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Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers
- Publication Year :
- 2007
- Publisher :
- Trans Tech Publications Ltd., 2007.
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........2f042649e43c2ab1bb1d2f2a2213f596
- Full Text :
- https://doi.org/10.4028/0-87849-430-8.263