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Latent reliability degradation of ultra-thin oxides after heavy ion and γ-ray irradiation

Authors :
C.E. Weintraub
Bin Wang
Eric M. Vogel
J.R. Conley
Joseph Bernstein
John S. Suehle
A.H. Johnston
Source :
Scopus-Elsevier
Publication Year :
2003
Publisher :
IEEE, 2003.

Abstract

We studied the effects of heavy ion and /spl gamma/-ray irradiation on radiation-induced leakage current (RILC) and time-dependent dielectric breakdown (TDDB) life distributions of ultra-thin oxides (

Subjects

Subjects :
Materials science
Dielectric strength
Annealing (metallurgy)
business.industry
Oxide
Gamma ray irradiation
Time-dependent gate oxide breakdown
chemistry.chemical_compound
chemistry
Optoelectronics
Heavy ion
Irradiation
business
Gamma irradiation

Details

Database :
OpenAIRE
Journal :
2001 IEEE International Integrated Reliability Workshop. Final Report (Cat. No.01TH8580)
Accession number :
edsair.doi.dedup.....65fc2f517ddf95766d16ff8b100da8d4
Full Text :
https://doi.org/10.1109/irws.2001.993910
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