Preferential sputtering and mass conservation in AES and SIMS depth profiling

The preferential sputtering and the mass conservation upon AES and SIMS depth profiling have been evaluated quantitatively based on the Mixing-Roughness-Information (MRI) model. The simulation results demonstrated that (a) the preferential sputtering plays an important role in the reconstruction of the true concentration-depth profile; (b) the mass conservation is a nature consequence in SIMS depth profiling but it is not fulfilled in AES depth profiling; (c) the layer thickness can be determined by applying the mass conservation law in AES depth profiling if the atoms preferentially sputtered out from the mixing zone are taken into account.