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Kerr nonlinearity induced four-wave mixing of CMOS-compatible PECVD deposited ultra-Si-rich-nitride.
- Source :
-
Journal of Applied Physics . Jul2020, Vol. 128 Issue 1, p1-7. 7p. 1 Diagram, 4 Graphs. - Publication Year :
- 2020
-
Abstract
- Benefitting from low propagation loss and complementary metal–oxide–semiconductor compatibility, Si 3 N 4 is heavily explored for the applications of nonlinear optical signal processing. However, the Si 3 N 4 waveguide is limited by its low optical Kerr nonlinearity. In this work, we introduce highly nonlinear ultra-Si-rich-nitride (USRN) deposited by the plasma enhanced chemical vapor deposition system. The measured linear refractive index of USRN is 3.09 at a wavelength of 1550 nm, while the Kerr nonlinearity of the USRN waveguide is experimentally extracted with a value of 2.25 × 10 − 17 m 2 /W. Moreover, a broadband wavelength conversion ranging from S-band to L-band by a four-wave-mixing experiment is realized via designed USRN waveguide with a relatively short length of 3 mm. The measured bandwidth is 190 nm with a continuous-wave pump laser located at 1530 nm. The conversion efficiency is measured approximately − 48 dB under a relatively low pump power of 7 dBm. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 128
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 144426126
- Full Text :
- https://doi.org/10.1063/5.0006151