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Effects of Structural Properties of Hf-Based Gate Stack on Transistor Performance.
- Source :
- MRS Online Proceedings Library; 2004, Vol. 811 Issue 1, p176-180, 5p
- Publication Year :
- 2004
Details
- Language :
- English
- ISSN :
- 19464274
- Volume :
- 811
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- MRS Online Proceedings Library
- Publication Type :
- Conference
- Accession number :
- 148699805
- Full Text :
- https://doi.org/10.1557/PROC-811-D2.6