Search

Electrowetting-based adaptive optics are of great interest for applications ranging from confocal microscopy to LIDAR, but the impact of low-frequency mechanical vibration on these devices remains to be studied. We present a simple theoretical model for predicting the resonance modes induced on the liquid interface in conjunction with a numerical simulation. We experimentally confirm the resonance frequencies by contact angle modulation. They are found to be in excellent agreement with the roots of the zero-order Bessel functions of the first kind. Next, we experimentally verify that external axial vibration of an electrowetting lens filled with density mismatched liquids (Δρ = 250 kg/m3) will exhibit observable Bessel modes on the liquid–liquid interface. An electrowetting lens filled with density matched liquids (Δρ = 4 kg/m3) is robust to external axial vibration and is shown to be useful in mitigating the effect of vibrations in an optical system.

We present a tunable on-chip liquid resonator in conjunction with a tapered fiber coupling scheme. The resonator consists of a glycerol droplet submerged within an immiscible liquid bath, which mitigates the effects of environmental fluctuations. The platform is fabricated using standard semiconductor techniques, which enable the future integration of photonic components for an on-chip liquid resonator device. The liquid resonator maintains its high Q-factor on chip (105) due to surface tension forming an atomically smooth liquid-liquid interface. Higher Q-factor resonance modes experienced linewidth broadening due to the random excitation of thermal capillary vibrations. Spectral tuning is demonstrated using the electrowetting effect, increasing the surface’s wettability and an expansion in the droplet diameter. A maximum spectral tuning of 1.44 nm ± 5 pm is observed by applying 35 V. The tuning range is twice the free spectral range (FSR) of 0.679 nm measured at a pumping wavelength range of 770-775 nm. A 2D axisymmetric finite-element simulation shows resonance modes in good agreement with experimentally measured spectra and with predicted tuning speeds of 20 nm/s.

Optical sectioning structured illumination microscopy (OS-SIM) provides optical sectioning capability in wide-field microscopy. The required illumination patterns have traditionally been generated using spatial light modulators (SLM), laser interference patterns, or digital micromirror devices (DMDs) which are too complex to implement in miniscope systems. MicroLEDs have emerged as an alternative light source for patterned illumination due to their extreme brightness capability and small emitter sizes. This paper presents a directly addressable striped microLED microdisplay with 100 rows on a flexible cable (70 cm long) for use as an OS-SIM light source in a benchtop setup. The overall design of the microdisplay is described in detail with luminance-current-voltage characterization. OS-SIM implementation with a benchtop setup shows the optical sectioning capability of the system by imaging within a 500 µm thick fixed brain slice from a transgenic mouse where oligodendrocytes are labeled with a green fluorescent protein (GFP). Results show improved contrast in reconstructed optically sectioned images of 86.92% (OS-SIM) compared with 44.31% (pseudo-widefield). MicroLED based OS-SIM therefore offers a new capability for deep tissue widefield imaging.

We have demonstrated an electronically controlled laser, generating 50 nJ picosecond pulses at 760 nm. The gain-switched pulses at 1032 nm are amplified in Yb-fiber and frequency converted in photonic crystal fiber using four-wave mixing.

We present a high-resolution miniature, light-weight fluorescence microscope with electrowetting lens and onboard CMOS for high resolution volumetric imaging and structured illumination for rejection of out-of-focus and scattered light. The miniature microscope (SIMscope3D) delivers structured light using a coherent fiber bundle to obtain optical sectioning with an axial resolution of 18 μm. Volumetric imaging of eGFP labeled cells in fixed mouse brain tissue at depths up to 220 μm is demonstrated. The functionality of SIMscope3D to provide background free 3D imaging is shown by recording time series of microglia dynamics in awake mice at depths up to 120 μm in the brain.

We present a high-resolution miniature, light-weight fluorescence microscope with electrowetting lens and onboard CMOS for high resolution volumetric imaging and structured illumination for rejection of out-of-focus and scattered light. The miniature microscope (SIMscope3D) delivers structured light using a coherent fiber bundle to obtain optical sectioning with an axial resolution of 18 µm. Volumetric imaging of eGFP labeled cells in fixed mouse brain tissue at depths up to 260 µm is demonstrated. The functionality of SIMscope3D to provide background free 3D imaging is shown by recording time series of microglia dynamics in awake mice at depths up to 120 µm in the brain.

