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Your search keyword '"Chilton, N. B."' showing total 6 results
Start Over Author "Chilton, N. B." Publisher american institute of physics
6 results on '"Chilton, N. B."'

1. Study of defects in silicon dioxide films on Si(100) by a variable-energy positron beam.

Author

Fujinami, M., Chilton, N. B., Ishii, K., and Ohki, Y.

Subjects
*AMORPHOUS semiconductors, *SILICA, *THIN films, *OXIDATION, *CHEMICAL vapor deposition
Abstract

Presents a study which investigated the defects of amorphous silicon dioxide films grown by thermal and plasma chemical vapor deposition in a tetraethylorthosilicate and oxygen atmosphere. DOppler broadening parameter in the silicon dioxide film; Experimentation on the oxidation of identical wafer; Results of the angular correlation of annihilation radiation.

Published
1993
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2. A slow positron beam study of vacancy formation in fluorine-implanted silicon.

Author

Fujinami, M. and Chilton, N. B.

Subjects
*POSITRON beams, *SILICON, *ION implantation, *SURFACE defects
Abstract

Discusses the results of a study on vacancy formation in fluorine-implanted silicon using a slow positron beam. Consequence of positron diffusion and the breadth of the positron implantation profile; Implications of the vacancies caused by ion implantation; Techniques used in demonstrating the correlation of defects present and vacancies in silicon.

Published
1993
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