Femtosecond laser modification combined with chemical etching to achieve high-quality cutting of millimeter-thick fused silica

Subjects

Subjects :

Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

Details

ISSN :

00304026

Volume :

269

Database :

OpenAIRE

Journal :

Optik

Accession number :

edsair.doi...........66263124ed3ca4f67eea085ba20cd8ae

Full Text :

https://doi.org/10.1016/j.ijleo.2022.169861