Back to Search
Start Over
Spark assisted chemical engraving (SACE) in microfactory
- Source :
- Journal of Micromechanics and Microengineering; October 2005, Vol. 15 Issue: 10 pS276-S280, 5p
- Publication Year :
- 2005
-
Abstract
- Spark assisted chemical engraving (SACE) is a method for 3D microstructuring of glass or other non-conductive materials with high aspect ratio and smooth surface quality. It is applicable for rapid prototyping of microfluidic devices, for MEMS interfacing and similar applications. Typical feature size is in the hundreds of micrometres, down to a few tens of micrometres. It is a table-top technology requiring no clean rooms and no masks and with very modest space usage. It is thus well suited for microfactories. This paper gives a basic introduction to SACE and some machining examples.
Details
- Language :
- English
- ISSN :
- 09601317 and 13616439
- Volume :
- 15
- Issue :
- 10
- Database :
- Supplemental Index
- Journal :
- Journal of Micromechanics and Microengineering
- Publication Type :
- Periodical
- Accession number :
- ejs56193421
- Full Text :
- https://doi.org/10.1088/0960-1317/15/10/S04