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A set of in situ measurement equipment of large aperture strong light element based on the principle of laser scattering is established. The size and distribution of defects (damage points) can be judged by the laser scattering signal. The maximum scanning range is 700 mm*1000 mm. The type and size of defects are directly obtained by scanning the quartz sample with a diameter of 100 mm. The types of defects are pitting and scratches, and the width of the scratches and the diameter of the pitting are mostly in the range of 0–10μm. The processing time could reach 31.06s. The device can realize the on‐line in situ measurement of large aperture optical elements, and has the advantages of fast response speed and high measurement accuracy. [ABSTRACT FROM AUTHOR]

When fabricating optical cantilever parts with single-point diamond turning (SPDT) technique, chatter phenomenon happens and degenerates the surface quality. This paper studies the chatter phenomenon and proposes a scheme to solve the problem. A kind of viscoelastic material is presented as the auxiliary supporter under the vibration location of optical cantilever parts to suppress chatter. Mirror surfaces can be generated and surface shape can be maintained after uninstalling the supporter because of the special features of viscoelastic material which acts like solid to enhance the rigidity of the cantilevers when cutting forces act on it and acts like liquid to avoid distortion of the surface shape during setting and unsetting the supporter. The effect of the viscoelastic material is discussed by virtue of finite element simulation on the basis of elasticity theory. Cutting experiments are carried out and the cutting forces as well as the surface quality with and without viscoelastic supporter are compared. The results show that chatter is suppressed effectively by using viscoelastic supporter, and surface roughness average (Ra) of around 5 nm is obtained on the whole surface with no obvious distortion on machined surface shape. [ABSTRACT FROM AUTHOR]

Abstract: Single point diamond face flycutting technique is widely applied to fabricate potassium dihydrogen phosphate (KDP) crystals because of their characteristics of softness, brittleness, deliquescence and anisotropy. This paper studies the feasibility of machining KDP crystals through spiral turning method based on the ductile cutting mechanism of brittle materials. The spiral scratch method is employed to analyze various conditions of achieving brittle–ductile transition in different cutting directions where the critical depth of cut is obtained. The cutting forces and surface formation processes within different cutting parameters are discussed and the parameters ensuring full-aperture ductile turning are acquired. White light interferometer and Atomic Force Microscope (AFM) are used to evaluate the coherence of machined surface qualities in different cutting directions. The results indicate that the critical depth of cut varies from cutting directions significantly and fluctuates from about 200nm to 1000nm under the experimental condition. Cutting forces display periodical variation with the change of cutting direction and the periodical trend blurs, even ultimately disappears, with the decrease of the cutting parameters. Root-Mean-Square (RMS) value of the fabricated surface roughness fluctuates from 1.3nm to 1.7nm on the whole surface with no distinct anisotropic distribution of the surface morphology according to the results observed by AFM. Compared with face flycutting method, spiral turning method has capability to generate complex surface profiles such as aspheric or freeform surfaces and can also be used to compensate the deformation error of KDP crystals caused by vacuum suction during fabrication. [Copyright &y& Elsevier]

Single-crystal silicon carbide has excellent electrical, mechanical, and chemical properties. However, due to its high hardness material properties, achieving high-precision manufacturing of single-crystal silicon carbide with an ultra-smooth surface is difficult. In this work, quantum dots were introduced as a sacrificial layer in polishing for pulsed-ion-beam sputtering of single-crystal SiC. The surface of single-crystal silicon carbide with a quantum-dot sacrificial layer was sputtered using a pulsed-ion beam and compared with the surface of single-crystal silicon carbide sputtered directly. The surface roughness evolution of single-crystal silicon carbide etched using a pulsed ion beam was studied, and the mechanism of sacrificial layer sputtering was analyzed theoretically. The results show that direct sputtering of single-crystal silicon carbide will deteriorate the surface quality. On the contrary, the surface roughness of single-crystal silicon carbide with a quantum-dot sacrificial layer added using pulsed-ion-beam sputtering was effectively suppressed, the surface shape accuracy of the Ø120 mm sample was converged to 7.63 nm RMS, and the roughness was reduced to 0.21 nm RMS. Therefore, the single-crystal silicon carbide with the quantum-dot sacrificial layer added via pulsed-ion-beam sputtering can effectively reduce the micro-morphology roughness phenomenon caused by ion-beam sputtering, and it is expected to realize the manufacture of a high-precision ultra-smooth surface of single-crystal silicon carbide. [ABSTRACT FROM AUTHOR]