The thermal atomic layer etching (ALE) of VO2 was demonstrated using sequential exposures of BCl3 and SF4. The VO2 etch rate measured by quartz crystal microbalance investigations at 250 °C was 2.3 Å/cycle. The mass losses during individual BCl3 and SF4 reactions were nearly self-limiting versus BCl3 and SF4 exposures. The VO2 etch rates were also dependent on temperature and varied from 0.05 Å/cycle at 150 °C to 2.3 Å/cycle at 250 °C. Fourier transform infrared (FTIR) spectroscopy studies observed VO2 etching by monitoring the decrease in absorbance from V—O stretching vibrations in the VO2 film. The FTIR spectra during the initial BCl3 exposures on the VO2 film observed the growth of absorbance from B—O stretching vibrations from B2O3 and the concurrent loss of V=O vibrational features. These changes were consistent with BCl3 converting VO2 to B2O3. The FTIR difference spectra during subsequent SF4 and BCl3 reactions also observed the growth and loss of absorbance features that were attributed to F3V=O and V—F stretching vibrations, respectively. These changes indicate that SF4 fluorinates VO2 to form a VOF3 surface layer and then BCl3 undergoes ligand-exchange with VOF3 to volatilize the VOF3 surface layer as VOCl3. There was also evidence for conversion of VO2 to B2O3 during BCl3 exposures and then removal of B2O3 by SF4 exposures. In addition, quadrupole mass spectrometry (QMS) measurements observed that the SF4 exposures produced ion intensities for SOxFyClz products in oxidation states greater than 4+. These SOxFyClz products indicate that SF4 is being oxidized and acting as a deoxyfluorination reactant. Concurrently, the QMS analysis also monitored ion intensity for S8+, S7+, S6+, S5+, and S4+. These S8 electron impact ionization products argue that SF4 oxidation occurs concurrently with SF4 reduction. The QMS also observed ion intensities corresponding to VCl4+ and VOCl3+. The presence of VOCl3+ indicates that the oxidation state of vanadium has increased to 5+ in some of the volatile etch products. The QMS also detected trichloroboroxin (B3O3Cl3) during BCl3 exposures. B3O3Cl3 is a known etch product of B2O3 during BCl3 exposures. BCl3 can convert VO2 to B2O3 and then proceed to etch the converted B2O3. Thermal VO2 ALE using BCl3 and SF4 reveals the rich complexity of surface etching reactions that can proceed by multiple pathways including conversion, ligand-exchange, and oxidation state changes.

Thermal atomic layer etching (ALE) is an important technique for the precise isotropic etching of nanostructures. Thermal ALE of many materials can be achieved using a two-step fluorination and lig...

This paper illustrates an electrostatic comb-drive actuator array integrated with a scanning probe cantilever capable of $9.13\mu \mathrm{m}$ of unilateral displacement at as little as 55V. We have investigated and implemented several approaches to achieve this large displacement with the aim being to develop our own MEMS scanning probes with robust nanowires grown directly onto the cantilevers. By utilizing double folded flexures as our guiding mechanical parts, we reduced stiffness in the actuating direction. The fabrication of trapezoidal combs allows for longer combs with more actuating fingers to create a greater force without adding weight to the structures. The increased electrostatic force and thus displacement of the device is also due to a reduced finger gap size of $2\mu \mathrm{m}$ and development of a faster etch process to provide for smoother side walls and better structural stability of the numerous thin fingers. In addition, we shifted from the traditional approach of grounding the fixed combs to grounding the movable combs which is necessary to allow for integration of RF signals at a future date. Finally, by conducting such fabrication in-house we have demonstrated the ability to incorporate growth of a nanowire into this fabrication process.

We present a calibration method to correct for fabrication variations and optical misalignment in a two-dimensional electrowetting scanner. These scanners are an attractive option due to being transmissive, nonmechanical, having a large scan angle (±13.7°), and low power consumption ( $\mu \text{W}$ ). Fabrication imperfections lead to non-uniform deposition of the dielectric or hydrophobic layer which results in actuation inconsistency of each electrode. To demonstrate our calibration method, we scan a $5\times5$ grid target using a four-electrode electrowetting prism and observe a pincushion type optical distortion in the imaging plane. Zemax optical simulations verify that the symmetric distortion is due to the projection of a radial scanning surface onto a flat imaging plane, while in experiment we observe asymmetrical distortion due to optical misalignment and fabrication imperfections. By adjusting the actuation voltages through an iterative Delaunay triangulation interpolation method, the distortion is corrected and saw an improvement in the mean error across 25 grid points from 43 $\mu \text{m}$ (0.117°) to 10 $\mu \text{m}$ (0.027°). Schematic of a four electrode electrowetting laser scanner used to generate a 25-point grid target.

