The Application of Solid Source Diffusion in the Vertical Replacement-Gate (VRG) MOSFET.

Details

Language :

English

ISSN :

19464274

Volume :

610

Issue :

1

Database :

Complementary Index

Journal :

MRS Online Proceedings Library

Publication Type :

Conference

Accession number :

147384760

Full Text :

https://doi.org/10.1557/PROC-610-B3.2