This paper presents a comprehensive model for the motorized spindles in machine tools. The proposed model consists of a thermo-mechanical dynamic model and a milling stability model. The thermo-mechanical dynamic model is establishedbased on finite element method with the consideration of the transfer function at cutting point, which is coupled with the milling stability model. The influences of thermo-mechanical coupled factors (TMCF) on the transfer function at the cutting point and the milling stability of the system are discussed and validated, and the influences of the parameters of the material properties and machining process on the milling stability are acquired. The theoretical and experimental results are useful to the dynamic analysis and design for motorized spindle machine tools. [ABSTRACT FROM AUTHOR]

Traditional measurement methods of squareness for ultra-precision motion stage have many limitations, especially the errors caused by the inaccuracy of standard specimens. On the basis of error separation, this paper presents a novel method to measure squareness with an optical square brick. The angles between the guideways and the four lines of brick section are measured based on the fact that sum of interior angle of a quadrilateral is 2π, and the squareness is obtained. A squareness measurement experiment was performed on a profilometer with a modified optical square brick. Experimental results show that the squareness accuracy between X and Y axes is not influenced by the accuracy of brick, and the measurement repeatability reaches 0.22 arcsec. Finally, a verification experiment to the proposed method was carried out with a high accurate standard specimen, and the error between the two methods is 1.06 arcsec. According to the error results and simulation analysis of the measurement system, the measurement error based on error separation is 0.06 arcsec. The proposed method is able to achieve a very high accurate squareness measurement with auxiliary components of normal accuracy, and can be applied to measure the accuracy class of sub-arcsec squareness. [ABSTRACT FROM AUTHOR]

• The phenomena of laser energy deposition and light-field enhancement caused by ripple structures was cleared through FEM simulation. • A combined technique of low–stress CCOS and IBF was used to polishing ripple–structure optical surface, and its suitability was verified for fused silica laser optics. • The changes of anti-laser damage characteristics at different processing stage were studied. The correlation between processing parameters, photo-thermal absorption, laser induced damage threshold was cleared. In AMRF (arrayed magnetorheological finishing) process of fused silica laser optics, ripple structures would generate on the optical surface. The ripple structures could cause nonlinear self-focusing and localized energy deposition, finally induced laser damage. In this work, the removal of ripple structures and the improvement of anti-laser damage characteristics were studied. First, the heat deposition and light-field enhancement induced by ripple structures were analyzed by finite element simulation method, and the negative impact of ripple structures was clarified. Then, the ripple-structure surface was polished by a combined technique of low-stress CCOS (computer control optical surfacing) and ion beam finishing (IBF). After the combined polishing process, the ripple structures and the hydrolyzed layer on the surface were removed, the photo-thermal absorption decreased from 0.736 ppm to 0.124 ppm, and the laser induced damage threshold (LIDT) increased from 6.3 J/cm2 to 7.4 J/cm2. In this work, the combined technique was able to remove the ripple structures while maintaining the processing efficiency, and it also could improve the anti-laser damage characteristics of the optics. The relative research results had important reference value for ultra-precision manufacturing of large-aperture laser optics. [ABSTRACT FROM AUTHOR]

