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Low Temperature Selective and Lateral Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates

Authors :
Chacko Jacob
Shigehiro Nishino
Pirouz Pirouz
Source :
Materials Science Forum. :127-130
Publication Year :
2001
Publisher :
Trans Tech Publications, Ltd., 2001.

Subjects

Subjects :
Materials science
Silicon
business.industry
Mechanical Engineering
chemistry.chemical_element
Condensed Matter Physics
Epitaxy
chemistry.chemical_compound
chemistry
Mechanics of Materials
Silicon carbide
Optoelectronics
General Materials Science
business

Details

ISSN :
16629752
Database :
OpenAIRE
Journal :
Materials Science Forum
Accession number :
edsair.doi...........9ef2f1f74d44ef230b6d4f069b58e70b

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Authors Abstract Subjects Details