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Characterization of Temporary Bonding and Laser Release Using Polyimide and a 300-nm Photolysis Polymer System for High-Throughput 3-D IC Applications
- Source :
- IEEE Transactions on Components, Packaging and Manufacturing Technology. 7:456-462
- Publication Year :
- 2017
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2017.
-
Abstract
- A new temporary bonding technology with an ultrafast laser-release process of less than 20 s is presented, where a 300-nm-thick photolysis polymer and polyimide are served as the release layer and adhesive layer, respectively. The submicrometer-thick polymer has the feature of high absorption of a 355-nm laser in contrast to polyimide during debonding procedures. In addition, the thin release layers of high chemical resistance and mechanical strength demonstrate their feasibility for handling process. Electrical characteristics of the devices before and after the laser-release process are investigated, showing no degradation. Thus, this technology scheme demonstrates its potential for temporary bonding and release in 3-D integration applications.
- Subjects :
- 010302 applied physics
chemistry.chemical_classification
Chemical resistance
Laser ablation
Materials science
business.industry
02 engineering and technology
Polymer
021001 nanoscience & nanotechnology
Laser
01 natural sciences
Industrial and Manufacturing Engineering
Electronic, Optical and Magnetic Materials
law.invention
chemistry
Anodic bonding
law
0103 physical sciences
Optoelectronics
Adhesive
Electrical and Electronic Engineering
0210 nano-technology
business
Layer (electronics)
Polyimide
Subjects
Details
- ISSN :
- 21563985 and 21563950
- Volume :
- 7
- Database :
- OpenAIRE
- Journal :
- IEEE Transactions on Components, Packaging and Manufacturing Technology
- Accession number :
- edsair.doi...........0dc2fe3c4c257c4d78dbc426af7431ef