1. 3-D TCAD Methodology for Simulating Double-Hysteresis Filamentary I – V Behavior and Holding Current in ESD Protection SCRs.
- Author
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Karaca, Hasan, Holland, Steffen, Ritter, Hans-Martin, Kumar, Vasantha, Notermans, Guido, and Pogany, Dionyz
- Subjects
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ELECTROSTATIC discharges , *SILICON-controlled rectifiers , *COMPUTER-aided design , *CURRENT distribution - Abstract
Current filament (CF)-related double-hysteresis ${I}$ – ${V}$ behavior and holding current, ${I} _{\text {HOLD}}$ , are analyzed using experiments and 3-D technology computer-aided design (TCAD) simulation in silicon-controlled rectifiers (SCR) for system-level electrostatic discharge (ESD) protection. Our 3-D TCAD methodology uses up and down quasi-dc current sweeps to reveal a memory effect in the current density distribution along the device width. ${I} _{\text {HOLD}}$ is related to the smallest possible CF where the self-sustaining SCR action takes place during down current sweep. ${I} _{\text {HOLD}}$ exhibits a nontrivial dependence on device width, depending on whether a CF is created or not. Analyzing devices of different layouts shows that ${I} _{\text {HOLD}}$ values determined from experiments and 3-D TCAD are almost layout-independent and substantially lower than those evaluated from 2-D TCAD. ${I} _{\text {HOLD}}$ calculated by 3-D TCAD in edge-terminated devices is higher than that in 3-D structures obtained from simple width-extended 2-D doping profiles. The use of latter devices, thus, simplifies the 3-D TCAD ${I}$ – ${V}$ analysis and provides a safe margin for ${I} _{\text {HOLD}}$ prediction. The work is relevant for designing the latch-up immunity of ESD protection devices, and it also shows that conventional 2-D TCAD can provide unwanted overestimation of ${I} _{\text {HOLD}}$. [ABSTRACT FROM AUTHOR]
- Published
- 2021
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