A tunable liquid whispering gallery mode (WGM) resonator based on the electrowetting principle is presented. The liquid resonator consists of a glycerol droplet submerged within an immiscible liquid (dodecane/hexane) bath. The diameter of the droplet is electrically tuned using the electrowetting effect, resulting in a redshift in optical resonance frequency. By applying 35 V, a maximum spectral tuning of 1.44 nm ± 5 pm is achieved. The tuning range achieved is twice the free spectral range (FSR) of the resonator, 0.679 nm. The Q-factor of the resonator with a glycerol droplet in hexane liquid system is measured to be 3.5 × 106. This work represents a new on-chip design, fabricated using standard microfabrication techniques, for future physical and biochemical sensing applications.

An optical switch based on an electrowetting prism coupled to a multimode fiber has demonstrated a large extinction ratio with speeds up to 300 Hz. Electrowetting prisms provide a transmissive, low power, and compact alternative to conventional free-space optical switches, with no moving parts. The electrowetting prism performs beam steering of ±3° with an extinction ratio of 47 dB between the ON and OFF states and has been experimentally demonstrated at scanning frequencies of 100–300 Hz. The optical design is modeled in Zemax to account for secondary rays created at each surface interface (without scattering). Simulations predict 50 dB of extinction, in good agreement with experiment.

Electrowetting adaptive optical devices are versatile, with applications ranging from microscopy to remote sensing. The choice of liquids in these devices governs its tuning range, temporal response, and wavelength of operation. We characterized a liquid system, consisting of 1-phenyl-1-cyclohexene and deionized water, using both lens and prism devices. The liquids have a large contact angle tuning range, from 173 to 60°. Measured maximum scanning angle was realized at ±13.7° in a two-electrode prism, with simulation predictions of ±18.2°. The liquid's switching time to reach 90° contact angle from rest, in a 4 mm diameter device, was measured at 100 ms. Steady-state scanning with a two-electrode prism showed linear and consistent scan angles of ±4.8° for a 20 V differential between the two electrodes, whereas beam scanning using the liquid system achieved ±1.74° at 500 Hz for a voltage differential of 80 V.

Scaling remains a serious barrier to membrane-based desalination. While some real-time techniques have proven effective for scaling detection, none provides the crucial capability of chemical ident...

The recent advancement of semiconductor devices to the near-atomic scale necessitated the development of atomic layer processing methods, including molecular layer deposition (MLD). This gas-phase deposition technique creates semipermeable polymer films with precise control of composition and thickness. Herein, MLD was used to produce thin-film composite reverse osmosis membranes. Aromatic polyamide films as thin as 0.5 nm were applied to NF270 nanofiltration membranes using m-phenylenediamine and trimesoyl chloride. Within two molecular layers, desalination performance was affected. As film thickness increased to 15 nm (48 MLD cycles), performance progressed from nanofiltration to reverse osmosis metrics in terms of salt rejection and water permeance. With film thickness > 5 nm, rejection values exceeded a small sampling of commercial membranes. In all cases, a tradeoff between rejection and permeance was observed. Atomic force microscopy measurements indicate that MLD enhancement led to removal of small-scale roughness features and resulted in a root mean square roughness difference of

