Anisotropic etching of silicon in (CH/sub 3/)/sub 4/NOH solutions.

Authors :: Tabata, O.
Asahi, R.
Funabashi, H.
Sugiyama, S.
Source :: TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors & Actuators Digest of Technical Papers; 1991, p811-814, 4p
Publication Year :: 1991

Language :: English
ISBNs :: 9780879425852
Database :: Complementary Index
Journal :: TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors & Actuators Digest of Technical Papers
Publication Type :: Conference
Accession number :: 92361787
Full Text :: https://doi.org/10.1109/SENSOR.1991.149007