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Ion beam sputtered Y2O3

Authors :
Carmen S. Menoni
L. M. Imbler
Peter Langston
Dinesh Patel
Luke A. Emmert
Martin M. Fejer
Roger K. Route
A. S. Markosyan
Wolfgang Rudolph
Source :
SPIE Proceedings.
Publication Year :
2012
Publisher :
SPIE, 2012.

Abstract

We have investigated the ion beam sputtering (IBS) of Y2O3 as an alternative to HfO2 for high index layers in interference coatings for high power lasers. We present results on structural and optical properties of Y2O3 deposited from an oxide target. The IBS Y2O3 films are amorphous with a surface roughness of

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........641238c6a58572fbad013300c9160824
Full Text :
https://doi.org/10.1117/12.976808