­Ultrathin Al2O3 atomic layer deposition (ALD) films with low pinhole density were fabricated using a deposit and etchback approach. This strategy was able to avoid the pinholes that originated during nonuniform nucleation of Al2O3 ALD films. In this method, an Al2O3 ALD film was deposited to a thickness greater than the desired thickness to reduce the number of pinholes and form a more continuous Al2O3 ALD film. Subsequently, the Al2O3 ALD film was etched back to a smaller thickness using thermal Al2O3 atomic layer etching (ALE). The number of pinholes in the resulting Al2O3 ALD film was measured by the percentage yield of metal-insulator-metal (MIM) capacitors based on an Ag/Al2O3/Al structure that did not have an electrical short. The device yield was improved using the deposition and etchback approach. For example, using device areas of 0.01 mm2, Al2O3 ALD films that were grown to 5 nm in the MIM capacitor gave a yield of 30%–40%. In contrast, Al2O3 ALD films that were grown to 24 nm and then etched back to 5 nm to form the MIM capacitor provided a yield of 65%–75%. This increase in yield of approximately 100% indicates that the deposit and etchback approach can improve the yield of MIM devices based on ultrathin Al2O3 ALD films. Although this method has been previously suggested to improve the quality of ultrathin films, this report is believed to be the first demonstrated application of using the deposit and etchback approach for device fabrication. Additional experiments revealed that a portion of the yield improvement can be attributed to the fluorination of the Al2O3 ALD films that produced a volume expansion when forming AlF3. This expansion may produce a compressive stress that helps to close the pinholes. The dielectric constant was also measured for Al2O3 ALD films versus Al2O3 film thickness. The dielectric constant was the same for as-deposited Al2O3 ALD films and Al2O3 ALD films that were first grown to 24 nm and then etched back to smaller thicknesses. This agreement indicates that the dielectric constant can be understood in terms of a series capacitor model and that Al2O3 ALE does not affect the electrical properties of the Al2O3 films.

Adaptive optical lenses based on the electrowetting principle are being rapidly implemented in many applications, such as microscopy, remote sensing, displays, and optical communication. To characterize the response of these electrowetting lenses, the dependence upon direct current (DC) driving voltage functions was investigated in a low-viscosity liquid system. Cylindrical lenses with inner diameters of 2.45 and 3.95 mm were used to characterize the dynamic behavior of the liquids under DC voltage electrowetting actuation. With the increase of the rise time of the input exponential driving voltage, the originally underdamped system response can be damped, enabling a smooth response from the lens. We experimentally determined the optimal rise times for the fastest response from the lenses. We have also performed numerical simulations of the lens actuation with input exponential driving voltage to understand the variation in the dynamics of the liquid-liquid interface with various input rise times. We further enhanced the response time of the devices by shaping the input voltage function with multiple exponential rise times. For the 3.95 mm inner diameter lens, we achieved a response time improvement of 29% when compared to the fastest response obtained using single-exponential driving voltage. The technique shows great promise for applications that require fast response times.

We present widefield structured illumination in a miniature, light-weight fiber-coupled microscope with electrowetting axial scanning. We demonstrate imaging of YFP-labeled neurons in mouse brain tissue showing potential for fast volumetric imaging in freely moving animals.

This paper presents the first study of the effect of thermal atomic layer etching (ALE) on the residual stress in suspended atomic layer deposition (ALD) structures. Optical curvature measurements on silicon wafers with varying thicknesses of Al 2 O 3 ALD on polyimide were collected ex situ to obtain the residual stress evolution of the film. Brownian motion of micromachined resonators fabricated with an ALD-on-polyimide process [1] was measured in a range of 1-10 MHz using an optical interferometer before and after ALE processing. Experimental resonant frequencies were compared with FEM simulations to validate residual stress in suspended structures. Results show good agreements between the residual stress obtained using resonant frequency and wafer curvature measurements. Furthermore, suspended beams with an initial thickness of 30 nm were thinned down to 10 nm using ALE. TEM imaging was used to confirm beam thickness after etching. Experimental data with FEM validation shows that ALE can be used to remove highly stressed nucleation and coalescence regions in free-standing structures.

A light detection and ranging (lidar) system with ±90° of steering based on an adaptive electrowetting-based prism for nonmechanical beam steering has been demonstrated. Electrowetting-based prisms provide a transmissive, low power, and compact alternative to conventional adaptive optics as a nonmechanical beam scanner. The electrowetting prism has a steering range of ±7.8°. We demonstrate a method to amplify the scan angle to ±90° and perform a one-dimensional scan in a lidar system.

