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Fabrication of MISFET exhibiting normally-off characteristics using a single-crystalline InGaO3(ZnO)5 thin film.

Authors :
Nomura, K.
Ohta, H.
Ueda, K.
Kamiya, T.
Hirano, M.
Hosono, H.
Source :
MRS Online Proceedings Library; 2002, Vol. 747 Issue 1, p1-6, 6p
Publication Year :
2002

Details

Language :
English
ISSN :
19464274
Volume :
747
Issue :
1
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
147732229
Full Text :
https://doi.org/10.1557/PROC-747-V2.6