Erratum: "Modeling the temporal evolution and stability of thin evaporating films for wafer surface processing" [J. Chem. Phys. 157, 084706 (2022)].

Subjects

Subjects :

THIN films

Details

Language :

English

ISSN :

00219606

Volume :

161

Issue :

13

Database :

Complementary Index

Journal :

Journal of Chemical Physics

Publication Type :

Academic Journal

Accession number :

180155634

Full Text :

https://doi.org/10.1063/5.0237668