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Development of High-Density Metal-Insulator-Metal Capacitors with Top and Side Contacts

Authors :
Dewei Xu
Junyang Chen
Jimmy Koh
Emiko Motoyama
Meena Rajachidambaram
Jean Raymond Fakhoury
Radhika Kamlapurkar
Rachel Gantt
Daniel Palmieri
J. Nicholas Alexander
Bas Korevaar
Edward Gordon
Thomas Kauerauf
Teck Jung Tang
Robert Fox
Seung-Yeop Kook
Owen Hu
Source :
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Publication Year :
2023
Publisher :
IEEE, 2023.

Details

Database :
OpenAIRE
Journal :
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Accession number :
edsair.doi...........54f3b90aedb94f6e7dd6d4f5b1d396f1

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