Analysis of elastic properties of textured thin films.

Authors :: Akiniwa, Y.
Machiya, S.
Serizawa, K.
Tanaka, K.
Source :: Micro-Nanomechatronics & Human Science, 2004 & the Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004; 2004, p75-80, 6p
Publication Year :: 2004

Language :: English
ISBNs :: 9780780386075
Database :: Complementary Index
Journal :: Micro-Nanomechatronics & Human Science, 2004 & the Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004
Publication Type :: Conference
Accession number :: 81190499
Full Text :: https://doi.org/10.1109/MHS.2004.1421280