was generated by dislocation interaction and obstruction of dislocation slip by twin planes, and it led to work-hardening. The findings reveal the NT orientation in Cu nanopillars affected stress relaxation significantly.

We employ a sequential electrophoresis and electrodeposition approach to fabricate a large-area ordered macroporous Ni foam in 5 × 5 cm 2 via a template route. Images from scanning electron microscope exhibit hierarchical structures with hexagonally-arranged pores and interconnected pore channels. For as-prepared and annealed ordered macroporous Ni foams, the loading-depth profiles from nano indentation show typical elastic and plastic deformation. Upon annealing, moderate growth in grain size is observed, resulting in lower hardness and Young’s modulus. In contrast, for disordered macroporous Ni foam and solid Ni film, nano indentation results reveal larger hardness and undetermined Young’s modulus. The ordered macroporous foam reveals hardness that is 22% of that of solid Ni film, a value close to its theoretic packing density of 24%.

We show quasicrystal formation by annealing multilayers of Al, Cu and Fe. The mechanical and surface properties of quasicrystals are affected by the parameters of annealing process. Here, multilayer Al-Cu-Fe thin film samples with different compositions were sputtered on Si/SiO2 substrates and subjected to a two-step annealing process for different durations (5, 10 and 15 h). X-ray diffraction analyses indicated that the 15-h annealed sample had a sharper quasicrystal peak, which was more stable than any other phases. From the XRD data, the amount of each phase was calculated; the sample with longer annealing duration revealed a high amount of ψ-phase (84.3% crystallinity of quasicrystal) with a small amount of cubic Al50 (CuFe) 50 phase. Nanoindentation tests and contact angle measurements showed that this sample also had the greatest hardness (∼11 GPa) and the highest contact angle (127°), respectively.

The lattice distortion of a solute primarily occurs because its atomic size and chemical bonding are different from those of neighboring atoms. The lattice distortion effects in conventional and high-entropy alloys are different; however, a detailed investigation on these effects has yet to be conducted. To fill this research gap, this study produced face-centered cubic-structured dilute solutions (Ni, Ni–2 at.% W, and Ni–4 at.% W) and concentrated solutions (equiatomic CrFeNi and CoCrFeMnNi) and compared their tensile properties. For the two W-containing alloys, lattice distortion occurred only around the large and strong W atoms. However, for the two concentrated solutions, which had a similar interelement atomic size and shear modulus to the aforementioned alloys, lattice distortion occurred at all lattice sites. These two types of lattice distortion had significantly different effects on tensile properties. The strength and ductility of the alloys with a high concentration of distorted lattice points were higher than those of the alloys with a low concentration of distorted lattice points, although the alloys with a low concentration of distorted lattice points had a larger nominal atomic size difference and shear modulus difference. The mechanisms underlying the evolution of different mechanical properties under different types of lattice distortion were examined for the dilute and concentrated alloys. Moreover, the universal solid solution strengthening mechanism was observed.

Microanode-guided electroplating (MAGE) was performed to prepare cobalt-iron-nickel alloying micropillars. The electrolyte was prepared by fixing [Fe2+] at 0.040 M and varying [Co2+] in 0.040–0.100 M and [Ni2+] in 0.30–0.60 M. The effect of bath composition on the compositional, mechanical, and magnetic properties of the alloying micropillars was investigated. Resulting from FE-SEM and EDS, all the micropillars demonstrated a smooth morphology but in different compositions depending on the bath composition. Through XRD analysis, the micropillars were characterized in nanocrystals of Co-Ni and Co7Fe3. After nano-indentation testing, the reduced Young’s modulus of the pillars was estimated at 103.1–185 GPa and the hardness at 5.70–6.38 GPa. Investigation of all the specimens with VSM, Co61Fe27Ni12 and Co63Fe25Ni12 displayed the notable saturation magnetization (Ms = 180 and 175 emu/g) and the lowest coercive magnetic field (Hc = 2.1 and 1.4 Oe) among them. The mechanism of anomalous Co-Fe-Ni electrodeposition is proposed.

