29 results on '"Tortai, J.-H."'
Search Results
2. On the Fly Ellipsometry Imaging for Process Deviation Detection
3. Sensitivity analysis of optical scatterometry technique for high aspect ratio trench measurement
4. Core-shell percolative nanodielectric for high voltage integrated capacitors: comparative study on different metal carbon coated (Co, Ni & Cu) inclusions
5. Core-Shell Percolative Nanodielectric for High Voltage Integrated Capacitors
6. Diagnostic of the self-healing of metallized polypropylene film by modeling of the broadening emission lines of aluminum emitted by plasma discharge
7. Thickness-dependent glass transition temperature of thin resist films for high resolution lithography
8. Non-conductive ferromagnetic carbon-coated (Co, Ni) metal/polystyrene nanocomposites films.
9. New Approach to Closely Spaced Disordered Cobalt–Graphene Polymer Nanocomposites for Non-Conductive RF Ferromagnetic Films
10. Core double–shell cobalt/graphene/polystyrene magnetic nanocomposites synthesized by in situ sonochemical polymerization
11. Material and processing impact on thermal properties of thin resist films for high resolution lithography
12. Structural, magnetic and dielectric properties of non conducting nanocomposites for RF applications
13. Dispositif de caractérisation thermique des résines
14. CMOS compatible strategy based on selective atomic layer deposition of a hard mask for transferring block copolymer lithography patterns
15. Epoxy silsesquioxane resists for UV nanoimprint lithography
16. Ellipsometry studies of the kinetic of deprotection of thin 193 nm positive tone resist film
17. Geometry impact on ultrahigh resolution pattern collapse
18. Surface characterization of imprinted resist above glass transition temperature
19. Multiwavelength interferometry and competing optical methods for the thermal probing of thin polymeric films
20. Gaussian beam writing strategy: accuracy of using the shape beam simulator SELID for Gaussian beam systems
21. Overcoming pattern collapse of ultra high resolution dense lines obtained with EUV resists
22. Line edge roughness characterization with a three-dimensional atomic force microscope: Transfer during gate patterning processes
23. Influence of residual solvent in polymers patterned by nanoimprint lithography
24. Influence of pattern density in nanoimprint lithography
25. Ellipsometry studies of the kinetic of deprotection of thin 193 nm positive tone resist film.
26. Overcoming pattern collapse on e-beam and EUV lithography.
27. Self-healing of capacitors with metallized film technology
28. Self-healing of metallized polymer films of different nature
29. Self-healing of metallized polymer films of different nature.
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