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The importance of nucleation layer for the GaN N-face purity on the annealed Al2O3 layers deposited by atomic layer deposition
- Source :
- Materials Science and Engineering: B. 284:115850
- Publication Year :
- 2022
- Publisher :
- Elsevier BV, 2022.
Details
- ISSN :
- 09215107
- Volume :
- 284
- Database :
- OpenAIRE
- Journal :
- Materials Science and Engineering: B
- Accession number :
- edsair.doi...........284bf5fad8a4cf9e241cc01ef26f30f6
- Full Text :
- https://doi.org/10.1016/j.mseb.2022.115850