Single-crystal silicon is an important material in the high precision reflector, and its processing quality directly affects the overall performance index of the reflector. Aiming at the problem of "comet tail" defect produced by the magnetorheological machining process, the process parameters are controlled by the combination of experiments and simulations, and the surface roughness changes after different scanning speeds under the same removal depth are compared and analyzed. The results show that under the same process parameters, the probability of "comet tail" defects are related to density and surface quality. The main factors affecting the occurrence probability and density of "comet tail" defects are process parameters. In actual processing, it is necessary to establish a threshold of process parameters, so that the "Comet tail" defect is less within the threshold and can be quickly removed. The final threshold range is: buffing wheel speed< 220rpm, flow rate< 80L/min, depth coefficient< 0.25, magnetic field strength< 7A. By discussing the "Comet tail" defect suppression method and key technology, it provides technical support for the realization of high precision control manufacturing of single-crystal silicon. [ABSTRACT FROM AUTHOR]

• A PSD (Power Spectral Density) analysis method based on the contour of removal function was proposed for AMRF technique. • A new polishing path called "non-equal-interval parallel raster path" customized for AMRF technique was proposed and applied to control mid-spatial-frequency ripple error. • Simulation and actual experiment verified the effects of analysis method and polishing path. With the continuous development of high-power laser systems, laser optics gradually changed towards large-aperture, high-quality. To adapt to the fabrication of large-aperture laser optics, a new-type array magnetorheological finishing (AMRF) technique was developed and had made initial progress. However, AMRF technique would introduce more obvious ripple structures (such as 1 mm−1 of spatial frequency) compared to original MRF technique while adopting conventional raster path, and the ripple structures might affect laser beam transmission. For the further application of AMRF technique, the formation mechanism of ripple structures was studied, and a method based on the contour of removal function was proposed to analyze the changes of spatial frequency and evaluate the effect of different polishing paths. According to the analysis method, non-equal-interval parallel raster path was chosen and applied into AMRF process, along with maintaining efficiency while controlling ripple structures. In general, this work could provide a valuable support for the AMRF process of large-aperture laser optics and had a certain significance for the high-power laser system. [ABSTRACT FROM AUTHOR]

• Infrared optical properties optimization of various Si lattice structures are investigated. • Close-to-atomic method(IBF and CMP) is imported to regulate various lattice layers on Si surface. • Removal of amorphous layer above the low-density layer improve the reflectivity notable. • Low-density(about 1 nm) layer and transition layer(about 1 nm) are conducive for optimize the infrared optical properties(reflectivity and photo-thermal absorption). A fundamental challenge in optimizing the infrared optical properties of monocrystalline Si(1 0 0) reflectors is achieving high infrared reflection and low photo-thermal absorption. These requirements have been traditionally satisfied by removing various surface defects to obtain a perfect lattice structure. To supersede the traditional logic of "non-defect surfaces," a surface lattice structure scheme, "Si lattice layer regulation," is proposed. This paper presents a close-to-atomic-scale method for regulating multilayer Si lattices. First, a "multilayer lattice" (disordered, low-density, and transition layers) is introduced by ion beam figuring as a regulation base. Subsequently, the infrared optical properties are improved by reducing the disordered layer above the low-density layer using chemical–mechanical polishing. An experimental comparison proves that the scheme is effective: the reflectivity of the new surface developed in this study increases by 10 % (from 900 to 1500 nm (testing band)), and the photo-thermal absorption of the surface is controlled at 0.116 ppm. Therefore, the optical properties of monocrystalline Si can be optimized by regulating the thickness of the Si atomic layers with different densities. A lattice layer based on the field of materials science (e.g., material band gap and electronic property regulation) is introduced to an optical field with high infrared optical properties on Si surfaces. This allows the optical processing to enter an emerging "close-to-atomic-scale" manufacturing dimension. This work also opens up advanced prospects in the fields of high-energy optics and X-rays and directs research on atomic structure regulation toward a completely new area of optics. [ABSTRACT FROM AUTHOR]

