Investigation of 2 inch SIC layers grown in a resistively-heated LP-CVD reactor with horizontal 'hot-walls'

Authors :: Thierry Chassagne
Carole Balloud
Sandrine Juillaguet
André Leycuras
Hervé Peyre
Philippe Arcade
NOVASiC
Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA)
Université Nice Sophia Antipolis (... - 2019) (UNS)
COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA)
Groupe d'étude des semiconducteurs (GES)
Centre National de la Recherche Scientifique (CNRS)-Université Montpellier 2 - Sciences et Techniques (UM2)
Source :: Scopus-Elsevier, Materials Science Forum, HAL
Abstract: International audience

Subjects :: 010302 applied physics
Materials science
Waste management
Mechanical Engineering
Metallurgy
02 engineering and technology
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Mechanics of Materials
0103 physical sciences
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
General Materials Science
0210 nano-technology
ComputingMilieux_MISCELLANEOUS

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