Microgravity solidification provides a particular opportunity to produce an extraordinary microstructure and optimized mechanical properties. To shed further light on the influence of rapid solidification mechanism on mechanical properties, both the microgravity solidification mechanism and resultant micromechanical properties of ternary Al 57 Ag 12 Ge 31 alloy were analyzed by means of drop tube, nanoindentation and frictional sliding techniques, which was compared with equilibrium solidification condition. The solidification pathways changed with the decrease of droplet size, owing to a larger cooling rate and a higher undercooling. Consequently, the microstructure transformed from dendrites plus two-phase eutectic to two-phase eutectics, eventually to anomalous ternary eutectic, while the thickness of surface (Ge) layer decreased. The micromechanical properties of rapidly solidified alloy droplets were evidently improved with the decrease of droplet size, which is mainly ascribed to the microstructure refinement and the homogenous distribution especially of hardening (Ge) phase. The measured microhardness, yield strength, strain hardening exponent, pile-up resistance and friction coefficient were analyzed as a function of droplet size.

TiO2 nanotube-based heterostructures grafted with ZnO nanorods, Ag nanoparticles, or Pd nanodendrites were synthesized for photocatalytic H2O/CH3OH splitting and H2 generation. Compared with P25 TiO2 nanoparticles and bare TiO2 nanotubes, these heterostructures, in particular, the one grafted with Pd nanodendrites, were found to present a markedly enhanced photocatalytic H2 generation efficiency (net H2 generation rate ∼143 μmol/h). Rather than the surface area of the photocatalysts, the lifetime (separation) of photogenerated carriers and, in particular, the surface plasmon resonance-stimulated carrier excitation dominated the number of total effective carriers. A power relationship with an exponent of 0.2 between the H2 generation rate and the number of total photogenerated carriers was determined, which suggests that the number of effective carriers or the efficiency in H2O/CH3OH splitting might decay in an exponential way.

Band structure by design in 2D layered semiconductors is highly desirable, with the goal to acquire the electronic properties of interest through the engineering of chemical composition, structure, defect, stacking, or doping. For atomically thin transition metal dichalcogenides, substitutional doping with more than one single type of transition metals is the task for which no feasible approach is proposed. Here, the growth of WS2 monolayer is shown codoped with multiple kinds of transition metal impurities via chemical vapor deposition controlled in a diffusion-limited mode. Multielement embedment of Cr, Fe, Nb, and Mo into the host lattice is exemplified. Abundant impurity states thus generate in the bandgap of the resultant WS2 and provide a robust switch of charging/discharging states upon sweep of an electric filed. A profound memory window exists in the transfer curves of doped WS2 field-effect transistors, forming the basis of binary states for robust nonvolatile memory. The doping technique presented in this work brings one step closer to the rational design of 2D semiconductors with desired electronic properties.

Self-assembly of amphiphilic polymers in water is of fundamental and practical importance. Significant amounts of free unimers and associated micellar aggregates often coexist over a wide range of phase regions. The thermodynamic and kinetic properties of the microphase separation are closely related to the relative population density of unimers and micelles. Although the scattering technique has been employed to identify the structure of micellar aggregates as well as their time-evolution, the determination of the population ratio of micelles to unimers remains a challenging problem due to their difference in scattering power. Here, using small-angle neutron scattering (SANS), we present a comprehensive structural study of amphiphilic n-dodecyl-PNIPAm polymers, which shows a bimodal size distribution in water. By adjusting the deuterium/hydrogen ratio of water, the intra-micellar polymer and water distributions are obtained from the SANS spectra. The micellar size and number density are further determined, and the population densities of micelles and unimers are calculated to quantitatively address the degree of micellization at different temperatures. Our method can be used to provide an in-depth insight into the solution properties of microphase separation, which are present in many amphiphilic systems.

In this study, AlCrSiNbZr nitride thin films were deposited on Si substrate by reactive radio frequency magnetron sputtering under the substrate bias from 0 V to −100 V at room temperature. The effect of substrate bias on structure, morphology, hardness and resistivity of the films was investigated. The results show that (111) preferred orientation was dominant phases for samples under bias of 0 V, −25 V, −50 V and − 75 V whereas amorphous-like feature was observed for samples under the bias of −100 V. In addition, crystallinity of film was enhanced when the substrate bias increased from 0 V to −50 V, but decreased when substrate bias further increased from −50 V to −100 V, suggesting that the optimized crystallinity of films was achieved under the substrate bias of −50 V. The oxygen contents of the thin films decreased significantly when the substrate bias was higher than −25 V. The hardness of the films was divided into two regions and samples under bias of −75 V and −100 V possessed higher hardness than those under bias of 0 V, −25 V and −50 V, which was mainly attributed to less oxynitride phases for samples under bias of −75 V and −100 V. The resistivity of thin films decreased as the substrate bias increased, which was mainly affected by the concentration of oxygen in films. The optimized substrate bias was −75 V with the maximum hardness and lowest resistivity.