The Effect of Si Content on the Performance of Magnetron Sputtering Hf-Si-N Films

In this research a series of Hf-Si-N composite films with different Si contents are prepared by magnetron sputtering on titanium alloy surface. The element valences of the films are studied by using of X-ray photoelectron spectroscopy (XPS). The tribological property, nano-mechanical performance, biocompatibility of the films is examined through ball-on-disk tester, nano- mechanical test system and platelet adhesion experiment, respectively, and the effect of Si contents on the performance is investigated. The results show that the Hf-Si-N film has good wear resistance, nano-mechanical properties and biocompatibility. The film is mainly composed of HfN and Si3N4. Its nano-hardness first increases then decreases along with the addition of Si and the film achieves the maximum hardness and the minimum friction coefficient when the content of Si is 6.99 at. %.