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A Feedback Controlled MEMS Nanopositioner for On-Chip High-Speed AFM.
- Source :
-
Journal of Microelectromechanical Systems . Jun2014, Vol. 23 Issue 3, p610-619. 10p. - Publication Year :
- 2014
-
Abstract
- We report the design of a two-degree-of-freedom microelectromechanical systems nanopositioner for on-chip atomic force microscopy (AFM). The device is fabricated using a silicon-on-insulator-based process to function as the scanning stage of a miniaturized AFM. It is a highly resonant system with its lateral resonance frequency at ~850 Hz. The incorporated electrostatic actuators achieve a travel range of 16 μm in each direction. Lateral displacements of the scan table are measured using a pair of electrothermal position sensors. These sensors are used, together with a positive position feedback controller, in a feedback loop, to damp the highly resonant dynamics of the stage. The feedback controlled nanopositioner is used, successfully, to generate high-quality AFM images at scan rates as fast as 100 Hz. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 23
- Issue :
- 3
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 101290591
- Full Text :
- https://doi.org/10.1109/JMEMS.2013.2287506