ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties Within and Outside the 'Atomic Layer Deposition Window'

Subjects

Subjects :

010302 applied physics
Thesaurus (information retrieval)
Materials science
Chemical substance
business.industry
Window (computing)
02 engineering and technology
Surfaces and Interfaces
Plasma
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Atomic layer deposition
0103 physical sciences
Materials Chemistry
Optoelectronics
Electrical and Electronic Engineering
Thin film
0210 nano-technology
business
Science, technology and society
Material properties

Details

Language :

English

ISSN :

18626319 and 18626300

Volume :

217

Issue :

8

Database :

OpenAIRE

Journal :

physica status solidi (a)

Accession number :

edsair.doi.dedup.....b881fc89bceaf7ed081f425255b007dd

Full Text :

https://doi.org/10.1002/pssa.201900256