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Impedance-frequency characteristics of metal-oxide-semiconductor structures on polycrystalline silicon.
- Source :
-
Journal of Applied Physics . 2/1/1988, Vol. 63 Issue 3, p934. 4p. 3 Diagrams, 1 Chart, 3 Graphs. - Publication Year :
- 1988
-
Abstract
- Focuses on a study that reported the variations in impedance with frequency of metal-oxide-semiconductor structures on polycrystalline silicon. Methods; Discussion; Conclusion.
- Subjects :
- *METAL oxide semiconductors
*POLYCRYSTALS
*SILICON
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 63
- Issue :
- 3
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7646473
- Full Text :
- https://doi.org/10.1063/1.340036