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Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology.
- Source :
-
IEEE Transactions on Systems, Man & Cybernetics. Systems . Oct2016, Vol. 46 Issue 10, p1456-1467. 12p. - Publication Year :
- 2016
-
Abstract
- This work studies the scheduling problem of a single-arm multicluster tool with a linear topology and process-bound bottleneck individual tool. The objective is to find a one-wafer cyclic schedule such that the lower bound of cycle time is reached by optimally configuring spaces in buffering modules that link individual cluster tools. A Petri net (PN) model is developed to describe the dynamic behavior of the system by extending resource-oriented PNs such that a schedule can be parameterized by robots’ waiting time. Based on this model, conditions are presented under which a one-wafer cyclic schedule with the lower bound of cycle time can be found. With the derived conditions, an algorithm is developed to find such a schedule and optimally configure buffer spaces. The algorithm requires only simple calculation to set the robots’ waiting time and buffer size. Illustrative examples are presented to demonstrate the proposed method. [ABSTRACT FROM PUBLISHER]
- Subjects :
- *PETRI nets
*TOPOLOGY
*CONFIGURATION management
Subjects
Details
- Language :
- English
- ISSN :
- 21682216
- Volume :
- 46
- Issue :
- 10
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Systems, Man & Cybernetics. Systems
- Publication Type :
- Academic Journal
- Accession number :
- 118110124
- Full Text :
- https://doi.org/10.1109/TSMC.2015.2501232