Interlocking microstructures formed from suspended ultrathin films create a mechanical bond between heterogeneous microfabricated dies. Films approximately 34 nm in thickness have been fabricated using atomic layer deposition in conjunction with standard surface micromachining. Bonding surfaces consist of polyimide pillars with a pitch of 19.8–29 $\mu \text{m}$ that support nanofilm cantilevers, with an areal density of 9.52 $\times 10^{3}$ joints/mm2 for square surface tiling and $4.14 \times 10^{3}$ joints/mm2 for triangle tiling. Cantilevers 2.2 and 3.1 $\mu \text{m}$ in length provide length-to-thickness aspect ratios of 65:1 and 91:1, respectively. Bonding of complementary mating surfaces has been observed optically through transparent flexible substrates. [2015-0240]

Chemical characterization of scaling and removal processes was performed in real time via Raman spectroscopy in a bench-scale reverse osmosis (RO) system. A custom RO cross-flow cell was integrated with a Raman microscope objective, allowing for analysis of localized membrane scaling and scale removal. Permeate flux was also measured to provide a real-time metric for comparison. A commercial flat sheet, thin-film composite reverse osmosis (TFC RO) membrane was scaled using a calcium sulfate (CaSO4·H2O) feed solution. Upon CaSO4 scale detection, the feed was switched to DI water, which served as a cleaning agent to remove the CaSO4 scale from the membrane. In addition to the real-time local (Raman) and global (permeate flux) measurements, membrane samples were characterized post-mortem using Raman spectroscopy, gravimetric analysis and scanning electron microscopy to provide important scaling and scale removal metrics. Results from real-time measurements indicated that changes in Raman intensity were a more sensitive indicator of local scale removal than changes in permeate flux, a standard cleaning performance metric; these findings were corroborated by the post-mortem analyses. Overall, the membrane cleaning experiments showed that Raman spectroscopy provided crucial real-time chemical composition and spatial distribution information, which can inform more effective antiscaling and cleaning strategies.

Molecular layer deposition (MLD) is able to produce ultrathin polymer films with control over thickness, cross-linking, and chemical composition. With these capabilities, MLD should be useful in the fabrication of novel polymer membranes on porous supports. However, confining a continuous MLD film to the surface of porous substrates is difficult because of MLD film growth in the pores. The deposition in the pores lowers the conductance of the porous support. This paper presents a method to deposit continuous polymer films on top of porous substrates. In this method, Al2O3 plasma-enhanced atomic layer deposition (PE-ALD) using trimethylaluminum and oxygen plasma as the reactants was first used to cap the pores of the substrate. Subsequently, a polyamide MLD film was deposited on the Al2O3 PE-ALD capping layer using m-phenylenediamine and trimesoyl chloride as the reactants. The Al2O3 pore caps were then removed from the porous substrate by etching from the backside using a timed exposure to a dilute sodium hydroxide solution. This method was demonstrated using anodic aluminum oxide (AAO) and polyethersulfone (PES) porous substrates. Al2O3 PE-ALD film growth was limited to the top of the porous substrate, resulting in rapid surface recombination or high sticking coefficients for the reactive plasma species within the pores. Gas permeance measurements confirmed the pore capping of the AAO substrates. The reopening of the pores by dissolving the Al2O3 pore caps with a sodium hydroxide solution was monitored using gas permeance versus etch time. The removal of the Al2O3 pore caps from the PES substrates could also dissolve the Al2O3 layer underneath the MLD film. The loss of this Al2O3 layer led to the detachment of the MLD film from the PES substrate. However, the MLD film could be anchored to the PES support at fractures located in the Al2O3 film prior to the MLD. The Al2O3 film fracture allowed the MLD film to anchor firmly to the PES substrate by MLD in the pores of the PES porous substrate. The distance between the anchor points was a function of fracture density. This distance could be controlled by applying a tensile stress to the Al2O3 PE-ALD film to fracture the film through sample bending. This method produced firmly anchored polymer MLD films on top of the PES porous substrates.

Electrowetting devices are compact, low power, transmissive, and adaptable. We have demonstrated nonmechanical beam steering in a LIDAR system and imaging in a multiphoton microscope, with an electrowetting prism.

