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Implementation of In-Line TDDB Testing for Gate Oxide Reliability Improvement.

Authors :
Aldridge, B.
Zeglinski, D.
Vadipour, M.
Source :
International Integrated Reliability Workshop Final Report; 1993, p68-78, 11p
Publication Year :
1993

Details

Language :
English
Database :
Complementary Index
Journal :
International Integrated Reliability Workshop Final Report
Publication Type :
Conference
Accession number :
92189068
Full Text :
https://doi.org/10.1109/IRWS.1993.666294