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Embedded ferroelectric memory using a 130-nm 5 metal layer Cu / FSG logic process.
- Source :
- Proceedings 2004 IEEE Computational Systems Bioinformatics Conference; 2004, p153-154, 2p
- Publication Year :
- 2004
Details
- Language :
- English
- ISBNs :
- 9780780387263
- Database :
- Complementary Index
- Journal :
- Proceedings 2004 IEEE Computational Systems Bioinformatics Conference
- Publication Type :
- Conference
- Accession number :
- 81259526
- Full Text :
- https://doi.org/10.1109/NVMT.2004.1380833