Early-stage scaling detection is a crucial component for optimizing proactive anti-fouling measures that enhance membrane lifetime and decrease operation costs. In this work, we utilize Raman spectroscopy to detect and chemically quantify multiple scalants during bench-scale reverse osmosis desalination. The experiments were conducted with a commercial brackish water thin-film composite membrane at a feed pressure of 1.2 MPa (175 psi) and a feed flow velocity of 4.2 cm/s. Raman measurements were performed in real-time at a laser excitation wavelength of 785 nm. Experimental results from single-feed solutions of CaSO4 and CaCO3 show consistent detection of the corresponding scalants with less than a 15% permeate flow-rate decrease at detection inclusive of the permeate decline due to compaction. Experiments utilizing a mixed-feed solution containing CaSO4 and CaCO3 were also conducted. Results for the mixed-feed experiments showed detection of CaSO4 scaling only. Subsequent analysis indicated that a modified sampling strategy was required for successful real-time detection of both CaSO4 and CaCO3 scaling.

We present a miniature head mounted two-photon fiber-coupled microscope (2P-FCM) for neuronal imaging with active axial focusing enabled using a miniature electrowetting lens. Full three-dimensional two-photon imaging of GCaMP6s showing individual neuron activity in multiple focal planes was achieved in a freely-moving mouse. Two-color simultaneous imaging of GFP and tdTomato fluorescence is also demonstrated. Additionally, dynamic control of the axial scanning of the electrowetting lens allows tilting of the focal plane enabling cells in multiple focal planes to be imaged simultaneously. Two-photon imaging allows increased penetration depth in tissue yielding a working distance of 450 μm with an additional 180 μm of active axial focusing. The objective NA is 0.45 with a lateral resolution of 1.8 μm, an axial resolution of 10 μm, and a field-of-view of 240 μm diameter. The 2P-FCM has a weight of only ∼2.5 g and is capable of repeatable and stable head-attachment. The 2P-FCM with dynamic axial scanning provides a new capability to record from functionally distinct neuronal layers, opening new opportunities in neuroscience research.

We demonstrate real-time, local detection of the onset of scaling, in addition to chemical quantification, in a reverse osmosis separation system using confocal Raman microscopy. The results show consistent scalant detection.

We have demonstrated an electrowetting prism as a lateral scanning element for a 2-photon excitation microscope. We show imaging of mouse hippocampal neurons, with a field of view of 130 ×130 μm2

Work presented here measures and interprets the electrical and thermal conductivities of atomic layer deposited (ALD) free-standing single film and periodic tungsten and aluminum oxide nanobridges with thicknesses from ∼5-20 nm and ∼3-13 nm, respectively. Electrical conductivity of the W films is reduced by up to 99% from bulk, while thermal conductivity is reduced by up to 91%. Results indicate phonon contribution to thermal conductivity is dominant in these ALD films and may be substantially reduced by the incorporation of periodicity in the ALD W/Al2O3 nanolaminates. Additionally, thin film conduction modeling demonstrates nano-structured grain features largely dictate electron and phonon conduction in ALD W. New fabrication methods have allowed for the development of free-standing ultra-thin structures with layers on the order of several nanometers utilizing ALD. While the literature contains diverse studies of the physical properties of thin films prepared by traditional micro-fabrication sputtering or chemical vapor deposition techniques, there remains little data on freestanding structures containing ALD generated materials. Specifically, knowledge of the electrical and thermal conductivity of ALD generated materials will aid in the future development of ultra-thin nano-devices.

We present numerical simulations of multielectrode electrowetting devices used in a novel optical design to correct wavefront aberration. Our optical system consists of two multielectrode devices, preceded by a single fixed lens. The multielectrode elements function as adaptive optical devices that can be used to correct aberrations inherent in many imaging setups, biological samples, and the atmosphere. We are able to accurately simulate the liquid-liquid interface shape using computational fluid dynamics. Ray tracing analysis of these surfaces shows clear evidence of aberration correction. To demonstrate the strength of our design, we studied three different input aberrations mixtures that include astigmatism, coma, trefoil, and additional higher order aberration terms, with amplitudes as large as one wave at 633 nm.