Null test is preferred for measuring surface error of aspheres. However for large convex aspheres, it is challenging to fabricate larger null optics. Subaperture stitching is hence introduced but requires different null optics for subapertures of different off-axis distances. It gets easier by using replaceable computer generated holograms (CGHs). In this paper, a convex high-order even asphere is taken as an example and multiple CGHs are designed for null test of different subapertures. The same transmission flat and tilt carrier are used to facilitate alignment of CGHs. Disturbance orders of diffraction are confirmed to be separated by the tilt carrier without ghost interference. A configuration-based stitching algorithm is applied to successfully retrieve the full aperture surface error. The CGH substrate error is calibrated out before stitching optimization by measuring its transmitted wavefront with a high precision reference flat. Finally, the stitching result is verified by through-the-back null test of the same asphere. • Measurement of large convex aspheres with null subaperture stitching. • Different subaperture aberrations compensated by replaceable multiple CGHs. • Tilt carrier designed for separation of disturbance orders of diffraction. • CGH substrate error calibrated out before stitching optimization. • Experimental cross test of an even asphere with through-the-back test. [ABSTRACT FROM AUTHOR]

Freeform optical surfaces are advantageous to optical designers, as they provide additional degrees of freedom for optimization. The loss of rotational symmetry, however, makes measurement of freeforms more challenging. Herein, advances in interferometric areal measurement of freeform optical surfaces, including null tests, non‐null tests, near‐null tests, and adaptive null tests, are reviewed. Some new developments, in the Hartmann test, deflectometry, and phase retrieval, as representatives of non‐interferometric areal measurement, are then presented. Overall, the focus is on single‐point‐probe‐based profilometry categorized into coordinate measurements and slope‐ or curvature‐based measurements. Innovative measurement technology is trying to bridge the gap between high accuracy and high dynamic range as freeform optical surfaces are finding more applications in visible and shorter‐wavelength optics. [ABSTRACT FROM AUTHOR]

Highlights • We present a novel flatness test which only using two flats. • Multi-shift and rotation steps are needed. • A pixel level spatial resolution can be achieved. • Analysis to tilt error and rotation error is presented. • Simulations and experimental absolute results are given. Abstract In classical three-flat test, error in reference surface can not be identified fully. What we obtain is only the absolute radial profile instead. In addition, at least three flats with similarly high accuracy are required. The test procedures are very complex and it takes a long time and requires high precision adjustment. In this paper, we proposed a new method for absolute test of flatness. There are only two flats used in our method and it does not need precise alignment of the specimens. The method requires multiple translations of the test surface and one 90° rotation step. The relative tilt during translation is measured by a compact wavefront interferometer. We analyze the effect of noise, tilt estimation error and rotation error on reconstruction result. The method is experimentally verified and compared with the direct interferometric result using high precision reference surface. [ABSTRACT FROM AUTHOR]

As the thickness of the adhesive layer between the mirror and the actuator decreases and the performance requirements of the unimorph deformable mirror (DM) increase, stricter control on the adhesive layer thickness and Young’s modulus is necessary. In this paper, a finite element model (FEM) for the unimorph DM with an adhesive layer is obtained. Based on the model, the influence of adhesive layer thickness and Young’s modulus on the deformation is studied. Also their influence on the adhesive’s maximum shear stress is analyzed. In the meantime, the design principles of the adhesive layer thickness and Young’s modulus are established with the restrictions of shear failure and the maximum displacement. As a result, different adhesive Young’s modulus has corresponding requirements for the upper and lower thicknesses (<20 μm) to obtain 85% maximum displacement. Then, DMs with four different mirror thicknesses are fabricated for verification experiments. The experiments results can be matched with the simulation results. Finally, the thickness in the spin coating process of adhesive layer is explored. The adhesive layer thickness can be controlled within 12.1 μm, and the deviation of uniformity is better than ±2%. [ABSTRACT FROM AUTHOR]

