Electrical Probe Diagnostics of the Hollow Cathode Plasma Jet System for Deposition of TiO x Thin Films.

Details

Language :

English

ISSN :

08631042

Volume :

48

Issue :

5-7

Database :

Complementary Index

Journal :

Contributions to Plasma Physics

Publication Type :

Academic Journal

Accession number :

62414222

Full Text :

https://doi.org/10.1002/ctpp.200810085