The use of large-deflection springs, tabs, and other compliant systems to provide integral attachment, joining, and retention is well established and may be found throughout nature and the designed world. Such systems present a challenge for mechanical analysis due to the interaction of contact mechanics with large-deflection analysis. Interlocking structures experience a variable reaction force that depends on the cantilever angle at the contact point. This paper develops the mathematical analysis of interlocking cantilevers and provides verification with finite element analysis and physical measurements. Motivated by new opportunities for nanoscale compliant systems based on ultrathin films and two-dimensional (2D) materials, we created a nondimensional analysis of retention tab systems. This analysis uses iterative and elliptic integral solutions to the moment–curvature elastica of a suspended cantilever and can be scaled to large-deflection cantilevers of any size for which continuum mechanics applies. We find that when a compliant structure is bent backward during loading, overlap increases with load, until a force maximum is reached. In a force-limited scenario, surpassing this maximum would result in snap-through motion. By using angled cantilever restraint systems, the magnitude of insertion force relative to retention force can vary by 50× or more. The mathematical theory developed in this paper provides a basis for fast analysis and design of compliant retention systems, and expands the application of elliptic integrals for nonlinear problems.

We present a miniature head mounted two-photon fiber-coupled microscope (2P-FCM) for neuronal imaging with active axial focusing enabled using a miniature electrowetting lens. We show three-dimensional two-photon imaging of neuronal structure and record neuronal activity from GCaMP6s fluorescence from multiple focal planes in a freely-moving mouse. Two-color simultaneous imaging of GFP and tdTomato fluorescence is also demonstrated. Additionally, dynamic control of the axial scanning of the electrowetting lens allows tilting of the focal plane enabling neurons in multiple depths to be imaged in a single plane. Two-photon imaging allows increased penetration depth in tissue yielding a working distance of 450 μm with an additional 180 μm of active axial focusing. The objective NA is 0.45 with a lateral resolution of 1.8 μm, an axial resolution of 10 μm, and a field-of-view of 240 μm diameter. The 2P-FCM has a weight of only ~2.5 g and is capable of repeatable and stable head-attachment. The 2P-FCM with dynamic axial scanning provides a new capability to record from functionally distinct neuronal layers, opening new opportunities in neuroscience research.

Laser scanners are an integral part of high resolution biomedical imaging systems such as confocal or 2-photon excitation (2PE) microscopes. In this work, we demonstrate the utility of electrowetting on dielectric (EWOD) prisms as a lateral laser-scanning element integrated in a conventional 2PE microscope. To the best of our knowledge, this is the first such demonstration for EWOD prisms. EWOD devices provide a transmissive, low power consuming, and compact alternative to conventional adaptive optics, and hence this technology has tremendous potential. We demonstrate 2PE microscope imaging of cultured mouse hippocampal neurons with a FOV of 130 × 130 μm2 using EWOD prism scanning. In addition, we show simulations of the optical system with the EWOD prism, to evaluate the effect of propagating a Gaussian beam through the EWOD prism on the imaging quality. Based on the simulation results a beam size of 0.91 mm full width half max was chosen to conduct the imaging experiments, resulting in a numerical aperture of 0.17 of the imaging system.

The strain-induced change in a carbon-nanotube diffraction pattern is found after applying strain, using a microelectromechanical tensile stage, to the outer shell of a double-walled carbon nanotube, while the inner shell provides an unstrained reference pattern. The nanotube is found to have chirality (63,21)@(65,32) with 16-20° tilt and strain up to 1% in the outer shell.

In this paper, we present the design, fabrication, and testing of a monolithic polymer Joule-Thomson microcryogenic cooler (MCC) cold stage. The MCC cold stages were fabricated monolithically on a wafer out of polyimide. The fabrication was based on surface micromachining technologies using electroplated copper as the sacrificial layers and polyimide as the structural material. The process consisted of multilayers of metallization, coating of polyimide, and the patterning on each layer. One of the key techniques enabling this monolithic approach was the development of the wafer-level 3-D interconnect for making high pressure (e.g., 10 atm) polymer fluid microchannels. To evaluate the performance of the MCC, a five-component fluid mixture designed for cooling from 300 to 200 K was used as a refrigerant. The cold tip reached 190 K under a refrigerant pressure ratio of 6.2:1.1 bar. The heat-lift at 200 K was measured to be 5.2 mW.

