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Failure Analysis of 65nm CMOS Integrated Nanoscale ReRAM Devices on a 300mm Wafer Platform

Authors :
Maximilian Liehr
Jubin Hazra
Karsten Beckmann
Nathaniel Cady
Source :
2022 IEEE International Integrated Reliability Workshop (IIRW).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 IEEE International Integrated Reliability Workshop (IIRW)
Accession number :
edsair.doi...........f76dc66a14ce82a98a07b62e1d0accad
Full Text :
https://doi.org/10.1109/iirw56459.2022.10032747