Superresolution lithography from the viewpoint of partially coherent imaging theory Part II: Isolated structures

From the viewpoint of partially coherent imaging theory we discuss the possibilities of modern optical methods in superresolution lithography for imaging of isolated structures. It could be shown that small isolated structures are nonresolved structures in the understanding of optical imaging theory. They can be described approximately by point objects. This results in a nearly plane-wave illumination of the pupil plane, so that the image intensity is mainly determined by the special filter function.