Molecular layer deposition (MLD) techniques were used to deposit conformal coatings on bulk quantities of carbon nanotubes (CNTs). Several metalcone MLD chemistries were employed, including alucone (trimethylaluminum/glycerol and trimethylaluminum/ethylene glycol), titanicone (TiCl4/glycerol), and zincone (diethyl zinc/glycerol). The metalcone MLD films grew directly on the CNTs and MLD initiation did not require atomic layer deposition (ALD) of an adhesion layer. Transmission electron microscopy revealed that MLD formed three-dimensional conformal deposits throughout a CNT scaffold. Mechanical testing was also performed on sheets of CNT networks coated by MLD. Young's Modulus values improved from an initial value of 510 MPa for uncoated CNT sheet to values that ranged from 2.2 GPa, for 10 nm of glycerol alucone (AlGL), to 8.7 GPa for a composite 5 nm AlGL + 5 nm Al2O3 coating.

Thermally actuated piezoresistive readout single crystal silicon (SCS) resonators with a device footprint of ∼110 μm 2 have been experimentally demonstrated at operating frequencies of 112–176 MHz. An SOIMEMS fabrication process was developed which incorporates electron beam lithography to achieve submicron dimensions. Demonstrated performance under vacuum (50–70 Torr) includes a Q = 5750 and motional conductance of 89.6 μA/V. Frequency tunability of 2.1% in ambient and 3.66% under vacuum is achieved by variation of the DC bias current. The effects of asymmetry of the devices on operating frequency due to fabrication imperfections are considered qualitatively using commercial modeling software.

In this paper we investigate axial p–n junction GaN nanowires grown by plasma-assisted molecular beam epitaxy (MBE), with particular attention to the effect of Mg doping on the device characteristics of individual nanowire light-emitting diodes (LEDs). We observe that a significant fraction of single-nanowire LEDs produce measurable band-gap electroluminescence when a thin AlGaN electron blocking layer (EBL) is incorporated into the device structure near the junction. Similar devices with no EBL typically yield below-detection-limit electroluminescence, despite diode-like I–V characteristics and optically measured internal quantum efficiencies (IQEs) of ∼1%. I–V measurements of the p-regions in p–n junction nanowires, as well as nanowires doped with Mg only, indicate low p-type conductivity and asymmetric Schottky-like p-contacts. These observations suggest that imbalanced carrier injection from the junction and p-contact can produce significant nonradiative losses.

This study describes the fabrication, assembly, and testing of a micro gas compressor. The compressor is formed by MEMS-based check valves coupled to a Kapton membrane driven by a mechanically amplified piezoelectric actuator. The valves are surface machined on a silicon substrate using polyimide as the structural material and copper as the sacrificial material. This design allows valves with low leak rates, low compressor dead volume, and the high compressible volume required to generate the pressure levels required of numerous applications including cryogenic cooling. The assembled compressor is tested with voltages over the range of 25–180 V and frequencies over the range of 25–700 Hz. A maximum pressure ratio of 4.3:1 is found when the actuator provides a maximum displacement of 156 μm, while the maximum flow-rate through the compressor of 51 standard cubic cm per minute (sccm) is observed when the compressor is operating at its resonant frequency.

We have demonstrated tunability of the response time of electrowetting lenses from underdamped to overdamped through input voltage shaping. This strategy shows great promise to further optimize the response time of electrowetting lenses.

In this Letter we report on the fabrication, device characteristics, and optical coupling of a two-nanowire device comprising GaN nanowires with light-emitting and photoconductive capabilities. Axial p-n junction GaN nanowires were grown by molecular beam epitaxy, transferred to a non-native substrate, and selectively contacted to form discrete optical source or detector nanowire components. The optical coupling demonstrated for this device may provide new opportunities for integration of optical interconnects between on-chip electrical subsystems.

Focused ion beam (FIB) micromachining is a powerful tool for maskless lithography and in recent years FIB has been explored as a tool for strain engineering. Ion beam induced deformation can be utilized as a means for folding freestanding thin films into complex 3D structures. FIB of high energy gallium (Ga+) ions induces stress by generation of dislocations and ion implantation within material layers, which create creases or folds upon mechanical relaxation enabled by motion of the material layers. One limitation on such processing is the ability to fabricate flat freestanding thin film structures. This capability is limited by the residual stresses formed during processing and fabrication of the films, which can result in initial curvature and deformation of films upon release from a sacrificial fabrication layer. This paper demonstrates folding in freestanding ultrathin films ( 1:1000) by ion-induced stress relaxation. The ultrathin flat structures are fabricated using atomic layer deposition on sacrificial polyimide. We have demonstrated vertical folding with 30 keV Ga+ ions in structures with lateral dimensions varying from 10 to 50 μm.