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Spark assisted chemical engraving (SACE) in microfactory

Authors :
Wüthrich, R
Fujisaki, K
Couthy, Ph
Hof, L A
Bleuler, H
Source :
Journal of Micromechanics and Microengineering; October 2005, Vol. 15 Issue: 10 pS276-S280, 5p
Publication Year :
2005

Abstract

Spark assisted chemical engraving (SACE) is a method for 3D microstructuring of glass or other non-conductive materials with high aspect ratio and smooth surface quality. It is applicable for rapid prototyping of microfluidic devices, for MEMS interfacing and similar applications. Typical feature size is in the hundreds of micrometres, down to a few tens of micrometres. It is a table-top technology requiring no clean rooms and no masks and with very modest space usage. It is thus well suited for microfactories. This paper gives a basic introduction to SACE and some machining examples.

Details

Language :
English
ISSN :
09601317 and 13616439
Volume :
15
Issue :
10
Database :
Supplemental Index
Journal :
Journal of Micromechanics and Microengineering
Publication Type :
Periodical
Accession number :
ejs56193421
Full Text :
https://doi.org/10.1088/0960-1317/15/10/S04