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A study of the linearity of transfer leaks and a helium leak detector.
- Source :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1990, Vol. 8 Issue 6, p4086-4091, 6p
- Publication Year :
- 1990
Details
- Language :
- English
- ISSN :
- 07342101
- Volume :
- 8
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
- Publication Type :
- Academic Journal
- Accession number :
- 74330707
- Full Text :
- https://doi.org/10.1116/1.576444