• The development of new-type arrayed MRF equipment was conducted through theoretical analysis, simulation and experiment. • High removal efficiency of 2.03 × 107 μm3/min and stability better than 5 % were achieved. • Actual experiment verified the effects of arrayed MRF equipment. Along with the continuous development of optical systems, the fabrication of optics gradually moved towards large aperture and high quality. To meet the requirements of optical systems, advanced technologies represented by magnetorheological finishing (MRF) were applied in the processing of optics. According to the background of high-efficiency processing, this work focused on the design of arrayed magnetorheological equipment, including magnetic field theoretical analysis, magnetic field simulation, equipment construction, removal function preparation and stability test. Through the study, arrayed MR (magnetorheological) equipment was preliminarily built and the removal function was prepared. The volume removal rate of arrayed removal function was 2.03 μm3/min after detection, which was 1.35 times of electromagnetic equipment under the same process parameters, and the stability of the removal function was better than 5 %. The results of two-dimensional removal experiment also verified that arrayed MR equipment could significantly improve materials removal efficiency. Based on the experimental results in this work, it is believed that arrayed MR equipment have certain advantages in the improvement of processing efficiency and surface quality, and it could meet the requirement of optical processing at the present stage. The relevant design theories and methods could provide reference to the follow-up research. [ABSTRACT FROM AUTHOR]

In recent years, monolithic multisurface optics with high-order aspheric surfaces and free-form surfaces have become a research hotspot. However, the high-precision shape and position error detection and high-efficiency compensation processing are the challenges faced by monolithic multisurface optics. In this paper, the shape and position error detection and compensation processing methods of monolithic multisurface optics are researched. Firstly, the highly accurate measurement of tool radius and highly accurate centering are realized by in situ interferometry. Moreover, the shape and position detection CGH is designed. Finally, the high-precision in situ detection and compensation turning experiments of monolithic multisurface optics are carried out, and the high-precision and high-efficiency processing are realized. • Highly accurate measurement of tool radius with in situ interferometry. • Highly accurate alignment by in situ interferometry. • High-precision in situ detection and compensation turning of the monolithic multisurface optics. • Separation of clamping error. [ABSTRACT FROM AUTHOR]

An aerostatic spindle is a core component in ultra-precision machine tools. The rotor of the spindle has extremely high manufacturing accuracy, which cannot be directly achieved via traditional machining, but always via manual grinding. The deterministic figuring theory is introduced into the machining of shaft parts, which overcomes many shortcomings of manual grinding. The manufacturing error of the shaft's surface contains different frequency components, which have different effects on its working performance and the figuring process. Because the deterministic figuring method can only correct the error within a limited frequency range, in order to ensure high efficiency and high precision of the figuring process, we need to use reasonable filtering parameters to filter out the error with unnecessary frequencies. In this paper, the influence of contour error with different frequencies and amplitudes on the air film are analyzed using computational fluid dynamics (CFD) software, and the amplitude–frequency analysis as a function of the power spectral density (PSD) characteristic curve is used to study the filtering parameters of the measured data. After the figuring experiment using the filtering parameters obtained from the analysis, the average roundness of the shaft converged from 0.419 μm to 0.101 μm, and the cylindricity converged from 0.76 μm to 0.35 μm. The precision reached the level of manual grinding, which proves the rationality of the analysis using filtering parameters in a shaft's deterministic figuring. [ABSTRACT FROM AUTHOR]

