1. TEM Analysis on Nanovoid Formation in Annealed Amorphous Oxides
- Author
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Manabu Ishimaru, Akihiko Hirata, Ryusuke Nakamura, T. Shudo, and Hideo Nakajima
- Subjects
Materials science ,Nanoporous ,Annealing (metallurgy) ,Mechanical Engineering ,Metallurgy ,Amorphous oxide ,Condensed Matter Physics ,law.invention ,Amorphous solid ,Chemical engineering ,Amorphous carbon ,Mechanics of Materials ,law ,Transmission electron microscopy ,General Materials Science ,Crystallization ,Tem analysis - Abstract
Formation behavior of nanovoids during the annealing of amorphous Al2O3 and WO3 was studied by transmission electron microscopy. The density and size of the voids in Al2O3 and WO3 increase with increasing annealing temperature from 973 to 1123 K and from 573 to 673 K, respectively. It is suggested that the formation of nanovoids during annealing is attributed to the large difference in density between as-deposited amorphous and crystalline oxides.
- Published
- 2011
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