Pixel-based absolute surface metrology by three flat test with shifted and rotated maps.

In traditional three flat test, it only provides the absolute profile along one surface diameter. In this paper, an absolute testing algorithm based on shift-rotation with three flat test has been proposed to reconstruct two-dimensional surface exactly. Pitch and yaw error during shift procedure is analyzed and compensated in our method. Compared with multi-rotation method proposed before, it only needs a 90° rotation and a shift, which is easy to carry out especially in condition of large size surface. It allows pixel level spatial resolution to be achieved without interpolation or assumption to the test surface. In addition, numerical simulations and optical tests are implemented and show the high accuracy recovery capability of the proposed method. [ABSTRACT FROM AUTHOR]