Various defects during the manufacture of a high-energy laser monocrystalline silicon reflector will increase the energy absorption rate of the substrate and worsen the optical properties. Micron-scale or larger manufacturing defects have been inhibited by mechanism study and improvement in technology, but the substrate performance still fails to satisfy the application demand. We focus on the changes in the optical properties affected by nanoscale and Angstrom lattice defects on the surface of monocrystalline silicon and acquire the expected high reflectivity and low absorptivity through deterministic control of its defect state. Based on the first principles, the band structures and optical properties of two typical defect models of monocrystalline silicon—namely, atomic vacancy and lattice dislocation—were analyzed by molecular dynamics simulations. The results showed that the reflectivity of the vacancy defect was higher than that of the dislocation defect, and elevating the proportion of the vacancy defect could improve the performance of the monocrystalline silicon in infrared (IR) band. To verify the results of simulations, the combined Ion Beam Figuring (IBF) and Chemical Mechanical Polishing (CMP) technologies were applied to introduce the vacancy defect and reduce the thickness of defect layer. After the process, the reflectivity of the monocrystalline silicon element increased by 5% in the visible light band and by 12% in the IR band. Finally, in the photothermal absorption test at 1064 nm, the photothermal absorption of the element was reduced by 80.5%. Intense laser usability on the monocrystalline silicon surface was achieved, and the effectiveness and feasibility of deterministic regulation of optical properties were verified. This concept will be widely applied in future high-energy laser system and X-ray reflectors. [ABSTRACT FROM AUTHOR]

The application of ultra-precision shaft parts is widely used, such as the spindle core of the air bearing spindle in ultra-precision machine tools. The precision of the spindle core is extremely high, and it is very difficult to obtain directly by traditional Computer Numerical Control (CNC) machine tools but is mostly obtained by manual grinding, whose machining efficiency is greatly limited. Based on the deterministic figuring theory, this paper focuses on the ultra-precision roundness, optimizing the filtering parameters of the measurement error data and studying the generation mechanism of the removal function morphology; the shape of the removal function is adjusted by combining the analysis of the figuring ability and positioning error. Finally, the optimized removal function is used on an experimental steel shaft, the average roundness convergence ratio is 72% higher than that of the original removal function, and the roundness reaches a 0.1 μm level. The result shows that a reasonable filtering of measured data and the removal function adjusted for the surface feature can improve the efficiency and precision of deterministic figuring on shaft parts. [ABSTRACT FROM AUTHOR]

• Measurement of large area micro topography with subaperture stitching. • Detection of edge features with slope threshold and projection on OXY plane. • Fast correction of 2D lateral coordinates by solving a linear least-squares. • Correction of height coordinates by solving a linear least-squares problem. • No need for high precision scanning stages with "sliding" eliminated by stitching. Microstructured surfaces over large areas are typical in diffractive optics and biomimetic surfaces. The topography measurement is challenging due to the multi-scale nature. In this paper, an efficient stitching method is proposed for fusion of multiple subapertures to produce a large area topography. The first step is detecting edge features and then projecting them on the OXY plane. The next step is correction of lateral coordinates by registering the edge curves in overlapping regions. The change of lateral coordinates is linearly related to the lateral shifts and clocking angle which are estimated by simply solving a linear least-squares problem. In the final step, height change is also linearly related to the piston and tip-tilt of subapertures. Hence it is corrected by minimizing the height difference in overlapping regions, which is again modeled as a linear least-squares problem. The stitching method is experimentally verified on a holographic sample. Totally seven by seven subapertures are measured with an interference microscope and seamlessly stitched together. [ABSTRACT FROM AUTHOR]

A deterministic figuring method for cylindrical surface based on abrasive belt polishing is proposed in this study in order to improve the geometric accuracy of metal shaft parts. The principal motion of material removal is performed through the axial oscillation of the abrasive belt, and the different material removal at different positions can be obtained through servo control of the machine tool spindle by removing high error spots on the cylindrical surface and finally deterministically corrects the roundness error. An abrasive belt-based deterministic figuring device was built, and the figuring experiments were performed on the surface of steel workpieces 100 mm in diameter and 130 mm in effective length. The roundness errors of the entire workpiece after twice figuring iterations decreased nearly from the initial 3 μm to 1 μm, which preliminary verified the feasibility of this method. This deterministic figuring method is expected to break the machining accuracy limit and improve the rotation precision of the precision shaft parts such as the aerostatic spindle. [ABSTRACT FROM AUTHOR]