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Ion beam sputtered Y2O3
- Source :
- SPIE Proceedings.
- Publication Year :
- 2012
- Publisher :
- SPIE, 2012.
-
Abstract
- We have investigated the ion beam sputtering (IBS) of Y2O3 as an alternative to HfO2 for high index layers in interference coatings for high power lasers. We present results on structural and optical properties of Y2O3 deposited from an oxide target. The IBS Y2O3 films are amorphous with a surface roughness of
Details
- ISSN :
- 0277786X
- Database :
- OpenAIRE
- Journal :
- SPIE Proceedings
- Accession number :
- edsair.doi...........641238c6a58572fbad013300c9160824
- Full Text :
- https://doi.org/10.1117/12.976808