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AC-Capacitance Techniques for Interface Trap Analysis in GaN-Based Buried-Channel MIS-HEMTs.
- Source :
-
IEEE Transactions on Electron Devices . Jun2015, Vol. 62 Issue 6, p1870-1878. 9p. - Publication Year :
- 2015
-
Abstract
- Effective interface trap characterization approaches are indispensable in the development of gate stack and dielectric surface passivation technologies in III-nitride (III-N) insulated-gate power switching transistors for enhanced stability and dynamic performance. In III-N metal-insulator-semiconductor high-electron-mobility transistors (MIS-HEMTs) that feature a buried channel, the polarized barrier layer separates the critical dielectric/III-N interface from the two-dimensional electron gas (2DEG) channel and consequently complicates interface trap analysis. The barrier layer not only causes underestimation/uncertainty in interface trap extraction using conventional ac-conductance method but also allows the Fermi level dipping deep into the bandgap at the pinch-off of the 2DEG channel. To address these issues, we analyze the frequency/temperature dispersions of the second slope in capacitance-voltage characteristics and develop systematic ac-capacitance techniques to realize interface trap mapping in MIS-HEMTs. The correlation between ac-capacitance and pulse-mode hysteresis measurements show that appropriate gate bias need to be selected in the interface trap characterization of MIS-HEMTs, in order to match the time constant of interface traps at the Fermi level with ac frequency and pulsewidth. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 62
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- 102874772
- Full Text :
- https://doi.org/10.1109/TED.2015.2420690