Online Test Microstructures of the Thermophysical Properties of MEMS Conducting Films

Subjects

Subjects :

Microelectromechanical systems
Materials science
Online test
Nanotechnology
Microstructure

Details

ISBN :

978-94-007-6725-6
978-981-10-5944-5

ISBNs :

9789400767256 and 9789811059445

Database :

OpenAIRE

Journal :

Toxinology ISBN: 9789400767256, Micro/Nano Technologies ISBN: 9789811059445

Accession number :

edsair.doi.dedup.....4a959ec54b227e34d2de233584093d46

Full Text :

https://doi.org/10.1007/978-981-10-2798-7_6-1